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Keywords = off-state stress

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13 pages, 2498 KiB  
Article
Evaluation of Dynamic On-Resistance and Trapping Effects in GaN on Si HEMTs Using Rectangular Gate Voltage Pulses
by Pasquale Cusumano, Alessandro Sirchia and Flavio Vella
Electronics 2025, 14(14), 2791; https://doi.org/10.3390/electronics14142791 - 11 Jul 2025
Cited by 1 | Viewed by 342
Abstract
Dynamic on-resistance (RON) of commercial GaN on Si normally off high-electron-mobility transistor (HEMT) devices is a very important parameter because it is responsible for conduction losses that limit the power conversion efficiency of high-power switching converters. Due to charge trapping effects, [...] Read more.
Dynamic on-resistance (RON) of commercial GaN on Si normally off high-electron-mobility transistor (HEMT) devices is a very important parameter because it is responsible for conduction losses that limit the power conversion efficiency of high-power switching converters. Due to charge trapping effects, dynamic RON is always higher than in DC, a behavior known as current collapse. To study how short-time dynamics of charge trapping and release affects RON we use rectangular 0–5 V gate voltage pulses with durations in the 1 μs to 100 μs range. Measurements are first carried out for single pulses of increasing duration, and it is found that RON depends on both pulse duration and drain current ID, being higher at shorter pulse durations and lower ID. For a train of five pulses, RON decreases with pulse number, reaching a steady state after a time interval of 100 μs. The response to a five pulses train is compared to that of a square-wave signal to study the time evolution of RON toward a dynamic steady state. The DC RON is also measured, and it is a factor of ten smaller than dynamic RON at the same ID. This confirms that a reduction in trapped charges takes place in DC as compared to the square-wave switching operation. Additional off-state stress tests at VDS = 55 V reveal the presence of residual surface traps in the drain access region, leading to four times increase in RON in comparison to pristine devices. Finally, the dynamic RON is also measured by the double-pulse test (DPT) technique with inductive load, giving a good agreement with results from single-pulse measurements. Full article
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13 pages, 2287 KiB  
Article
Damage Mechanism Analysis of High Field Stress on Cascode GaN HEMT Power Devices
by Shuo Su, Yanrong Cao, Weiwei Zhang, Xinxiang Zhang, Chuan Chen, Linshan Wu, Zhixian Zhang, Miaofen Li, Ling Lv, Xuefeng Zheng, Wenchao Tian, Xiaohua Ma and Yue Hao
Micromachines 2025, 16(7), 729; https://doi.org/10.3390/mi16070729 - 22 Jun 2025
Viewed by 1438
Abstract
A series of problems, such as material damage and charge trap, can be caused when GaN HEMT power devices are subjected to high field stress in the off-state. The reliability of GaN HEMT power devices affects the safe operation of the entire power [...] Read more.
A series of problems, such as material damage and charge trap, can be caused when GaN HEMT power devices are subjected to high field stress in the off-state. The reliability of GaN HEMT power devices affects the safe operation of the entire power electronic system and seriously threatens the stability of the equipment. Therefore, it is particularly important to study the damage mechanism of GaN HEMT power devices under high field conditions. This work studies the degradation of Cascode GaN HEMT power devices under off-state high-field stress and analyzes the related damage mechanism. It is found that the high field stress in the off-state will generate a positive charge trap in the oxide layer of the MOS device in the cascade structure. Moreover, defects occur in the barrier layer and buffer layer of GaN HEMT devices, and the threshold voltage of Cascode GaN HEMT power devices is negatively shifted, and the transconductance is reduced. This study provides an important theoretical basis for the reliability of GaN HEMT power devices in complex and harsh environments. Full article
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14 pages, 3948 KiB  
Article
Using Triangular Gate Voltage Pulses to Evaluate Hysteresis and Charge Trapping Effects in GaN on Si HEMTs
by Pasquale Cusumano, Flavio Vella and Alessandro Sirchia
Electronics 2025, 14(10), 1991; https://doi.org/10.3390/electronics14101991 - 13 May 2025
Cited by 1 | Viewed by 529
Abstract
Charge carrier traps due to crystal defects in GaN on Si HEMT devices are responsible for dynamic performance degradation, long-term reliability limitations, and peculiar failure modes. The behavior of traps depends on many variables including heterostructure quality, the specific device structure, and operating [...] Read more.
Charge carrier traps due to crystal defects in GaN on Si HEMT devices are responsible for dynamic performance degradation, long-term reliability limitations, and peculiar failure modes. The behavior of traps depends on many variables including heterostructure quality, the specific device structure, and operating conditions. To study the short time dynamics of charge trapping and release on the threshold voltage shift and hysteresis of commercial normally off GaN HEMTs we use triangular 0–5 V gate voltage pulses in the μs to ms duration range. Measurements are performed for single pulses by varying pulse duration and for a train of a few pulses by varying their number. The results indicate that hysteresis and related threshold voltage shift occur after repeated pulses, suggesting an accumulation of trapped charges. However, for a triangular wave hysteresis vanishes, meaning that a dynamic balance between charge trapping and release is established in the device. This can be considered as a positive indicator of device robustness and reliability. The same method, used to measure the gate threshold voltage shift and dynamic RON after a 30 min off-state DC stress at VDS = 55 V with a floating gate, highlights an appreciable performance degradation of the device. Full article
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12 pages, 5077 KiB  
Article
Optimization of Low-Voltage p-GaN Gate HEMTs for High-Efficiency Secondary Power Conversion
by Lili Zhai, Xiangdong Li, Jian Ji, Lu Yu, Liang Chen, Yaoming Chen, Haonan Xia, Zhanfei Han, Junbo Wang, Xi Jiang, Song Yuan, Tao Zhang, Yue Hao and Jincheng Zhang
Micromachines 2025, 16(5), 556; https://doi.org/10.3390/mi16050556 - 2 May 2025
Viewed by 599
Abstract
The explosive demand for high-performance secondary power sources in artificial intelligence (AI) has brought significant opportunities for low-voltage GaN devices. This paper focuses on research on high-efficiency and high-reliability low-voltage p-GaN gate HEMTs with a gate–drain distance, LGD, of 1 to [...] Read more.
The explosive demand for high-performance secondary power sources in artificial intelligence (AI) has brought significant opportunities for low-voltage GaN devices. This paper focuses on research on high-efficiency and high-reliability low-voltage p-GaN gate HEMTs with a gate–drain distance, LGD, of 1 to 3 μm in our pilot line, manufactured on 6-inch Si using a CMOS-compatible process, with extraordinary wafer-level uniformity. Specifically, these fabricated p-GaN gate HEMTs with an LGD of 1.5 μm demonstrate a blocking voltage of over 180 V and a high VTH of 1.6 V and exhibit a low RON of 2.8 Ω·mm. It is found that device structure optimization can significantly enhance device reliability. That is, through the dedicated optimization of source field plate structure and interlayer dielectric (ILD) thickness, the dynamic ON-resistance, RON, degradation of devices with an LGD of 1.5 µm was successfully suppressed from 60% to 20%, and the VTH shift was significantly reduced from 1.1 to 0.5 V. Further, the devices also passed preliminary gate bias stress and high-voltage OFF-state stress tests, providing guidance for preparing high-performance, low-voltage p-GaN gate HEMTs in the future. Full article
(This article belongs to the Section E:Engineering and Technology)
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11 pages, 801 KiB  
Article
Characterization of Trap States in AlGaN/GaN MIS-High-Electron-Mobility Transistors under Semi-on-State Stress
by Ye Liang, Jiachen Duan, Ping Zhang, Kain Lu Low, Jie Zhang and Wen Liu
Nanomaterials 2024, 14(18), 1529; https://doi.org/10.3390/nano14181529 - 20 Sep 2024
Cited by 2 | Viewed by 2000
Abstract
Devices under semi-on-state stress often suffer from more severe current collapse than when they are in the off-state, which causes an increase in dynamic on-resistance. Therefore, characterization of the trap states is necessary. In this study, temperature-dependent transient recovery current analysis determined a [...] Read more.
Devices under semi-on-state stress often suffer from more severe current collapse than when they are in the off-state, which causes an increase in dynamic on-resistance. Therefore, characterization of the trap states is necessary. In this study, temperature-dependent transient recovery current analysis determined a trap energy level of 0.08 eV under semi-on-state stress, implying that interface traps are responsible for current collapse. Multi-frequency capacitance–voltage (C-V) testing was performed on the MIS diode, calculating that interface trap density is in the range of 1.37×1013 to 6.07×1012cm2eV1 from ECET=0.29 eV to 0.45 eV. Full article
(This article belongs to the Special Issue Epitaxial Growth of III-Nitride Hetero- and Nanostructures)
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21 pages, 10710 KiB  
Article
Effects of Laser Treatment of Terbium-Doped Indium Oxide Thin Films and Transistors
by Rihui Yao, Dingrong Liu, Nanhong Chen, Honglong Ning, Guoping Su, Yuexin Yang, Dongxiang Luo, Xianzhe Liu, Haoyan Chen, Muyun Li and Junbiao Peng
Nanomaterials 2024, 14(11), 908; https://doi.org/10.3390/nano14110908 - 22 May 2024
Cited by 2 | Viewed by 1687
Abstract
In this study, a KrF excimer laser with a high-absorption coefficient in metal oxide films and a wavelength of 248 nm was selected for the post-processing of a film and metal oxide thin film transistor (MOTFT). Due to the poor negative bias illumination [...] Read more.
In this study, a KrF excimer laser with a high-absorption coefficient in metal oxide films and a wavelength of 248 nm was selected for the post-processing of a film and metal oxide thin film transistor (MOTFT). Due to the poor negative bias illumination stress (NBIS) stability of indium gallium zinc oxide thin film transistor (IGZO-TFT) devices, terbium-doped Tb:In2O3 material was selected as the target of this study. The XPS test revealed the presence of both Tb3+ and Tb4+ ions in the Tb:In2O3 film. It was hypothesized that the peak of the laser thermal effect was reduced and the action time was prolonged by the f-f jump of Tb3+ ions and the C-T jump of Tb4+ ions during the laser treatment. Studies related to the treatment of Tb:In2O3 films with different laser energy densities have been carried out. It is shown that as the laser energy density increases, the film density increases, the thickness decreases, the carrier concentration increases, and the optical band gap widens. Terbium has a low electronegativity (1.1 eV) and a high Tb-O dissociation energy (707 kJ/mol), which brings about a large lattice distortion. The Tb:In2O3 films did not show significant crystallization even under laser energy density treatment of up to 250 mJ/cm2. Compared with pure In2O3-TFT, the doping of Tb ions effectively reduces the off-state current (1.16 × 10−11 A vs. 1.66 × 10−12 A), improves the switching current ratio (1.63 × 106 vs. 1.34 × 107) and improves the NBIS stability (ΔVON = −10.4 V vs. 6.4 V) and positive bias illumination stress (PBIS) stability (ΔVON = 8 V vs. 1.6 V). Full article
(This article belongs to the Special Issue Nano-Structured Thin Films: Growth, Characteristics, and Application)
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13 pages, 2326 KiB  
Article
RC-Effects on the Oxide of SOI MOSFET under Off-State TDDB Degradation: RF Characterization and Modeling
by Alan Otero-Carrascal, Dora Chaparro-Ortiz, Purushothaman Srinivasan, Oscar Huerta, Edmundo Gutiérrez-Domínguez and Reydezel Torres-Torres
Micromachines 2024, 15(2), 252; https://doi.org/10.3390/mi15020252 - 7 Feb 2024
Cited by 2 | Viewed by 1886
Abstract
Based on S-parameter measurements, the effect of dynamic trapping and de-trapping of charge in the gate oxide, the increase of dielectric loss due to polarization, and the impact of leakage current on the small-signal input impedance at RF is analyzed and represented. [...] Read more.
Based on S-parameter measurements, the effect of dynamic trapping and de-trapping of charge in the gate oxide, the increase of dielectric loss due to polarization, and the impact of leakage current on the small-signal input impedance at RF is analyzed and represented. This is achieved by systematically extracting the corresponding model parameters from single device measurements at different frequency ranges, and then the methodology is applied to analyze the evolution of these parameters when the device is submitted to non-conducting electrical stress. This approach not only allows to inspect the impact of effects not occurring under DC conditions, such as the current due to the time varying dielectric polarization, but also to clearly distinguish effects in accordance with the functional form of their contribution to the device’s impedance. In fact, it is shown that minor changes in the model of the gate capacitance by including additional resistive and capacitive components allows for an excellent model-experiment correlation up to 30 GHz. Moreover, the accuracy of the correlation is shown to be maintained when applying the proposal to the device under different gate-to-source bias conditions and at several stages during off-state degradation. Full article
(This article belongs to the Special Issue Reliability Issues in Advanced Transistor Nodes)
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12 pages, 6501 KiB  
Article
An Investigation of Body Diode Reliability in Commercial 1.2 kV SiC Power MOSFETs with Planar and Trench Structures
by Jiashu Qian, Limeng Shi, Michael Jin, Monikuntala Bhattacharya, Atsushi Shimbori, Hengyu Yu, Shiva Houshmand, Marvin H. White and Anant K. Agarwal
Micromachines 2024, 15(2), 177; https://doi.org/10.3390/mi15020177 - 25 Jan 2024
Cited by 9 | Viewed by 3535
Abstract
The body diode degradation in SiC power MOSFETs has been demonstrated to be caused by basal plane dislocation (BPD)-induced stacking faults (SFs) in the drift region. To enhance the reliability of the body diode, many process and structural improvements have been proposed to [...] Read more.
The body diode degradation in SiC power MOSFETs has been demonstrated to be caused by basal plane dislocation (BPD)-induced stacking faults (SFs) in the drift region. To enhance the reliability of the body diode, many process and structural improvements have been proposed to eliminate BPDs in the drift region, ensuring that commercial SiC wafers for 1.2 kV devices are of high quality. Thus, investigating the body diode reliability in commercial planar and trench SiC power MOSFETs made from SiC wafers with similar quality has attracted attention in the industry. In this work, current stress is applied on the body diodes of 1.2 kV commercial planar and trench SiC power MOSFETs under the off-state. The results show that the body diodes of planar and trench devices with a shallow P+ depth are highly reliable, while those of the trench devices with the deep P+ implantation exhibit significant degradation. In conclusion, the body diode degradation in trench devices is mainly influenced by P+ implantation-induced BPDs. Therefore, a trade-off design by controlling the implantation depth/dose and maximizing the device performance is crucial. Moreover, the deep JFET design is confirmed to further improve the body diode reliability in planar devices. Full article
(This article belongs to the Special Issue III-V/III-N Materials and Devices, 2nd Edition)
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21 pages, 6141 KiB  
Review
The Understanding and Compact Modeling of Reliability in Modern Metal–Oxide–Semiconductor Field-Effect Transistors: From Single-Mode to Mixed-Mode Mechanisms
by Zixuan Sun, Sihao Chen, Lining Zhang, Ru Huang and Runsheng Wang
Micromachines 2024, 15(1), 127; https://doi.org/10.3390/mi15010127 - 12 Jan 2024
Cited by 6 | Viewed by 3419
Abstract
With the technological scaling of metal–oxide–semiconductor field-effect transistors (MOSFETs) and the scarcity of circuit design margins, the characteristics of device reliability have garnered widespread attention. Traditional single-mode reliability mechanisms and modeling are less sufficient to meet the demands of resilient circuit designs. Mixed-mode [...] Read more.
With the technological scaling of metal–oxide–semiconductor field-effect transistors (MOSFETs) and the scarcity of circuit design margins, the characteristics of device reliability have garnered widespread attention. Traditional single-mode reliability mechanisms and modeling are less sufficient to meet the demands of resilient circuit designs. Mixed-mode reliability mechanisms and modeling have become a focal point of future designs for reliability. This paper reviews the mechanisms and compact aging models of mixed-mode reliability. The mechanism and modeling method of mixed-mode reliability are discussed, including hot carrier degradation (HCD) with self-heating effect, mixed-mode aging of HCD and Bias Temperature Instability (BTI), off-state degradation (OSD), on-state time-dependent dielectric breakdown (TDDB), and metal electromigration (EM). The impact of alternating HCD-BTI stress conditions is also discussed. The results indicate that single-mode reliability analysis is insufficient for predicting the lifetime of advanced technology and circuits and provides guidance for future mixed-mode reliability analysis and modeling. Full article
(This article belongs to the Special Issue Reliability Issues in Advanced Transistor Nodes)
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7 pages, 2120 KiB  
Communication
N-Channel MOSFET Reliability Issue Induced by Visible/Near-Infrared Photons in Image Sensors
by Chun-Hsien Liu and Sheng-Di Lin
Sensors 2023, 23(23), 9586; https://doi.org/10.3390/s23239586 - 3 Dec 2023
Viewed by 1510
Abstract
Image sensors such as single-photon avalanched diode (SPAD) arrays typically adopt in-pixel quenching and readout circuits, and the under-illumination first-stage readout circuits often employs high-threshold input/output (I/O) or thick-oxide metal-oxide-semiconductor field-effect transistors (MOSFETs). We have observed reliability issues with high-threshold n-channel MOSFETs when [...] Read more.
Image sensors such as single-photon avalanched diode (SPAD) arrays typically adopt in-pixel quenching and readout circuits, and the under-illumination first-stage readout circuits often employs high-threshold input/output (I/O) or thick-oxide metal-oxide-semiconductor field-effect transistors (MOSFETs). We have observed reliability issues with high-threshold n-channel MOSFETs when they are exposed to strong visible light. The specific stress conditions have been applied to observe the drain current (Id) variations as a function of gate voltage. The experimental results indicate that photo-induced hot electrons generate interface trap states, leading to Id degradation including increased off-state current (Ioff) and decreased on-state current (Ion). The increased Ioff further activates parasitic bipolar junction transistors (BJT). This reliability issue can be avoided by forming an inversion layer in the channel under appropriate bias conditions or by reducing the incident photon energy. Full article
(This article belongs to the Special Issue Recent Advances in CMOS Image Sensor)
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31 pages, 773 KiB  
Review
Thermal Conductivity and Temperature Dependency of Magnetorheological Fluids and Application Systems—A Chronological Review
by Seung-Bok Choi
Micromachines 2023, 14(11), 2096; https://doi.org/10.3390/mi14112096 - 13 Nov 2023
Cited by 10 | Viewed by 2826
Abstract
Many studies on magnetorheological fluid (MRF) have been carried out over the last three decades, highlighting several salient advantages, such as a fast phase change, easy control of the yield stress, and so forth. In particular, several review articles of MRF technology have [...] Read more.
Many studies on magnetorheological fluid (MRF) have been carried out over the last three decades, highlighting several salient advantages, such as a fast phase change, easy control of the yield stress, and so forth. In particular, several review articles of MRF technology have been reported over the last two decades, summarizing the development of MRFs and their applications. As specific examples, review articles have been published that include the optimization of the particles and carrier liquid to achieve minimum off-state viscosity and maximum yield stress at on-state, the formulation of many constitutive models including the Casson model and the Herschel–Bulkley (H–B) model, sedimentation enhancement using additives and nanosized particles, many types of dampers for automotive suspension and civil structures, medical and rehabilitation devices, MRF polishing technology, the methods of magnetic circuit design, and the synthesis of various controllers. More recently, the effect of the temperature and thermal conductivity on the properties of MRFs and application systems are actively being investigated by several works. However, there is no review article on this issue so far, despite the fact that the thermal problem is one of the most crucial factors to be seriously considered for the development of advanced MRFs and commercial products of application systems. In this work, studies on the thermal conductivity and temperature in MRFs themselves and their temperature-dependent application systems are reviewed, respectively, and principal results are summarized, emphasizing the following: how to reduce the temperature effect on the field-dependent properties of MRFs and how to design an application system that minimizes the thermal effect. It is noted here that the review summary is organized in a chronological format using tables. Full article
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11 pages, 3733 KiB  
Article
Experimental Study on Critical Parameters Degradation of Nano PDSOI MOSFET under TDDB Stress
by Tianzhi Gao, Jianye Yang, Hongxia Liu, Yong Lu and Changjun Liu
Micromachines 2023, 14(8), 1504; https://doi.org/10.3390/mi14081504 - 27 Jul 2023
Cited by 3 | Viewed by 2902
Abstract
In today’s digital circuits, Si-based MOS devices have become the most widely used technology in medical, military, aerospace, and aviation due to their advantages of mature technology, high performance, and low cost. With the continuous integration of transistors, the characteristic size of MOSFETs [...] Read more.
In today’s digital circuits, Si-based MOS devices have become the most widely used technology in medical, military, aerospace, and aviation due to their advantages of mature technology, high performance, and low cost. With the continuous integration of transistors, the characteristic size of MOSFETs is shrinking. Time-dependent dielectric electrical breakdown (TDDB) is still a key reliability problem of MOSFETs in recent years. Many researchers focus on the TDDB life of advanced devices and the mechanism of oxide damage, ignoring the impact of the TDDB effect on device parameters. Therefore, in this paper, the critical parameters of partially depleted silicon-on-insulator (PDSOI) under time-dependent dielectric electrical breakdown (TDDB) stress are studied. By applying the TDDB acceleration stress experiment, we obtained the degradation of the devices’ critical parameters including transfer characteristic curves, threshold voltage, off-state leakage current, and the TDDB lifetime. The results show that TDDB acceleration stress will lead to the accumulation of negative charge in the gate oxide. The negative charge affects the electric field distribution. The transfer curves of the devices are positively shifted, as is the threshold voltage. Comparing the experimental data of I/O and Core devices, we can conclude that the ultra-thin gate oxide device’s electrical characteristics are barely affected by the TDDB stress, while the opposite is true for a thick-gate oxide device. Full article
(This article belongs to the Section D:Materials and Processing)
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10 pages, 2346 KiB  
Article
Investigation of the Gate Degradation Induced by Forward Gate Voltage Stress in p-GaN Gate High Electron Mobility Transistors
by Myeongsu Chae and Hyungtak Kim
Micromachines 2023, 14(5), 977; https://doi.org/10.3390/mi14050977 - 29 Apr 2023
Cited by 4 | Viewed by 2920
Abstract
In this work, we investigated the degradation of the p-GaN gate stack induced by the forward gate voltage stress in normally off AlGaN/GaN high electron mobility transistors (HEMTs) with Schottky-type p-GaN gate. The gate stack degradations of p-GaN gate HEMTs were investigated by [...] Read more.
In this work, we investigated the degradation of the p-GaN gate stack induced by the forward gate voltage stress in normally off AlGaN/GaN high electron mobility transistors (HEMTs) with Schottky-type p-GaN gate. The gate stack degradations of p-GaN gate HEMTs were investigated by performing the gate step voltage stress and the gate constant voltage stress measurements. In the gate step voltage stress test, the positive and negative shifts of threshold voltage (VTH) depended on the range of the gate stress voltage (VG.stress) at room temperature. However, the positive shift of VTH in the small gate stress voltage was not observed at 75 and 100 °C and the negative shift of VTH was started from a lower gate voltage at a high temperature compared to room temperature. In the gate constant voltage stress test, the gate leakage current increased with three steps in the off-state current characteristics as the degradation progressed. To investigate the detailed breakdown mechanism, we measured the two terminal currents (IGD and IGS) before and after the stress test. The difference between the gate–source current and the gate–drain current in the reverse gate bias indicated that the increase of the leakage current was attributed to the degradation between the gate and the source while the drain side was not affected. Full article
(This article belongs to the Special Issue GaN-Based Semiconductor Devices, Volume II)
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17 pages, 4179 KiB  
Article
Charge Trapping and Emission Properties in CAAC-IGZO Transistor: A First-Principles Calculations
by Ziqi Wang, Nianduan Lu, Jiawei Wang, Di Geng, Lingfei Wang and Guanhua Yang
Materials 2023, 16(6), 2282; https://doi.org/10.3390/ma16062282 - 12 Mar 2023
Cited by 8 | Viewed by 4205
Abstract
The c-axis aligned crystalline indium-gallium-zinc-oxide field-effect transistor (CAAC-IGZO FET), exhibiting an extremely low off-state leakage current (~10−22 A/μm), has promised to be an ideal candidate for Dynamic Random Access Memory (DRAM) applications. However, the instabilities leaded by the drift of the threshold [...] Read more.
The c-axis aligned crystalline indium-gallium-zinc-oxide field-effect transistor (CAAC-IGZO FET), exhibiting an extremely low off-state leakage current (~10−22 A/μm), has promised to be an ideal candidate for Dynamic Random Access Memory (DRAM) applications. However, the instabilities leaded by the drift of the threshold voltage in various stress seriously affect the device application. To better develop high performance CAAC-IGZO FET for DRAM applications, it’s essential to uncover the deep physical process of charge transport mechanism in CAAC-IGZO FET. In this work, by combining the first-principles calculations and nonradiative multiphonon theory, the charge trapping and emission properties in CAAC-IGZO FET have been systematically investigated. It is found that under positive bias stress, hydrogen interstitial in Al2O3 gate dielectric is probable effective electron trap center, which has the transition level (ε (+1/−1) = 0.52 eV) above Fermi level. But it has a high capture barrier about 1.4 eV and low capture rate. Under negative bias stress, oxygen vacancy in Al2O3 gate dielectric and CAAC-IGZO active layer are probable effective electron emission centers whose transition level ε (+2/0) distributed at −0.73~−0.98 eV and 0.69 eV below Fermi level. They have a relatively low emission barrier of about 0.5 eV and 0.25 eV and high emission rate. To overcome the instability in CAAC-IGZO FET, some approaches can be taken to control the hydrogen concentration in Al2O3 dielectric layer and the concentration of the oxygen vacancy. This work can help to understand the mechanisms of instability of CAAC-IGZO transistor caused by the charge capture/emission process. Full article
(This article belongs to the Special Issue Functional Crystals and Thin Film Materials)
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10 pages, 2501 KiB  
Article
Simulation of High Breakdown Voltage, Improved Current Collapse Suppression, and Enhanced Frequency Response AlGaN/GaN HEMT Using A Double Floating Field Plate
by Peiran Wang, Chenkai Deng, Hongyu Cheng, Weichih Cheng, Fangzhou Du, Chuying Tang, Chunqi Geng, Nick Tao, Qing Wang and Hongyu Yu
Crystals 2023, 13(1), 110; https://doi.org/10.3390/cryst13010110 - 7 Jan 2023
Cited by 9 | Viewed by 4577
Abstract
In this paper, DC, transient, and RF performances among AlGaN/GaN HEMTs with a no field plate structure (basic), a conventional gate field plate structure (GFP), and a double floating field plate structure (2FFP) were studied by utilizing SILVACO ATLAS 2D device technology computer-aided [...] Read more.
In this paper, DC, transient, and RF performances among AlGaN/GaN HEMTs with a no field plate structure (basic), a conventional gate field plate structure (GFP), and a double floating field plate structure (2FFP) were studied by utilizing SILVACO ATLAS 2D device technology computer-aided design (TCAD). The peak electric fields under the gate in drain-side can be alleviated effectively in 2FFP devices, compared with basic and GFP devices, which promotes the breakdown voltage (BV) and suppresses the current collapse phenomenon. As a result, the ON-resistance increase caused by the current collapse phenomena is dramatically suppressed in 2FFP ~19.9% compared with GFP ~49.8% when a 1 ms duration pre-stress was applied with Vds = 300 V in the OFF-state. Because of the discontinuous FP structure, more electric field peaks appear at the edge of the FFP stacks, which leads to a higher BV of ~454.4 V compared to the GFP ~394.3 V and the basic devices ~57.6 V. Moreover, the 2FFP structure performs lower a parasitic capacitance of Cgs = 1.03 pF and Cgd = 0.13 pF than those of the GFP structure (i.e., Cgs = 1.89 pF and Cgd = 0.18 pF). Lower parasitic capacitances lead to a much higher cut-off frequency (ft) of 46 GHz and a maximum oscillation frequency (fmax) of 130 GHz than those of the GFP structure (i.e., ft = 27 GHz and fmax = 93 GHz). These results illustrate the superiority of the 2FFP structure for RF GaN HEMT and open up enormous opportunities for integrated RF GaN devices. Full article
(This article belongs to the Special Issue Wide-Bandgap Semiconductor Materials, Devices and Systems)
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