This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE), and glass reflow techniques. The advantages as well as disadvantages of each method are presented and discussed in light of the expe...
Glass-based microfluidic devices are essential for applications such as diagnostics and drug discovery, which utilize their optical clarity and chemical stability. This review systematically analyzes pulsed laser micromachining as a transformative te...
A millimeter-wave substrate-integrated waveguide (SIW) was firstly demonstrated using the micromachining of photoetchable glass (PEG) for 5G applications. A PEG substrate was used as a dielectric material of the SIW, and its photoetchable properties...
This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using glass reflow and anodic bonding techniques. Silicon through-wafer interconnects have been investigated by the glass...
We have studied femtosecond ablation of soda–lime glass sample under thin water film, under KOH and NaCl aqueous solutions films and their influence and benefits compared with ablation in the air atmosphere. These have been studied in case of t...
Silica glass is frequently used as a device material for micro/nano fluidic devices due to its excellent properties, such as transparency and chemical resistance. Wet etching by hydrofluoric acid and dry etching by neutral loop discharge (NLD) plasma...
We report on the application of femtosecond laser micromachining to the fabrication of complex glass microdevices, for high-order harmonic generation in gas. The three-dimensional capabilities and extreme flexibility of femtosecond laser micromachini...
This paper investigates micromachined antenna performance operating at 5 GHz for radio frequency (RF) energy harvesting applications by comparing different substrate materials and fabrication modes. The research aims to discover appropriate antenna d...
Brittle non-conductive materials, like glass and ceramics, are becoming ever more significant with the rising demand for fabricating micro-devices with special micro-features. Spark-Assisted Chemical Engraving (SACE), a novel micromachining technolog...
This paper reports on a novel, miniaturized magnetomechanical transducer/sensor made of borosilicate glass with wide dynamic range. The prototype is manufactured with laser micromachining and ablation techniques. Compared to state of the art, borosil...
This paper presents a novel approach to fabricate substrate integrated waveguides (SIWs) on glass substrates with tin (Sn) through glass vias (TGVs) tailored for millimeter-wave applications. The fabrication process employs a custom-designed vacuum s...
Femtosecond laser micromachining is becoming an established technique for the fabrication of complex three-dimensional structures in glass. The combination of laser writing and chemical etching increases the technique versatility by allowing the fabr...
Conventional manufacturing of microfluidic devices from glass substrates is a complex, multi-step process that involves different fabrication techniques and tools. Hence, it is time-consuming and expensive, in particular for the prototyping of microf...
We provide experimental evidence that the laser beam scanning strategy has a significant influence on material removal rate in the ultrafast laser machining of glass. A comparative study of two laser beam scanning methods, (i) bidirectional sequentia...
Laser micromachining technique offers a promising alternative method for rapid production of microfluidic devices. However, the effect of process parameters on the channel geometry and quality of channels on common microfluidic substrates has not bee...
The current demand for fabricating optical and photonic devices displaying high performance, using low-cost and time-saving methods, prompts femtosecond (fs)-laser processing as a promising methodology. High and low repetition femtosecond lasers enab...
Optically transparent materials are being found in an ever-increasing array of technological applications within industries, such as automotive and communications. These industries are beginning to realize the importance of implementing surface engin...
We demonstrate a microfluidic mixer of high mixing efficiency in fused silica substrate using femtosecond laser-induced wet etching and hydroxide-catalysis bonding method. The micromixer has a three-dimensional geometry, enabling efficient mixing bas...
A millimeter-wave substrate integrated waveguide (SIW) has been demonstrated using micromachined tungsten-coated through glass silicon via (TGSV) structures. Two-step deep reactive ion etching (DRIE) of silicon vias and selective tungsten coating ont...
Microalgae are an ideal source for next-generation biofuels due to their high photosynthetic rate. However, a key process limitation in microalgal biofuel production is harvesting of biomass and extraction of lipids in a cost-effective manner. The ha...
We present a rapid and highly reliable glass (fused silica) microfluidic device fabrication process using various laser processes, including maskless microchannel formation and packaging. Femtosecond laser assisted selective etching was adopted to pa...
Femtosecond laser micromachining (FLM) of fused silica allows for the realization of three-dimensional embedded optical elements and microchannels with micrometric feature size. The performances of these components are strongly affected by the machin...
We present the design, simulation, fabrication and characterization of monolithically integrated high resistivity p-type boron-diffused silicon two-zone heaters in a model high temperature microreactor intended for nanoparticle fabrication. We used a...
Femtosecond lasers are widely applied in scientific and industrial fields. Recent trends in the laser market show decreasing prices for femtosecond units, which will ultimately lead to the opening of new markets that were inaccessible in the past due...
As the field of microelectromechanical systems (MEMS) matures, new demands are being placed on the microfabrication of complex architectures in robust materials, such as hard plastics. Iterative design optimization in a timely manner—rapid prototypin...
Currently, silicon-strain-gauge-based diaphragm pressure sensors use four single-gauge chips for high-output sensitivity. However, the four-single-gauge configuration increases the number of glass frit bonds and the number of aluminum wire bonds, red...
We present a comprehensive study on the femtosecond laser direct welding of glass and metal, focusing on optimizing processing parameters and understanding the influence of material properties and beam shaping on welding quality. Using microscopy, we...
In the paper, the lab-on-chip platform applicable for the long-term cultivation of human cancer cells, as a solution meeting the demands of the CubeSat biological missions, is presented. For the first time, the selected cancer cell lines—UM-UC-...
The rapid expansion of femtosecond (fs) laser technology brought previously unavailable capabilities to laser material processing. One of the areas which benefited the most due to these advances was the 3D processing of transparent dielectrics, namel...
Half-bridge silicon strain gauges are widely used in the fabrication of diaphragm-type high-pressure sensors, but in some applications, they suffer from low output sensitivity because of mounting position constraints. Through a special design and fab...
Glass micromachining is currently becoming essential for the fabrication of micro-devices, including micro- optical-electro-mechanical-systems (MOEMS), miniaturized total analysis systems (μTAS) and microfluidic devices for biosensing. Moreover, glas...
In this work, an accelerating etching method for glass named thermal electrical modified etching (TEM etching) is investigated. Based on the identification of the effect in anodic bonding, a novel method for glass structure micromachining is proposed...
We describe an original integration technological platform for the miniaturization of micromachined on-chip optical microscopes, such as the laser scanning confocal microscope. The platform employs the multi-wafer vertical integration approach, combi...
This study investigated the feasibility of the micro powder blasting technique for the micro fabrication of sensor structures using the Pyrex glass to replace the existing silicon-based acceleration sensor fabrication processes. As the preliminary ex...
A novel micromachined z-axis torsional accelerometer based on the tunneling magnetoresistive effect is presented in this paper. The plane main structure bonded with permanent magnetic film is driven to twist under the action of inertial acceleration,...
In this paper, we report a novel teeter-totter type accelerometer based on glass-silicon composite wafers. Unlike the ordinary micro-electro-mechanical systems (MEMS) accelerometers, the entire structure of the accelerometer, includes the mass, the s...
Taking advantage of good hermeticity, tiny parasitic capacitance, batch mode fabrication, and compatibility with multiple bonding techniques, the glass-silicon composite substrate manufactured by the glass reflow process has great potential to achiev...
Microchannel reactors are among the most important tools used for high-performance continuous-flow synthesis. However, most microchannel reactors manufactured with conventional micromachining techniques are limited to two-dimensional (2D) planar geom...
Micro-drilling transparent dielectric materials by using non-diffracting beams impinging orthogonally to the sample can be performed without scanning the beam position along the sample thickness. In this work, the laser micromachining process, based...
In this study, based on the principle of grating interferometer-based acoustic sensors, design guidelines for the grating interferometric module were obtained and analyzed considering various factors in order to obtain high sensitivity, and a glass-b...
This paper reports the design, fabrication, and characterization of a MEMS capacitive accelerometer with an asymmetrical comb finger arrangement. By optimizing the ratio of the gaps of a rotor finger to its two adjacent stator fingers, the sensitivit...
This paper reviews the recent advances in reaction-ion etching (RIE) for application in high-aspect-ratio microfabrication. High-aspect-ratio etching of materials used in micro- and nanofabrication has become a very important enabling technology part...
This paper presents the design, simulation, fabrication and experiments of a micromachined z-axis tunneling magnetoresistive accelerometer with electrostatic force feedback. The tunneling magnetoresistive accelerometer consists of two upper different...
Microfluidic platform technology has presented a new strategy to detect and analyze analytes and biological entities thanks to its reduced dimensions, which results in lower reagent consumption, fast reaction, multiplex, simplified procedure, and hig...
In a previous study, we presented a novel manufacturing process for the creation of 6 × 6 and 8 × 8 microlens arrays (MLAs) comprising lenses with diameters of 1000 μm, 500 μm, and 200 μm within an area that covers 10 mm ×...
Electric discharge machining (EDM) stands out for its ability to perform no-contact machining of materials with desired forms by multi-pulse discharges. In this investigation, the machinability of drilling on Ti56Zr18Cu12, metallic glass, for micro-h...
In this paper, we explore the use of chip-scale blown glass microbubble structures for MEMS packaging applications. Specifically, we demonstrate the efficacy of this method of packaging for the improvement of the lifetime of a ferrofluid-based magnet...
Micromachined resonant accelerometers (MRAs), especially those devices fabricated by silicon on glass technology, suffer from temperature drift error caused by inherent thermal stress. This paper proposes two structure designs to attenuate the effect...
Flash photolysis of caged compounds is one of the most powerful approaches to investigate the dynamic response of living cells. Monolithically integrated devices suitable for optical uncaging are in great demand since they greatly simplify the experi...
This paper presents an alternative approach for angular-rate sensing based on the way that the natural vestibular semicircular canals operate, whereby the inertial mass of a fluid is used to deform a sensing structure upon rotation. The presented gyr...
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