- Article
Porous Organosilica Films: Is It Possible to Enhance Hydrophobicity While Maintaining Elastic Stiffness?
- Alexey S. Vishnevskiy,
- Dmitry A. Vorotyntsev,
- Dmitry S. Seregin,
- Konstantin A. Vorotilov and
- Alexander S. Sigov
Organosilica films, composed of a silicon oxide network with terminal methyl groups, are widely utilized in various applications, including microelectronics. Many of these applications require high hydrophobicity and good mechanical properties, which...