Search Results (152)

The propagation of interface acoustic waves (IAWs) along rotated YX-LiNbO₃/SU-8/ZX-Si structures is theoretically investigated to identify the Y-rotation angles that support the efficient propagation of low-loss modes guided along the structure’s interface. A three-dimensional finite element analysis was performed to simulate IAW propagation in the layered structure and to optimize design parameters, specifically the thicknesses of the platinum (Pt) interdigital transducers (IDTs) and the SU-8 adhesive layer. The simulations revealed the existence of two types of IAWs travelling at different velocities under specific Y-rotated cuts of the LiNbO₃ half-space. These IAWs are faster than the surface acoustic wave (SAW) and slower than the leaky SAW (LSAW) propagating on the surface of the bare LiNbO₃ half-space. The mechanical displacement fields of both IAWs exhibit a rapid decay to zero within a few wavelengths from the LiNbO₃ surface. The piezoelectric coupling coefficients of the IAWs were found to be as high as approximately 7% and 31%, depending on the Y-rotation angle. The theoretical results were experimentally validated by measuring the velocities of the SAW and LSAW on a bare 90° YX-LiNbO₃ substrate, and the velocities of the IAWs in a 90° YX-LiNbO₃/SU-8/Si structure featuring 330 nm thick Pt IDTs, a 200 µm wavelength, and a 15 µm thick SU-8 layer. The experimental data showed good agreement with the theoretical predictions. These combined theoretical and experimental findings establish design principles for exciting two interface waves with elliptical and quasi-shear polarization, offering enhanced flexibility for fluidic manipulation and the integration of sensing functionalities. Full article

In the context of autonomous environmental monitoring, this study investigates a surface acoustic wave (SAW) sensor designed for selective carbon dioxide (CO₂) detection. The sensor is based on a LiTaO₃ piezoelectric substrate with copper interdigital transducers and a polyetherimide (PEI) layer, chosen for its high electromechanical coupling and strong CO₂ affinity. Finite element simulations were conducted to analyze the resonance frequency response under varying gas concentrations, film thicknesses, pressures, and temperatures. Results demonstrate a linear and sensitive frequency shift, with detection capability starting from 10 ppm. The sensor’s autonomy is ensured by a piezoelectric energy harvester composed of a cantilever beam structure with an attached seismic mass, where mechanical vibrations induce stress in a piezoelectric layer (PZT-5H or PVDF), generating electrical energy via the direct piezoelectric effect. Analytical and numerical analyses were performed to evaluate the influence of excitation frequency, material properties, and optimal load on power output. This integrated configuration offers a compact and energy-independent solution for real-time CO₂ monitoring in low-power or inaccessible environments. Full article

Microfluidics-based mixing methods have attracted increasing attention due to their great potential in bio-related and material science fields. The combination of acoustics and microfluidics, called acoustofluidics, has been shown to be a promising tool for precise manipulation of microfluids and micro-objects. In general, achieving robust mixing performance in an efficient and simple manner is crucial for microfluidics-based on-chip devices. When surface acoustic waves (SAWs) are introduced into microfluidic devices, the acoustic field can drive highly controllable acoustic streaming flows through acoustofluidic interactions with micro-solid structures, which have the advantages of label-free operation, flexible control, contactless force, fast-response kinetics, and good biocompatibility. Therefore, the design and application of various SAW micromixers have been demonstrated. Herein, we present a comprehensive overview of the latest research and development of SAW-based micromixers. Specifically, we discuss the design principles and underlying physics of SAW-based acoustic micromixing, summarize the distinct types of existing SAW micromixers, and highlight established applications of SAW micromixing technology in chemical synthesis, nanoparticle fabrication, cell culture, biochemical analysis, and cell lysis. Finally, we present current challenges and some perspectives to motivate further research in this area. The purpose of this work is to provide an in-depth understanding of SAW micromixers and inspire readers who are interested in making some innovations in this research field. Full article

Sorting particles or cells of specific sizes in complex systems has long been a focus of many researchers. Acoustic surface waves, which generate acoustic radiation forces on particles or cells and, thus, influence their motion, are commonly used for the non-destructive separation of particles or cells of specific sizes. In previous studies, the frequency of acoustic surface wave generation has been limited by the interdigitated transducer (IDT). To extend the effective operating frequency range of the IDT, a slanted-finger interdigitated transducer (SFIT) with a wide acoustic path and multiple operating frequencies was designed. Compared with traditional acoustic sorting devices, which suffer from a limited frequency range and narrow acoustic paths, this new design greatly expands both the operating frequency range and acoustic path width, and enables adjustable operating frequencies, providing a solution for sorting particles or cells with uneven sizes in complex environments. The optimal resonance frequency is distributed within the 32–42 MHz range, and the operating frequencies within this range can generate a standing wave acoustic path of approximately 200 $\mathsf{\mu }$m, thus enhancing the effectiveness of the operating frequencies. The microfluidic sorting device based on SFIT can efficiently and accurately sort polystyrene (PS) with particle sizes of 20 $\mathsf{\mu }$m, 30 $\mathsf{\mu }$m, and 50 $\mathsf{\mu }$m from mixed PS microspheres (5, 10, 20 $\mathsf{\mu }$m), (5, 10, 30 $\mathsf{\mu }$m), and (5, 10, 50 $\mathsf{\mu }$m), with a sorting efficiency and purity exceeding 96%. Additionally, the device is capable of sorting other types of mixed microspheres (5, 10, 20, 30, 50 $\mathsf{\mu }$m). This new wide-acoustic-path, multi-frequency sorting device demonstrates the ability to sort particlesin a high-purity, label-free manner, offering a more alternative to traditional sorting methods. Full article

A surface acoustic wave-based NO₂ sensor and its interface electronics, utilizing monolayered two-dimensional sensing materials, were developed for internal pollution monitoring in spacecraft. The sensor system consists of a two-port SAW delay line with monolayered graphene/MoS₂ flakes in the cavity region between two interdigital transducers, along with the interface electronics. A microheater was integrated adjacent to the sensor to maintain a stable temperature field on the sensor surface, thereby enhancing sensitivity, response/recovery times, and selectivity. The monolayered graphene/MoS₂ sensing material, with its high surface-to-volume ratio, excellent mobility, and moderate bonding force with target molecules, enables the rapid response and recovery times of less than 2.5 and 8 s, respectively—among the fastest reported in SAW gas sensor technology. The developed sensor combines the conductivity changes, the mass loading effect, and a synergistic effect that promotes carrier separation caused by a built-in potential barrier between the two monolayers, providing exceptionally high sensitivity of 578 Hz/ppm. Additionally, the sensor’s interface electronics were engineered to mitigate the effects of external factors, such as temperature and humidity, ensuring a stable and reliable performance under varying harsh conditions. Full article

With the development of piezoelectric-on-insulator (POI) substrates, X-cut LiNbO₃ thin-film resonators with interdigital transducers are widely investigated due to their adjustable resonant frequency (f_s) and effective electromechanical coupling coefficient ($K_{eff}^2$). This paper presents an in-depth study of simulations and measurements of laterally excited bulk acoustic wave resonators based on an X-cut LiNbO₃/SiO₂/Si substrate and a LiNbO₃ thin film to analyze the effects of electrode angle rotation ($\theta$) on the modes, f_s, and $K_{eff}^2$. The rotated $\theta$ leads to different electric field directions, causing mode changes, where the resonators without cavities are longitudinal leaky SAWs (LLSAWs, $\theta$ = 0$°$) and zero-order shear horizontal SAWs (SH₀-SAWs, $\theta$ = 90$°$) and the resonators with cavities are zero-order-symmetry (S₀) lateral vibrating resonators (LVRs, $\theta$ = 0$°$) and SH₀ plate wave resonators (PAW, $\theta$ = 90$°$). The resonators are fabricated based on a 400 nm X-cut LiNbO₃ thin-film substrate, and the measured results are consistent with those from the simulation. The fabricated LLSAW and SH₀-SAW without cavities show a $K_{eff}^2$ of 1.62% and 26.6% and a Bode-Q_max of 1309 and 228, respectively. Meanwhile, an S₀ LVR and an SH₀-PAW with cavities present a $K_{eff}^2$ of 4.82% and 27.66% and a Bode-Q_max of 3289 and 289, respectively. In addition, the TCF with a different rotated $\theta$ is also measured and analyzed. This paper systematically analyzes resonators on X-cut LiNbO₃ thin-film substrates and provides potential strategies for multi-band and multi-bandwidth filters. Full article

Surface acoustic wave (SAW)-based microfluidics has emerged as a promising technology for precisely manipulating particles and cells at the micro- and nanoscales. Acoustofluidic devices offer advantages such as low energy consumption, high throughput, and label-free operation, making them suitable for particle manipulation tasks including pumping, mixing, sorting, and separation. In this review, we provide an overview and discussion of recent advancements in SAW-based microfluidic devices for micro- and nanoparticle manipulation. Through a thorough investigation of the literature, we explore interdigitated transducer designs, materials, fabrication techniques, microfluidic channel properties, and SAW operational modes of acoustofluidic devices. SAW-based actuators are mainly based on lithium niobate piezoelectric transducers, with a plethora of wavelengths, microfluidic dimensions, and transducer configurations, applied for different fluid manipulation methods: mixing, sorting, and separation. We observed the accuracy of particle sorting across different size ranges and discussed different alternative device configurations to enhance sensitivity. Additionally, the collected data show the successful implementation of SAW devices in real-world applications in medical diagnostics and environmental monitoring. By critically analyzing different approaches, we identified common trends, challenges, and potential areas for improvement in SAW-based microfluidics. Furthermore, we discuss the current state-of-the-art and opportunities for further research and development in this field. Full article

The study presents the ethanol vapor sensing performance of a resistive sensor that utilizes a quaternary nanohybrid sensing layer composed of holey carbon nanohorns (CNHox), graphene oxide (GO), SnO₂, and polyvinylpyrrolidone (PVP) in an equal mass ratio of 1:1:1:1 (w/w/w/w). The sensing device includes a flexible polyimide substrate and interdigital transducer (IDT)-like electrodes. The sensing film is deposited by drop-casting on the sensing structure. The morphology and composition of the sensitive film are analyzed using scanning electron microscopy (SEM), Energy Dispersive X-ray (EDX) Spectroscopy, and Raman spectroscopy. The manufactured resistive device presents good sensitivity to concentrations of alcohol vapors varying in the range of 0.008–0.16 mg/cm³. The resistance of the proposed sensing structure increases over the entire range of measured ethanol concentration. Different types of sensing mechanisms are recognized. The decrease in the hole concentration in CNHox, GO, and CNHox due to the interaction with ethanol vapors, which act as electron donors, and the swelling of the PVP are plausible and seem to be the prevalent sensing pathway. The hard–soft acid-base (HSAB) principle strengthens our analysis. Full article

This study focuses on the possibility of generating divergent surface acoustic waves (SAWs) with interdigital transducers (IDTs) deposited on Y128° Lithium Niobate for non-destructive testing applications, particularly in the context of manufacturing layer-on-substrate systems for microelectronic components. The selected approach is to diffuse the SAWs over a large surface area and in various directions in order to analyze the structure and detect any defects when using the well-known passive imaging by correlating the diffuse acoustic field. The introduction of SAWs is achieved using offset interdigital transducers that make acoustic contact with the sample under analysis without causing damage. The considered IDTs are characterized based on criteria for maximizing the divergence angle, maximizing SAW emission amplitude, and minimizing the acoustic contact area. Three IDT configurations were tested to compare their performance: (i) a transducer with circular electrodes emitting from its wide convex end; (ii) a circular IDT emitting from its narrow concave end; and (ii) a narrow transducer with an aperture close to two wavelengths. It was shown that the second configuration provides the highest SAW amplitude, which is important while measuring the diffuse acoustic field. Nevertheless, the third one was particularly efficient in terms of reducing the contact area. Full article

Standing surface acoustic wave (SSAW)-based acoustofluidics is widely used due to its compatibility with soft materials and polymer structures. In the presence of an acoustic field, particles move either toward pressure nodes or anti-nodes according to their contrast factor. Using this technique, blood cells with a certain characteristic can be oriented in different streamlines in a microchannel. The cumulative effect of parameters, such as the inlet velocity ratio of the buffer solution to the blood sample, acoustic frequency, voltage, and channel geometry, is key to effective separation in these microfluidic chips. In this study, simultaneous separation of white blood cells, red blood cells, and platelets in one stage is simulated by means of numerical calculations. The linear constitutive equation for the piezoelectric substrate, the Helmholtz equation for the acoustic field, and the Navier–Stokes equations for fluid mechanics are solved simultaneously to precisely capture the blood cell behavior in the SSAW-based device. The results show that whole blood cell separation can be achieved using a velocity ratio of 6.25, a resonance frequency of 8.28 MHz, and a voltage of 8.5 V in the proposed five-outlet microfluidic chip. Full article

In this paper, enhanced rotational circulation in a circular microfluidic chamber driven by dual focused surface-acoustic-wave (SAW) beams is presented. To characterize the resonant frequency and focusing effect, we simulate the focused SAW field excited by an arc-shaped interdigital transducer patterned on a 128°Y-cut lithium-niobate (LiNbO₃) substrate using a finite element method. A full three-dimensional perturbation model of the combined system of the microfluidic chamber and the SAW device is conducted to obtain the acoustic pressure and acoustic streaming fields, which show rotational acoustic pressure and encircling streaming resulted in the chamber. Accordingly, the SAW acoustofluidic system is realized using microfabrication techniques and applied to perform acoustophoresis experiments on submicron particles suspending in the microfluidic chamber. The result verifies the rotational circulation motion of the streaming flow, which is attributed to enhanced angular momentum flux injection and Eckart streaming effect through the dual focused SAW beams. Our results should be of importance in driving particle circulation and enhancing mass transfer in chamber embedded microfluidic channels, which may have promising applications in accelerating bioparticle or cell reactions and fusion, enhancing biochemical and electrochemical sensing, and efficient microfluidic mixing. Full article

In cell or droplet separation, high acoustic wave energy of a surface acoustic wave (SAW) device is required to generate sufficient acoustic radiation force. In this paper, the electrode width-control floating electrode focused unidirectional interdigital transducer (EWC-FEFUDT) is proposed due to its enhanced focusing properties. The performance of the EWC-FEFUDT is investigated using the Coupling-of-Mode (COM) theory, and the COM parameter is extracted using the Finite Element Method (FEM). The four different forbidden band edge frequencies account for the unidirectionality of the proposed EWC-FEFUDT. A direction angle of ${\varphi }_{\kappa }-{\varphi }_{\zeta }=44.5°$ of the EWC-FEFUDT (Design 3) is obtained, being fairly close to the optimum value of 45°. The EWC-FEFUDT (Design 3) has a lower insertion loss (IL) of −5.1 dB and greater unidirectionality (20 × log₁₀($D$) = 13.8 dB). The SAW maximum amplitude of the EWC-FEFUDT (Design 3) is increased by about $1.5\times 10^{-4} \mu \mathrm{m}$ compared to that of the focused interdigital transducers (FIDTs). The maximum acoustic pressure of the EWC-FEFUDT is an order of magnitude higher than that of FIDTs. The EWC-FEFUDT exhibits enhanced focusing properties. The proposed EWC-FEFUDT may provide an alternative method for cell or droplet separation in an efficient manner. Full article

High frequency and large bandwidth are growing trends in communication radio-frequency devices. The LiNbO₃ thin film material is expected to become the preferred piezoelectric material for high coupling resonators in the 5G frequency band due to its ultra-high piezoelectric coefficient and low loss characteristics. The main mode of laterally excited bulk acoustic wave resonators (XBAR) have an ultra-high sound velocity, which enables high-frequency applications. However, the interference of spurious modes is one of the main reasons hindering the widespread application of XBAR. In this paper, a Z-cut LiNbO₃ thin film-based XBAR with arc-shaped electrodes is presented. We investigate the electric field distribution of the XBAR, while the irregular boundary of the arc-shaped electrodes affects the electric field between the existing interdigital transducers (IDTs). The mode shapes and impedance response of the XBAR with arc-shaped electrodes and the XBARs with traditional IDTs are compared in this work. The fabricated XBAR on a 350 nm Z-cut LiNbO₃ thin film with arc-shaped electrodes operating at over 5 GHz achieves a high effective electromechanical coupling coefficient of 29.8% and the spurious modes are well suppressed. This work promotes an XBAR with an optimized electrode design to further achieve the desired performance. Full article

To realize highly sensitive SAW devices, novel Al–Cu thin films were developed using a combinatorial sputtering system. The Al–Cu sample library exhibited a wide range of chemical compositions and electrical resistivities, providing valuable insights for selecting optimal materials for SAW devices. Considering the significant influence of electrode resistivity and density on acoustic wave propagation, an Al–Cu film with 65 at% Al was selected as the IDT electrode material. The selected Al–Cu film demonstrated a resistivity of 6.0 × 10⁻⁵ Ω-cm and a density of 4.4 g/cm³, making it suitable for SAW-based microfluidic actuator applications. XRD analysis revealed that the Al–Cu film consisted of a physical mixture of Al and Cu without the formation of Al–Cu alloy phases. The film exhibited a fine-grained microstructure with an average crystallite size of 7.5 nm and surface roughness of approximately 6 nm. The SAW device fabricated with Al–Cu IDT electrodes exhibited excellent acoustic performance, resonating at 143 MHz without frequency shift and achieving an insertion loss of −13.68 dB and a FWHM of 0.41 dB. In contrast, the Au electrode-based SAW device showed significantly degraded acoustic characteristics. Moreover, the SAW-based microfluidic module equipped with optimized Al–Cu IDT electrodes successfully separated 5 μm polystyrene (PS) particles even at high flow rates, outperforming devices with Au IDT electrodes. This enhanced performance can be attributed to the improved resonance characteristics of the SAW device, which resulted in a stronger acoustic radiation force exerted on the PS particles. Full article

In this work, a surface acoustic wave (SAW) temperature sensor based on a quartz substrate was designed and investigated. Employing the Coupling-of-Modes (COM) model, a detailed analysis was conducted on the effects of the number of interdigital transducers (IDTs), the number of reflectors, and their spacing on the performance of the SAW device. The impact of the transversal mode of quartz SAWs on the device was subsequently examined using the finite element method (FEM). The simulation results indicate that optimizing these structural parameters significantly enhances the sensor’s sensitivity and frequency stability. SAW devices with optimal structural parameters were fabricated, and their resonant frequencies were tested across a temperature range of 25–150 °C. Experimental results demonstrate that the SAW temperature sensor maintains high performance stability and data reliability throughout the entire temperature range, achieving a Bode-Q of 7700. Furthermore, the sensor exhibits excellent linearity and repeatability. An analysis of the sensor’s response under varying temperature conditions reveals a significant temperature dependency on its Temperature Coefficient of Frequency (TCF). This feature suggests that the sensor possesses potential advantages for applications in industrial process control and environmental monitoring. Full article