Search Results (2,121)

A series of Cu-Zr nanocrystalline alloy films with varying Zr contents were fabricated via magnetron co-sputtering technology. The effect of Zr content on the microstructure and mechanical properties of the alloy films was investigated, and the strengthening mechanism was revealed. Furthermore, the stability of nanocrystalline alloy films was studied through annealing experiments at different temperatures. The results show that part of the added Zr atoms are dissolved in the Cu lattice to form a solid solution structure of Zr in Cu, while the other part segregates at the grain boundaries. No second-phase compounds or simple substances are formed in the alloy films. The addition of Zr significantly refines the grain size of the alloy films. The hardness of the films exhibits a gradual increase with the elevation of Zr content. The results indicate that there are three main strengthening factors for the alloy films: grain refinement strengthening effect ($∆H_{GB}$, accounting for exceeding 70%), solid solution strengthening effect ($∆H_{SS}$, accounting for approximately 20%) and nanocrystalline solute atom pinning strengthening effect ($∆H_{NC,SS}$, accounting for less than 10%). Among them, the strengthening effect of grain refinement assumes a predominant role. Regarding stability, Zr atoms segregate at the grain boundaries of the alloy films. The segregation becomes more significant as the annealing temperature rises. This segregation of Zr atoms at the grain boundaries can exert a pinning effect on the grain boundaries and impede their migration, thus significantly improving the structural stability of the alloy films. Full article

With the advancement of industrial technology toward high speed, heavy load, precision, and automation, traditional sliding bearing materials have been unable to meet modern industrial demands. Surface coating technology, as an efficient surface modification method, has become a key means to enhance the tribological properties, wear resistance, corrosion resistance, and fatigue resistance of sliding bearings, thus extending their service life. This paper systematically reviews the research progress of coating technology for sliding bearings in the past, aiming to fill the gap in comprehensive summaries of multi-material systems and multi-process technologies in existing reviews. In terms of materials, it focuses on the performance characteristics and application scenarios of three major coating types—metal-based, ceramic-based, and polymer-based—clarifying their advantages and limitations. In terms of processes, it analyzes the technical characteristics of mainstream methods including electroplating, magnetron sputtering, and laser cladding, as well as their innovative applications in replacing traditional processes. Furthermore, this review summarizes the latest research results in coating performance evaluation, such as tribological testing via pin-on-disk testers and corrosion resistance analysis via salt spray tests. Finally, it discusses future development trends in new materials, new process applications, and environmental sustainability. This work is expected to provide a valuable reference for related research and engineering applications in the field of sliding bearing coatings. Full article

This study investigates the influence of multilayer architecture on the mechanical, corrosion, and tribological properties of Ti/TiN coatings deposited on biomedical Ti-6Al-4V alloy. Nine multilayer configurations were prepared by DC/RF magnetron sputtering using metallic Ti and ceramic TiN targets, with a fixed TiN/Ti ratio of 3:1 and varying total numbers of layers (3, 5, and 7) and deposition times (30, 60, and 120 min). A strict application of the 10% indentation depth rule was implemented to eliminate substrate effects, which revealed significantly higher intrinsic hardness values (540–740 HV) and indentation moduli (124–143 GPa) compared to the substrate (353 HV; 114 GPa). In contrast, conventional higher-load testing underestimated coating performance due to substrate dominance. Among the investigated architectures, the Ti/TiN-7 configuration exhibited the best balance of properties, combining high hardness (~690 HV), modulus (~137 GPa), improved corrosion resistance (Ecorr up to −0.13 V, Icorr reduced by an order of magnitude), and stable abrasive wear behavior. These findings demonstrate that both bilayer number and deposition time critically determine the mechanical and functional response of Ti/TiN multilayers. The results provide practical guidelines for the reliable characterization and design of multilayer coatings for biomedical and aerospace applications. Full article

Mg-doped gallium oxide films were prepared on single crystal sapphire substrates through radio frequency magnetron sputtering technology, and then AlN films of different thicknesses were deposited on them as passivation layers. Finally, Pt interdigitated electrodes were prepared through mask plate and ion sputtering technology to make metal–insulator–semiconductor–insulator–metal (MISIM) photodetectors. The influence of the AlN passivation layer on the optical properties and photodetection performance of the device was investigated using UV-Vis (ultraviolet-visible absorption spectroscopy) spectrophotometer and a Keith 4200 semiconductor tester. The device’s performance was significantly enhanced. Among them, the MISIM-structured device achieves a responsivity of 2.17 A/W, an external quantum efficiency (EQE) of 1100%, a specific detectivity (D*) of 1.09 × 10¹² Jones, and a photo-to-dark current ratio (PDCR) of 2200. The results show that different thicknesses of AlN passivation layers have an effect on the detection performance of Mg-doped β-Ga₂O₃ films in the UV detection of the solar-blind UV region. The AlN’s thickness has little effect on the bandgap when it is 3 nm and 5 nm, and the bandgap increases at 10 nm. The transmittance of the film increases with the increase in AlN thickness and decreases when the AlN’s thickness increases to 10 nm. The photocurrent exhibits a non-monotonic dependence on AlN thickness at 10 V, and the dark current gradually decreases. The thickness of the AlN passivation layer also has a significant impact on the response characteristics of the detector, and the response characteristics of the device are best when the thickness of the AlN passivation layer is 5 nm. The responsiveness, detection rate, and external quantum efficiency of the device first increase and then decrease with the thickness of the AlN layer, and comprehensive performance is best when the thickness of the AlN passivation layer is 5 nm. The reason is that the AlN layer plays a passivating role on the surface of Ga₂O₃ films, reducing surface defects and inhibiting its capture of photogenerated carriers, while the appropriate thickness of the AlN layer increases the barrier height at the semiconductor interface, forming a built-in electric field and improving the response speed. Finally, the AlN layer inhibits the adsorption and desorption processes between the photogenerated electron–hole pair and O₂, thereby retaining more photogenerated non-equilibrium carriers, which also helps enhance photoelectric detection performance. Full article

A series of TiB₂-Ni multilayer films with different Ni layer thicknesses was prepared by magnetron sputtering technology. The effect of Ni layer thickness on the microstructure and mechanical properties of the multilayer films was investigated, and the deformation and fracture mechanisms underlying the observed behavior were analyzed in detail. The results show that all multilayer films exhibit a well-defined layered architecture with sharp interfacial boundaries. Specifically, the Ni layers grow as columnar grains with an average diameter of approximately 10 nm, while the TiB₂ layers form a very fine acicular nanocolumnar structure. With the increase in Ni layer thickness, the hardness of the multilayer films shows a decreasing trend, gradually decreasing from 27.3 GPa at a 4 nm Ni thickness to 19.3 GPa at 50 nm. In contrast, the fracture toughness increases gradually from 1.54 MPa·m^1/2 to 2.73 MPa·m^1/2. This enhancement in toughness is primarily attributed to a transition in the deformation and fracture mechanism. With the increase in Ni layer thickness, the crack propagation mode in the multilayer films gradually changes from the integral propagation penetrating the film layers to the crack deflection propagation within the layers. This transformation is the result of the combined effect of the stress state of each layer and the crack energy dissipation. Full article

AlSi and nitrogen-doped AlSi (AlSiN) coatings were deposited onto 22MB5 steel, while h-BN coatings were applied to H13 steel using the magnetron-sputtering method. The thermal stability and tribological properties of the AlSi and AlSiN coatings were systematically investigated from room temperature to 800 °C in ambient air. The results indicate that the AlSiN coatings with an FeAl transition layer exhibited outstanding wear resistance and high thermal stability behaviors at elevated temperature because the FeAl layer can inhibit the diffusion of Al and absorb Fe, forming iron-rich intermetallic compounds with a high bonding strength. The FeAl layer plays a critical role in enhancing the coating’s performance. Analysis of the wear mechanisms revealed that the AlSiN coating primarily underwent adhesive wear, while the AlSi coating suffered from abrasive and oxidative wear. These findings offer valuable insights for developing protective coatings for the hot-stamping-forming process. Full article

Greenhouse horticulture is an energy-intensive production system that requires innovative solutions to reduce energy demand without compromising crop yield or quality. Functional greenhouse covers are particularly promising, as they regulate solar radiation while integrating energy-harvesting technologies. In this study, six nanostructured glass coatings incorporating semiconductor-based quantum dots (QDs) and quantum wires (QWs) of Ge and TiN are developed using magnetron sputtering—an industrially scalable technique widely applied in smart window and energy-efficient glass manufacturing. The coatings’ optical properties are characterized in the laboratory, and their agronomic performance is evaluated in greenhouse trials with lamb’s lettuce (Valerianella locusta) and radish (Raphanus sativus). Plant growth, yield, and leaf color (CIELAB parameters) are analyzed in relation to spectral transmission and the daily light integral (DLI). Although uncoated horticultural glass achieves the highest yields, several Ge-QD coatings provide favorable compromises by selectively absorbing non-photosynthetically active radiation (non-PAR) while maintaining acceptable crop performance. These results demonstrate that nanostructured coatings can simultaneously sustain crop growth and enable solar energy conversion, offering a practical pathway toward energy-efficient and climate-smart greenhouse systems. Full article

This study presents the Raman spectral characteristics and selected electrical parameter measurements of WS₂ films deposited by magnetron sputtering on sapphire and subsequently sulfurized. The analysis of the Raman spectra focuses on the positions and shifts of the E¹_2g and A_1g vibrational modes. The effects of different sputtering times on WS₂ films and the corresponding activation energy values were also investigated. From both physical and experimental perspectives, the Raman spectral features of WS₂ films were found to depend on the laser excitation wavelengths (532 nm and 632.8 nm) as well as on possible crystallographic defects and variations in the excitation point position. These defects have a significant influence on both the Raman spectra and the activation energies of the studied samples. The calculated activation energies (~ 0.15–0.19 eV) of the conduction charge carriers correlate with shallow defect-related energy levels indicated by the Raman characteristics. Full article

Today, the engineering of load-bearing bone tissue after severe trauma still relies on metal-based (Ti, CoCrMo alloys or stainless steel) permanent implants. Such artificial scaffolds are typically applied in the body and come into direct contact with the recipient’s cells, whose adhesion affects the patient’s implant acceptance or rejection. The present study aims to create a nano-rough texture by means of ultra-short femtosecond laser (fs)-induced periodicity in the form of laser induced periodic surface structures (LIPSS) on the surface of a stainless steel implant model, which is additionally functionalized via magnetron-sputtering with a thin Cu layer, thus providing the as-created implants with a stable antimicrobial interface. Calcium phosphate (CaP) crystal growth was additionally applied due to the strong bioactive interface bond that CaPs provide to the bone connective tissue, as well as for the strong interface bond they create between the artificial implant and the surrounding bone tissue, thereby stabilizing the implanted structure within the body. The bioactive properties in the as-created antimicrobial hybrid topographical design, achieved through femtosecond laser-induced nanoscale surface structuring and micro-sized CaP crystal growth, have the potential for subsequent practical applications in bone tissue engineering. Full article

Implant-associated infections (IAIs) remain a major cause of orthopedic implant failure, motivating the development of surface coatings that deliver durable antibacterial activity without compromising host compatibility. Here, we deposit silver (Ag) thin films onto commercially pure titanium (Ti) using high power impulse magnetron sputtering (HiPIMS) and assess their antibacterial performance and osteoblast cytocompatibility. Film formation, morphology and crystallinity were characterized by electron microscopy and X-ray diffractometry, while interfacial integrity was probed using ASTM D3359 cross-cut and VDI 3198 Rockwell-C indentation. Antibacterial activity against Escherichia coli and Staphylococcus aureus was quantified by culture-based enumeration, and Ag⁺ release was measured by ICP-MS. HiPIMS enabled rapid formation of dense, continuous and crystalline Ag films with excellent adhesion. Even ultrathin coatings (~7 nm) produced strong antibacterial effects (activity value > 2.0) while releasing controllable trace Ag⁺ (ultimately 0.43 ppb/day), and osteoblast assays indicated no cytotoxicity under the tested conditions. The results show that HiPIMS-Ag achieves a favorable balance between antimicrobial efficacy and biocompatibility at low thickness, supporting its use as a robust antibacterial surface for Ti implants and providing a foundation for translation to device level and in vivo studies. Full article

This study systematically investigated the effects of oxygen plasma treatment on oxygen vacancy defects in sputtered β-gallium oxide (β-Ga₂O₃) films and their corresponding ultraviolet (UV) detection performance. The sputtered β-Ga₂O₃ film subjected to 1 min of oxygen plasma treatment exhibited optimal photodetection properties. Compared to the untreated sample, the dark current was reduced by approximately one order of magnitude to 0.378 pA at 10 V bias. It exhibited an 86% (from 2.92 s to 0.41 s) decrease in response time, a 41.6% increase in photocurrent, a very high photo-to-dark current ratio of 9.18 × 10⁵, and a specific detectivity of 2.62 × 10¹⁰ cm·Hz^1/2W⁻¹ under 254 nm UV illumination intensity of 799 μW/cm² at 10 V bias. Notably, appropriate oxygen plasma treatment minimizes electron capture, enhances the separation and collection of photogenerated carriers, and suppresses the persistent photoconductivity (PPC) effect, thus ultimately shortening the response time. Oxygen plasma processing thus provides an effective approach to fabricating high-performance β-Ga₂O₃ solar-blind photodetectors (SBPDs). Full article

A chromium/amorphous carbon (Cr/(Cr/a-C)ml) nanostructured multilayer coating with a chromium sublayer was deposited on 42CrMo4 (1.7225,BDS EN ISO 683-2:2018), 100Cr6 (1.3505, BDS EN ISO 683-17:2024), and HS18-0-1 (1.3355, BDS EN ISO 4957:2018) alloy steels, selected for their use in contact-loaded components subjected to cyclic fatigue and intense wear. The coating was sputter deposited by MF pulsed magnetron sputtering under consistent process parameters. The resulting coating, approximately 1.8 μm thick, can significantly enhance the service life of these components. Adhesion was evaluated via the Daimler–Benz test, while coating homogeneity was confirmed through energy-dispersive spectroscopy, revealing a consistent chemical composition across sample surfaces. Raman spectroscopy indicated a high sp³/sp² ratio, confirming a dominant diamond-like carbon structure. Nanoindentation measurements verified the coating’s hardness, aligning with the observed structural properties. These results validate the process parameters for depositing a Cr/(Cr/a-C)ml coating on these alloy steels, achieving this study’s objectives. Full article

A numerical method to estimate the plasma characteristics with the variation in control parameters is suggested with an artificial intelligence model using limited finite datasets. A transformer-based regression method was applied to estimate the spatial profiles of plasma characteristics in a DC magnetron sputtering system from limited data obtained by a two-dimensional particle-in-cell simulation under varying pressure. Based on the obtained simulation data, an artificial intelligence method successfully predicts the energy and angular distribution of ions incident on the target. This approach enables the quantitative estimation of the impact of various system parameter changes on plasma characteristics using only a limited number of simulation results. It is beneficial for practical applications, such as process optimization, because the ion energy and angle distributions can be estimated very fast without simulating all the cases. Full article

Hard Cr-Al-Si-B-(N) coatings were deposited in Ar and Ar–15%N₂ medium by d.c. magnetron sputtering of composite targets manufactured using self-propagating high-temperature synthesis. The structure of the coatings was studied by X-ray diffraction, scanning and transmission electron microscopy, energy dispersion spectroscopy, and glow discharge optical emission spectroscopy. The coating properties were determined by nanoindentation, scratch testing, and tribological pin-on-disc testing at room and elevated temperatures. The oxidation resistance and diffusion barrier properties of the coatings were also evaluated. The results obtained showed that non-reactive coatings had a coarse crystalline structure and contained Cr₅Si₃, CrB_x, and Cr₂Al phases. The introduction of nitrogen into the coating composition promoted crystallite refinement and structural amorphization. Non-reactive CrAl₄Si₁₁B₂₁ coatings had a maximum hardness up to 29 GPa and an elastic modulus up to 365 GPa. The introduction of nitrogen into the coating composition resulted in a 16–32% reduction in mechanical properties. The CrAl₆Si₁₂B₅N₂₅ coating, which exhibited maximal plasticity index H/E = 0.100 and resistance to plastic deformation H³/E² = 0.247 GPa, was characterized by a minimum wear rate Vw = 5.7 × 10⁻⁶ mm³N⁻¹m⁻¹ and a friction coefficient of 0.47. While the CrAl₁₈Si₁₁B₅N₂₆ coating demonstrated a record level of oxidation resistance and successfully resisted oxidation up to a temperature of 1300 °C. Full article

Gold thin films were deposited on quartz substrates by DC magnetron sputtering to fabricate electrodes for electrochemical and resistive sensing applications. The influence of sputtering parameters on film thickness, structure, and electrical properties was systematically investigated. XRD analysis revealed a predominant (111) crystallographic orientation. Microstrain values, determined via Williamson–Hall (W–H) analysis, were low (below 0.013) and closely correlated with surface roughness trends. AFM measurements showed that the surface roughness increased with film thickness. Electrical resistivity decreased linearly with increasing thickness and exhibited a critical grain size of approximately 25 nm, beyond which conductivity improved markedly. These results demonstrate the strong dependence of Au thin-film morphology and performance on deposition conditions, offering practical guidelines for optimizing their application in functional sensing devices. Full article