Casimir Effect in MEMS: Materials, Geometries, and Metrologies—A Review
Abstract
:1. Introduction
2. Survey about Experimental and Theoretical Studies of Casimir Forces
2.1. Plate–Plate Geometries with Different Material Combinations
2.2. Lens/Sphere–Plate and Sphere–Sphere Geometries with Different Material Combinations
2.3. Cylinder–Cylinder/Plate/Sphere Geometries with Different Material Combinations
2.4. Special Geometries with Different Material Combinations
3. Main Measurement Methods: Review of Casimir Metrology
4. Influence of Further Parameters on Casimir Forces
4.1. Influence of Thermal Effects
4.2. Influence of Conductivity Effects
4.3. Influence of Surface Roughness
5. Influences of Casimir Forces on the Characteristics of MEMS/NEMS Devices
5.1. Influences of Casimir Forces on Stiction and Adhesion
5.2. Influences of Casimir Forces on Pull-in Voltages
5.3. Influences of Casimir Forces on Vibrational Properties
5.4. Influences of Casimir Forces on Chaotic Motion
6. Applications of Casimir Forces in MEMS/NEMS Field
6.1. Highly Sensitive Sensors
6.2. Non-Contact Actuators
6.3. Stiction-Related Applications
6.4. Heat Transfer Devices and Actuators
6.5. Optical Applications
6.6. Harvesting Devices
6.7. Applications in Quantum Computation and Communication
6.8. The Role of Machine Learning
7. Self-Assembling Structures
Three-Dimensional Self-Assembly into Yin–Yang Structures
- Dimensions A = 400 µm × 14 µm = 5600 µm2.
- Mass per unit area: = 0.62 g/m2 considering the Al-Cr-Al metal stack.
- potential difference: mV (due to charge fluctuations based on deviations in the working function of the facing aluminium surfaces).
- Contact angle: ≈ 20° (for isopropanol on hydrophilic aluminium).
- Surface tension: = 17 mN/m (for isopropanol at 68.5 °C) [176].
- Hamaker constant: (for aluminium) [64].
- 1.
- Gravitational force per unit area:
- 2.
- Electrostatic force per unit area:
- 3.
- Capillary force per unit area:
- 4.
- Casimir force per unit area in retarded limit (original formula of H. B. G. Casimir):
- 5.
- Casimir force per unit area in non-retarded limit (based on VdW interaction):
8. Summary and Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Elsaka, B.; Yang, X.; Kästner, P.; Dingel, K.; Sick, B.; Lehmann, P.; Buhmann, S.Y.; Hillmer, H. Casimir Effect in MEMS: Materials, Geometries, and Metrologies—A Review. Materials 2024, 17, 3393. https://doi.org/10.3390/ma17143393
Elsaka B, Yang X, Kästner P, Dingel K, Sick B, Lehmann P, Buhmann SY, Hillmer H. Casimir Effect in MEMS: Materials, Geometries, and Metrologies—A Review. Materials. 2024; 17(14):3393. https://doi.org/10.3390/ma17143393
Chicago/Turabian StyleElsaka, Basma, Xiaohui Yang, Philipp Kästner, Kristina Dingel, Bernhard Sick, Peter Lehmann, Stefan Yoshi Buhmann, and Hartmut Hillmer. 2024. "Casimir Effect in MEMS: Materials, Geometries, and Metrologies—A Review" Materials 17, no. 14: 3393. https://doi.org/10.3390/ma17143393