Search Results (15)

This study investigates the effects of deposition angle and arc current on the surface morphology and optical response of Ti coatings obtained by unfiltered cathodic arc evaporation for spectrally selective solar-thermal applications. 100 nm-thick Ti films were deposited at normal (0°) and oblique (80°) angles of incidence, with arc currents of 65 A and 90 A, respectively. The SEM measurements revealed the characteristic arc-generated microdroplet population. At normal incidence (0°), droplets are predominantly spherical and relatively uniformly distributed, whereas at 80° incidence, many droplets exhibit elongated footprints aligned with the incoming flux from the Ti cathode. This behavior is consistent with oblique-angle deposition (OAD), where the arrival geometry can promote self-shadowing and transient droplet spreading before solidification. AFM confirms an increase in nanoscale roughness, whereas GIXRD indicates nanocrystalline α-Ti and cubic TiO, with maximum crystallinity for 0°/65 A. Contact-angle measurements demonstrate a transition from hydrophobic 316L (~103°) to moderately hydrophilic Ti-coated surfaces (~68–72°), with only minor dependence on deposition geometry. Optical reflectance in the 400–800 nm range is significantly lower for Ti-coated glass and is further reduced for OAD films, indicating enhanced solar absorptance. Full article

This paper investigates the properties of zirconium oxide thin films deposited on Ti6Al4V and Si substrates via oblique angle deposition, using varying out-of-plane θ (15 to 85°) and in-plane Φ (0 and 180°) substrate orientations. ZrO₂ films have garnered significant interest due to their antibacterial properties and mechanical performance. The aim is to engineer surfaces capable of inhibiting bacterial growth while maintaining excellent mechanical integrity. The methodology combines experimental deposition by DC magnetron sputtering with multi-scale simulations using SRIM and SIMTRA. Structural analyses were conducted via X-ray diffraction, while microstructure and surface morphology were examined using scanning electron microscopy and atomic force microscopy. Nanoindentation tests were performed to assess hardness and elastic modulus. Results revealed that increasing the incidence angle α from 7 to 74° significantly affected surface morphology, microstructure, film thickness, and columnar tilt. The hardness and Young’s modulus of the films exceeded those of Ti6Al4V, for incidence angle α between 7 and 50°, but decreased with the increasing incidence angle α. Furthermore, the films exhibited strong antibacterial activity against Gram-positive pathogens (Staphylococcus aureus), particularly at the highest incidence angle α, with inhibition rates exceeding 90%. Full article

Oblique angle deposition (OAD) holds significant potential for diverse applications, including energy harvesting devices, optoelectronic sensors, and electronic devices, owing to the creation of unique nanostructures. These nanostructures are characterized by their porosity and nanoscale columns, which can exist in numerous forms depending on deposition conditions. As a result, the engineering of nanostructures using OAD achieves the successful modulation of optical properties such as absorption, reflection, and transmission. This explains the current surge of attention toward photodetectors based on OAD technology. This review presents various photodetectors based on OAD technology and summarizes reported cases. It also explores current advancements, major applications, and future directions in photodetector development and nanostructure engineering. Ultimately, this review aims to provide a comprehensive overview of the research trends in photodetectors utilizing OAD technology and focus on their further development and application potential. Full article

The refractive index is one of the most important optical parameters of optical thin films. Optical films with a low refractive index can effectively reduce the residual reflection on the film surface, which is one of the most important parameters pursued by scholars. In this research, SiO₂ thin films with a low refractive index and nanocolumnar structures were prepared by oblique angle deposition (OAD). The SiO₂ thin films deposited at different inclination angles were prepared using the electron beam evaporative deposition method. The single-layer film samples were measured by ellipsometry, infrared spectrometry, scanning electron microscopy (SEM), and atomic force microscopy (AFM). The experimental results demonstrated that at an inclination angle of 85°, the average refractive index of the film decreased to 1.30 in the 350–1300 nm wavelength range. Additionally, the film deposited on one side of a crystalline Al₂O₃ substrate achieved a transmittance of 92.1% in the 350–1500 nm wavelength range and the residual reflectance was reduced by 0.7%. Full article

We report the photocatalytic (PC) response of titanium oxide (TiO_x) films grown by reactive DC magnetron sputtering under oblique-angle-deposition (OAD) and subjected to post-deposition flash-lamp-annealing (FLA). Under ballistic growth conditions, OAD yields TiO_x films with either compact or inclined columnar structure as the deposition incidence angle (α) with respect to the substrate normal varies from zero to grazing. On the one hand, films produced for α ≤ 45° display a compact and opaque structure comprising the formation of nanocrystalline cubic titanium monoxide (c-TiO) phase. On the other hand, films grown at larger α (≥60°) display tilted columns with amorphous structure, yielding highly porous films and an increased transparency for α > 75°. For TiO_x films grown at large α, FLA induces phase transformation to nanocrystalline anatase from the amorphous state. In contrast to as-grown samples, FLA samples display PC activity as assessed by bleaching of methyl orange dye. The best PC performance is attained for an intermediate situation (α = 60–75°) between compact and columnar structures. The obtained photoactivity is discussed in terms of the different microstructures obtained by OAD and posterior phase formation upon FLA. Full article

To improve the friction performance and service life of protective coatings in humidity-fluctuating environments, porous hard titanium nitride (TiN)–molybdenum disulfide (MoS₂) composite coatings were prepared by using direct current magnetron sputtering (DCMS) with the mode of oblique angle deposition (OAD) and chemical vapor deposition (CVD) technologies. The structure and chemical component were characterized by field emission scanning electron microscopy (FESEM), energy dispersive spectrometer (EDS), grazing incidence X-ray diffraction (GIXRD), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. The tribological properties of these TiN–MoS₂ composite coatings were investigated. The results indicate that the porous TiN–MoS₂ composite coating exhibited outstanding friction performance and long service life under humidity-fluctuating environments. At the initial 20% relative humidity (RH) stage, the MoS₂ on the porous TiN–MoS₂ composite coating surface worked as an effective lubricant; thus, the coating demonstrated excellent lubrication performance, and the friction coefficient (COF) was about 0.05. As the humidity was alternated to 70% RH, the lubrication effect diminished due to the production of molybdenum oxide (MoO₃), and the COF was about 0.2, which was attributed to the degradation of MoS₂ on the wear track and the release of fresh MoS₂ from the porous TiN matrix. After the environmental conditions shifted from 70% to 20% RH, the MoO₃ was removed, and the lubrication effect was restored. In summary, TiN–MoS₂ porous composite coating offers a promising approach for lubrication in humidity-fluctuating environments. Full article

Un-doped (uZO) and silver-doped zinc oxide (SZO) films were prepared by oblique incidence sputtering deposition under different process parameters. The crystalline structure, chemical composition, and surface morphology were correlated with the optical properties, as well as with the wettability of the films. In the case of uZO films, the orientation, inclination, and morphology of the columnar structure determined the wettability of the layer, moving from a hydrophilic- to hydrophobic-like character. In the case of SZO films, although almost all of them displayed hydrophobic behavior, the hydrophobic character increased with the Ag content. The most hydrophobic surface was obtained when the Ag content in the layers was greater than 7 at.% and, in these cases, the structural results indicate that the layers were formed by a disordered mixture of Zn and Ag oxides. Full article

Broadband anti-reflection (AR) coatings are essential elements for improving the photocurrent generation of photovoltaic modules and enhancing visibility in optical devices. In this paper, we report a hybrid-structured, anti-reflection coating that combines multi-layer thin films with a single top-oblique deposited layer. By simply introducing this low-refractive index layer, the broadband anti-reflection properties of optical thin films can be improved while simplifying the preparation. Precise time-controlled and oblique-angle deposition (OAD) methods were used to fabricate the broadband AR coating. By accurately measuring and adjusting the design errors for the thin and thick film layers, 22-layer and 36-layer AR coatings on a sapphire substrate with a 400–2000 nm wideband were obtained. This bottom-up preparation process and AR coating design have the potential to significantly enhance the broadband antireflective properties for many optical systems and reduce the manufacturing cost of broadband AR coatings. Full article

Due to the abundance and low cost of exchanged metal, sodium-ion batteries have attracted increasing research attention for the massive energy storage associated with renewable energy sources. Nickel oxide (NiO) thin films have been prepared by magnetron sputtering (MS) deposition under an oblique angle configuration (OAD) and used as electrodes for Na-ion batteries. A systematic chemical, structural and electrochemical analysis of this electrode has been carried out. The electrochemical characterization by galvanostatic charge–discharge cycling and cyclic voltammetry has revealed a certain loss of performance after the initial cycling of the battery. The conversion reaction of NiO with sodium ions during the discharge process to generate sodium oxide and Ni metal has been confirmed by X-ray photoelectron spectra (XPS) and micro-Raman analysis. Likewise, it has been determined that the charging process is not totally reversible, causing a reduction in battery capacity. Full article

Changing the morphology of noble metal nanoparticles and polarization dependence of nanoparticles with different morphologies is an important part of further research on surface plasma enhancement. Therefore, we used the method based on Matlab simulation to provide a simple and effective method for preparing the morphologies of Au nanoparticles with different morphologies, and prepared the structure of Au nanoparticles with good uniformity and different morphologies by oblique angle deposition (OAD) technology. The change of the surface morphology of nanoparticles from spherical to square to diamond can be effectively controlled by changing the deposition angle. The finite difference time domain (FDTD) method was used to simulate the electromagnetic fields of Au nanoparticles with different morphologies to explore the polarization dependence of nanoparticles with different shapes, which was in good agreement with Raman spectrum. Full article

In this study, polycrystalline hafnium nitride (HfN) thin films were grown by oblique angle deposition (OAD) technique to investigate the relationship between column tilt angle, texture development and residual stress evolution with varying inclination angle α of the substrate. The films (~1 μm thickness) were grown at various angles (α = 5°, 25°, 35°, 65°, 75°, and 85°) with respect to the substrate normal by reactive magnetron sputtering at 0.3 Pa and 300 °C. The film morphology, crystal structure and residual stress state were characterized by scanning electron microscopy and X-ray diffraction (XRD), including pole figure and sin²ψ measurements. All HfN films had a cubic, NaCl-type crystal structure with an [111] out-of-plane orientation and exhibited a biaxial texture for α ≥ 35°. XRD pole figures reveal that the crystal habit of the grains consists of {100} facets constituting triangular-base pyramids, with a side and a corner facing the projection of the incoming particle flux (indicative of a double in-plane alignment). A columnar microstructure was formed for α ≥ 35°, with typical column widths of 100 nm. It is observed that the column tilt angle β increases monotonously for α ≥ 35°, reaching β = 34° at α = 85°. This variation at microscopic scale is correlated with the tilt angle of the (111) crystallographic planes, changing from −24.8 to 11.3° with respect to the substrate surface. The residual stress changes from strongly compressive (~−5 GPa at α = 5°) to negligible or slightly tensile for α ≥ 35°. The observed trends are compared to previous works of the literature and discussed based on existing crystal growth and stress models, as well as in light of energy and angular distribution of the incident particle flux calculated by Monte Carlo. Importantly, a decrease of the average kinetic energy of Hf particles from 22.4 to 17.7 eV is found with increasing α due to an increase number of collisions. Full article

Oblique angle deposition (OAD) is a simple, low cost, effective, and maskless nanofabrication process. It can offer a reliable method for the mass fabrication of uniform metal nanorods which can be used as the surface-enhanced Raman scattering (SERS) substrate with an excellent enhancing performance. Up to now, Ag nanorods SERS substrates have been extensively studied. However, Ag is chemically active and easy to oxidize under atmospheric conditions. Comparatively, Au is chemically stable and has better biocompatibility than Ag. In this paper, we in detail, studied the electromechanical (EM) field distribution simulation, fabrication, and application of Au nanorods (AuNRs) on trace detection of methamphetamine. According to the finite-difference time-domain (FDTD) calculation results, the maximum EM intensity can be obtained with the length of AuNRs to be 800 nm and the tilting angle of AuNRs to be 71° respectively. The aligned Au nanorod array substrate was fabricated by the OAD process. The two key process parameters, deposition angle, and deposition rate were optimized by experiments, which were 86° and 2 Å/s, respectively. Using 1,2-bis (4-pyridyl) ethylene (BPE) as the probe molecule, the limit of detection (LOD) was characterized to be 10⁻¹¹ M. The AuNRs were also used to detect methamphetamine. The LOD can be down to M (i.e., 14.92 pg/ml), which meet the requirements of the on-site rapid detection of the methamphetamine in human urine (500 ng/ml). Full article

In this work, we fabricated three carbon nanoplume structured samples under different temperatures using a simple hot filament physical vapor deposition (HFPVD) process, and investigated the role of surface morphology, defects, and graphitic content on relative humidity (RH) sensing performances. The Van der Drift growth model and oblique angle deposition (OAD) technique of growing a large area of uniformly aligned and inclined oblique arrays of carbon nanoplumes (CNPs) on a catalyst-free silicon substrate was demonstrated. The optimal growing temperature of 800 °C was suitable for the formation of nanoplumes with larger surface area, more defect sites, and less graphitic content, compared to the other samples that were prepared. As expected, a low detection limit, high response, capability of reversible behavior, and rapid response/recovery speed with respect to RH variation, was achieved without additional surface modification or chemical functionalization. The holes’ depletion has been described as a RH sensing mechanism that leads to the increase of the conduction of the CNPs with increasing RH levels. Full article

Over the last few decades, benefitting from the sufficient sensitivity, high specificity, nondestructive, and rapid detection capability of the surface-enhanced Raman scattering (SERS) technique, numerous nanostructures have been elaborately designed and successfully synthesized as high-performance SERS substrates, which have been extensively exploited for the identification of chemical and biological analytes. Among these, Ag nanorods coated with thin metal oxide layers (AgNRs-oxide hybrid array substrates) featuring many outstanding advantages have been proposed as fascinating SERS substrates, and are of particular research interest. The present review provides a systematic overview towards the representative achievements of AgNRs-oxide hybrid array substrates for SERS applications from diverse perspectives, so as to promote the realization of real-world SERS sensors. First, various fabrication approaches of AgNRs-oxide nanostructures are introduced, which are followed by a discussion on the novel merits of AgNRs-oxide arrays, such as superior SERS sensitivity and reproducibility, high thermal stability, long-term activity in air, corrosion resistivity, and intense chemisorption of target molecules. Next, we present recent advances of AgNRs-oxide substrates in terms of practical applications. Intriguingly, the recyclability, qualitative and quantitative analyses, as well as vapor-phase molecule sensing have been achieved on these nanocomposites. We further discuss the major challenges and prospects of AgNRs-oxide substrates for future SERS developments, aiming to expand the versatility of SERS technique. Full article

In this work, lead phthalocyanine (PbPc) and ZnO/InN inorganic semiconductor films prepared by oblique-angle deposition (OAD) were layered to form heterojunction organic/inorganic hybrid photovoltaic solar cells. Among the available organic materials, phthalocyanines, particularly the non-planar ones such as PbPc, are notable for their absorption in the visible and near infrared regions. The organic/inorganic hybrid solar cells fabricated on ZnO/OAD-InN/PbPc showed short-circuit current density (J_SC), open-circuit voltage (V_OC), and power conversion efficiencies (η) of 1.2 mA/cm², 0.6 V and 0.144%, respectively. Full article