Search Results (60)

Designing and manufacturing devices at the micro- and nanoscales offers significant advantages, including high precision, quick response times, high energy density ratios, and low production costs. These benefits have driven extensive research in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS), resulting in various classifications of materials and manufacturing techniques, which are ultimately used to produce different classifications of MEMS devices. The current work aims to systematically organize the literature on MEMS in biomedical devices, encompassing past achievements, present developments, and future prospects. This paper reviews the current research trends, highlighting significant material advancements and emerging technologies in biomedical MEMS in order to meet the current challenges facing the field, such as ensuring biocompatibility, achieving miniaturization, and maintaining precise control in biological environments. It also explores projected applications, including use in advanced diagnostic tools, targeted drug delivery systems, and innovative therapeutic devices. By mapping out these trends and prospects, this review will help identify current research gaps in the biomedical MEMS field. By pinpointing these gaps, researchers can focus on addressing unmet needs and advancing state-of-the-art biomedical MEMS technology. Ultimately, this can lead to the development of more effective and innovative biomedical devices, improving patient care and outcomes. Full article

Motivated by the potential of surface texturing to enhance the tribological performance of micro- and nano-electromechanical systems (MEMS/NEMS), this study proposes a novel non-linear optimization approach for designing textured surfaces. This model minimizes the contact area between interacting surfaces and deformation during sliding under dry conditions by controlling key design parameters, such as the size and shape of the designed surface. We test the performance of the proposed model using the lotus leaf surface with dimensions of 248 × 136 micrometers. Due to the large size of the model, we propose a solution approach which consists of a data aggregation step, an optimization step, and a data disaggregation step. The optimization step decomposes the model into smaller models that are easier to solve. Via the sensitivity analysis, we highlight the trade-offs between data aggregation and model decomposition and their effect on the quality of the solutions found. In conclusion, our approach bridges the gap between fabrication capabilities and design requirements, paving the way for significant advances in tribological performance and surface engineering. Full article

Using gradient-corrected density functional theory we investigate the mechanical properties of ultrathin boron (B) and phosphorus (P) doped silicon nanowires (SiNWs) along the [001] and [111] orientations within the PBE approximation. Both pristine and doped SiNWs under study have diameters ranging from 5 to 8 Å. Our results show that doping significantly enhances the bulk modulus ($B_0$), shear modulus ($G_V$), Young’s modulus (Y), and other mechanical parameters. The significant anisotropy observed in the mechanical properties of Si[111] NWs, with varying moduli along different axes, further illustrates the complex interplay between mechanical behavior and electronic structure at the nanoscale. The mechanical flexibility of SiNWs, combined with their tunable electronic properties due to quantum confinement, makes them promising candidates for advanced nanoelectronic devices, nanoelectromechanical systems (NEMS), and advanced technologies. Full article

Understanding lubrication at the nanoscale is essential for reducing friction. While alkanes, the primary component in most lubricants, have been studied for their molecular structure’s impact on rheology and behavior when confined by solid surfaces, the influence of confining surface texture remains underexplored. This research uses molecular dynamics simulations to investigate the rheological behavior of thin film lubrication between various patterned rough surfaces. The study focuses on sinusoidal, sawtooth, and squaretooth wave-patterned surfaces, using hexadecane as the lubricant. The simulations examine the effects under different normal loads and shear rates. Surface patterns significantly influence the formation and structure of crystalline bridges, depending on shear rates and normal loads. The sawtooth wave-patterned surface exhibits the highest viscosity under low normal load and shear rate conditions, forming crystalline bridges with a molecular orientation perpendicular to the shear direction. The squaretooth patterns exhibit the lowest viscosities due to the nematic order in crystalline bridges with molecules aligned in the shearing direction. The sinusoidal wave-patterned surface shows intermediary viscosity with disordered crystalline bridge groups formed with random molecular orientation. The lowest viscosity provided by the squaretooth pattern surface persists across various conditions, including both transitory and steady states, under high and low loads, and over a wide range of shear rates. However, the difference in shear viscosity is reduced at higher normal loads. This research provides valuable insights for designing nanoelectromechanical systems (NEMS) and other applications where boundary conditions are critical to lubrication. Full article

Casimir force densities, i.e., force per area, become very large if two solid material surfaces come closer together to each other than 10 nm. In most cases, the forces are attractive. In some cases, they can be repulsive depending on the solid materials and the fluid medium in between. This review provides an overview of experimental and theoretical studies that have been performed and focuses on four main aspects: (i) the combinations of different materials, (ii) the considered geometries, (iii) the applied experimental measurement methodologies and (iv) a novel self-assembly methodology based on Casimir forces. Briefly reviewed is also the influence of additional parameters such as temperature, conductivity, and surface roughness. The Casimir effect opens many application possibilities in microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS), where an overview is also provided. The knowledge generation in this fascinating field requires interdisciplinary approaches to generate synergetic effects between technological fabrication metrology, theoretical simulations, the establishment of adequate models, artificial intelligence, and machine learning. Finally, multiple applications are addressed as a research roadmap. Full article

Friction, wear, and the consequent energy dissipation pose significant challenges in systems with moving components, spanning various domains, including nanoelectromechanical systems (NEMS/MEMS) and bio-MEMS (microrobots), hip prostheses (biomaterials), offshore wind and hydro turbines, space vehicles, solar mirrors for photovoltaics, triboelectric generators, etc. Nature-inspired bionic surfaces offer valuable examples of effective texturing strategies, encompassing various geometric and topological approaches tailored to mitigate frictional effects and related functionalities in various scenarios. By employing biomimetic surface modifications, for example, roughness tailoring, multifunctionality of the system can be generated to efficiently reduce friction and wear, enhance load-bearing capacity, improve self-adaptiveness in different environments, improve chemical interactions, facilitate biological interactions, etc. However, the full potential of bioinspired texturing remains untapped due to the limited mechanistic understanding of functional aspects in tribological/biotribological settings. The current review extends to surface engineering and provides a comprehensive and critical assessment of bioinspired texturing that exhibits sustainable synergy between tribology and biology. The successful evolving examples from nature for surface/tribological solutions that can efficiently solve complex tribological problems in both dry and lubricated contact situations are comprehensively discussed. The review encompasses four major wear conditions: sliding, solid-particle erosion, machining or cutting, and impact (energy absorbing). Furthermore, it explores how topographies and their design parameters can provide tailored responses (multifunctionality) under specified tribological conditions. Additionally, an interdisciplinary perspective on the future potential of bioinspired materials and structures with enhanced wear resistance is presented. Full article

The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical devices and sensing. During the last decades, using suspended 2D membranes integrated with MEMS and NEMS emerged high-performance sensitivities in mass and gas sensors, accelerometers, pressure sensors, and microphones. Actively sensing minute changes in the surrounding environment is provided by means of MEMS/NEMS sensors, such as sensing in passive modes of small changes in momentum, temperature, and strain. In this review, we discuss the materials preparation methods, electronic, optical, and mechanical properties of 2D materials used in NEMS and MEMS devices, fabrication routes besides device operation principles. Full article

In this paper, the experimental methodology for the single-crystal circular plate deformation measurement and subsequent procedure for the quantitation of its mechanical properties are developed. The procedure is based on a new numerical-analytical solution of non-linear boundary-value problem for finite deformations of a circular anisotropic plate. Using the developed method, a study of the deformation of single-crystal circular plates formed on the basis of a silicon-on-insulator structure was carried out. The values of residual stresses are determined and it is shown that the presence of these stresses increases the flexural rigidity of the plate by several times. Full article

Arrays of coupled nanoelectromechanical resonators are a promising foundation for implementing large-scale network applications, such as mechanical-based information processing and computing, but their practical realization remains an outstanding challenge. In this work, we demonstrate a scalable platform of suspended graphene resonators, such that neighboring resonators are persistently coupled mechanically. We provide evidence of strong coupling between neighboring resonators using two different tuning methods. Additionally, we provide evidence of inter-resonator coupling of higher-order modes, demonstrating the rich dynamics that can be accessed with this platform. Our results establish this platform as a viable option for realizing large-scale programmable networks, enabling applications such as phononic circuits, tunable waveguides, and reconfigurable metamaterials. Full article

Bi₂Se₃, one of the most extensively studied topological insulators, has received significant attention, and abundant research has been dedicated to exploring its surface electronic properties. However, little attention has been given to its piezoelectric properties. Herein, we investigate the piezoelectric response in a five-layer Bi₂Se₃ nanosheet using scanning probe microscopy (SPM) techniques. The piezoelectricity of Bi₂Se₃ is characterized using both conventional piezoresponse force microscopy (PFM) and a sequential excitation scanning probe microscopy (SE-SPM) technique. To confirm the linear piezoelectricity of Bi₂Se₃ two-dimensional materials, measurements of point-wise linear and quadratic electromechanical responses are carried out. Furthermore, the presence of polarization and relaxation is confirmed through hysteresis loops. As expected, the Bi₂Se₃ nanosheet exhibits an electromechanical solid response. Due to the inevitable loss of translational symmetry at the crystal edge, the lattice of the odd-layer Bi₂Se₃ nanosheet is noncentrosymmetric, indicating its potential for linear piezoelectricity. This research holds promise for nanoelectromechanical systems (NEMS) applications and future nanogenerators. Full article

On-chip electrostatic discharge (ESD) protection is required for all integrated circuits (ICs). Conventional on-chip ESD protection relies on in-Si PN junction-based device structures for ESD. However, such in-Si PN-based ESD protection solutions pose significant challenges related to ESD protection design overhead, including parasitic capacitance, leakage current, and noises, as well as large chip area consumption and difficulty in IC layout floor planning. The design overhead effects of ESD protection devices are becoming unacceptable to modern ICs as IC technologies continuously advance, which is an emerging design-for-reliability challenge for advanced ICs. In this paper, we review the concept development of disruptive graphene-based on-chip ESD protection comprising a novel graphene nanoelectromechanical system (gNEMS) ESD switch and graphene ESD interconnects. This review discusses the simulation, design, and measurements of the gNEMS ESD protection structures and graphene ESD protection interconnects. The review aims to inspire non-traditional thinking for future on-chip ESD protection. Full article

The motivation for this work was to develop new protic ionic liquids (PILs) as additives for the lubrication of micro and nanoelectromechanical systems (MEMS and NEMS). Ten PILs based on the combination of methylimidazolium ([MIMH]), 4-picolinium ([4-picH]), pyridinium ([PyrH]), 1,8-diazabicyclo[5.4.0]-undec-7-ene-8-ium ([DBUH]) and tetramethylguanidinium ([TMGH]) cations with hydrogen sulfate([HSO₄]) and mesylate ([MeSO₃]) anions were tested as additives in polyethylene glycol (PEG200) to lubricate steel/silicon and silicon/silicon contacts. The best additive was [4-picH][HSO₄], which adsorbed strongly on the Si surface, leading to a protective film that reduced wear by up to 15 times compared to PEG200. Full article

Measurements are crucial for research in the fields of microelectromechanical (MEMS), nanoelectromechanical (NEMS) and industrial applications. In this work, the design approach for the development and construction of a testing 4D mechatronic system, and respective validation, including the detailed description of the used components and parts as well as the performed tests for respective validation in the working environment, are presented. Because this is testing equipment, the measurement feature is presented and validated, in detail, making this system available and reliable for the mentioned purposes of use. An important result in this work is the possibility of on-site control or the remote control of the 4D mechatronic system for measurement and integrated control of processes, with the aim of reducing the cost of obtaining the necessary measurements. Full article

bioNEMS/MEMS has emerged as an innovative technology for the miniaturisation of biomedical devices with high precision and rapid processing since its first R&D breakthrough in the 1980s. To date, several organic including food waste derived nanomaterials and inorganic nanomaterials (e.g., carbon nanotubes, graphene, silica, gold, and magnetic nanoparticles) have steered the development of high-throughput and sensitive bioNEMS/MEMS-based biosensors, actuator systems, drug delivery systems and implantable/wearable sensors with desirable biomedical properties. Turning food waste into valuable nanomaterials is potential groundbreaking research in this growing field of bioMEMS/NEMS. This review aspires to communicate recent progress in organic and inorganic nanomaterials based bioNEMS/MEMS for biomedical applications, comprehensively discussing nanomaterials criteria and their prospects as ideal tools for biomedical devices. We discuss clinical applications for diagnostic, monitoring, and therapeutic applications as well as the technological potential for cell manipulation (i.e., sorting, separation, and patterning technology). In addition, current in vitro and in vivo assessments of promising nanomaterials-based biomedical devices will be discussed in this review. Finally, this review also looked at the most recent state-of-the-art knowledge on Internet of Things (IoT) applications such as nanosensors, nanoantennas, nanoprocessors, and nanobattery. Full article

The interest in biodegradable pressure sensors in the biomedical field is growing because of their temporary existence in wearable and implantable applications without any biocompatibility issues. In contrast to the limited sensing performance and biocompatibility of initially developed biodegradable pressure sensors, device performances and functionalities have drastically improved owing to the recent developments in micro-/nano-technologies including device structures and materials. Thus, there is greater possibility of their use in diagnosis and healthcare applications. This review article summarizes the recent advances in micro-/nano-structured biodegradable pressure sensor devices. In particular, we focus on the considerable improvement in performance and functionality at the device-level that has been achieved by adapting the geometrical design parameters in the micro- and nano-meter range. First, the material choices and sensing mechanisms available for fabricating micro-/nano-structured biodegradable pressure sensor devices are discussed. Then, this is followed by a historical development in the biodegradable pressure sensors. In particular, we highlight not only the fabrication methods and performances of the sensor device, but also their biocompatibility. Finally, we intoduce the recent examples of the micro/nano-structured biodegradable pressure sensor for biomedical applications. Full article