- Article
An Orthogonal Type Two-Axis Lloyd’s Mirror for Holographic Fabrication of Two-Dimensional Planar Scale Gratings with Large Area
- Xinghui Li,
- Haiou Lu,
- Qian Zhou,
- Guanhao Wu,
- Kai Ni and
- Xiaohao Wang
In this paper, an orthogonal type two-axis Lloyd’s mirror interference lithography technique was employed to fabricate two-dimensional planar scale gratings for surface encoder application. The two-axis Lloyd’s mirror interferometer is co...