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Micromachines
Special Issues
Nonlinear Dynamics in MEMS/NEMS
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Nonlinear Dynamics in MEMS/NEMS

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (30 June 2023) | Viewed by 2912

Special Issue Editors

Dr. Kaiming Hu

E-Mail Website
Guest Editor
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
Interests: nonlinear dynamics in MEMS/NEMS; stochastic dynamics; MEMS/NEMS sensors
Dr. Lei Li

E-Mail Website
Guest Editor
School of Transportation and Vehicle Engineering, Shandong University of Technology, Zibo 255049, China
Interests: nonlinear dynamics in MEMS/NEMS; mode coupling vibration; micro resonance sensor ; chaos and bifurcation; bifurcation based sensor
Dr. Yan Qiao

E-Mail Website
Guest Editor
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
Interests: nonlinear dynamics in MEMS/NEMS; stochastic dynamics; MEMS/NEMS sensors

Special Issue Information

Dear Colleagues,

Owing to small size, high sensitivity, and low power consumption, resonant MEMS/NEMS have been considerably investigated over the past few decades for probing fundamental mechanical phenomena and a variety of commercial applications, such as mass sensors, accelerometers, bandpass filters, gyroscopes, gas and biosensors. Resonant MEMS/NEMS devices often operate in a nonlinear regime due to the small scale and the nonlinear driving forces, which have rich and complex nonlinear dynamics, such as softening or hardening behaviors, internal resonances, bistability, snap-though, chaos, Hopf bifurcations, synchronization and veering. Understanding the nonlinear dynamical behaviors of resonant MEMS/NEMS are of great importance to meet the increasing performance requirements of the applications. A large number of theoretical and experimental works have investigated the nonlinear dynamics of MEMS/NEMS and their exploitation for various applications, which can not only provide a rapid tool for optimized design of devices, but also help in comprehensively understanding the conditions for which nonlinear phenomena arise. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on: (1) novel modeling and analysis methodologies of nonlinear dynamics of vibrating MEMS/NEMS; (2) novel designs, fabrication, control of nonlinear MEMS/NEMS; and (3) new developments of applying nonlinear MEMS/NEMS to study on basic physical phenomena and the latest applications.

We look forward to receiving your submissions.

Dr. Kaiming Hu
Dr. Lei Li
Dr. Yan Qiao
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS/NEMS dynamic modeling
  • MEMS/NEMS dynamic analysis method
  • MEMS/NEMS dynamic control method
  • nonlinear MEMS/NEMS design and fabrication
  • nonlinear MEMS/NEMS applications

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Published Papers (1 paper)

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Research

20 pages, 3342 KiB  
Article
Jump and Pull-in Instability of a MEMS Gyroscope Vibrating System
by Yijun Zhu and Huilin Shang
Micromachines 2023, 14(7), 1396; https://doi.org/10.3390/mi14071396 - 8 Jul 2023
Viewed by 1638
Abstract
Jump and pull-in instability are common nonlinear dynamic behaviors leading to the loss of the performance reliability and structural safety of electrostatic micro gyroscopes. To achieve a better understanding of these initial-sensitive phenomena, the dynamics of a micro gyroscope system considering the nonlinearities [...] Read more.
Jump and pull-in instability are common nonlinear dynamic behaviors leading to the loss of the performance reliability and structural safety of electrostatic micro gyroscopes. To achieve a better understanding of these initial-sensitive phenomena, the dynamics of a micro gyroscope system considering the nonlinearities of the stiffness and electrostatic forces are explored from a global perspective. Static and dynamic analyses of the system are performed to estimate the threshold of the detecting voltage for static pull-in, and dynamic responses are analyzed in the driving and detecting modes for the case of primary resonance and 1:1 internal resonance. The results show that, when the driving voltage frequency is a bit higher than the natural frequency, a high amplitude of the driving AC voltage may induce the coexistence of bistable periodic responses due to saddle-node bifurcation of the periodic solution. Basins of attraction of bistable attractors provide evidence that disturbance of the initial conditions can trigger a jump between bistable attractors. Moreover, the Melnikov method is applied to discuss the condition for pull-in instability, which can be ascribed to heteroclinic bifurcation. The validity of the prediction is verified using the sequences of safe basins and unsafe zones for dynamic pull-in. It follows that pull-in instability can be caused and aggravated by the increase in the amplitude of the driving AC voltage. Full article
(This article belongs to the Special Issue Nonlinear Dynamics in MEMS/NEMS)
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