Small-Scale Mechanical Behaviors in Advanced Engineering Materials

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".

Deadline for manuscript submissions: 31 December 2025 | Viewed by 450

Special Issue Editors

Department of Chemical Engineering, University of Waterloo, 200 University Avenue West, Waterloo, ON N2L 3G1, Canada
Interests: nanoindentation; sub-micron fabrication; nanomechanics; thin film delaminations; integrate circuits; cell immobilization; morphology control of cells
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Guest Editor
Department of Materials Science and Engineering, Indian Institute of Technology, Hauz Khas, New Delhi 110016, India
Interests: nanotribology; lubricants; friction; 2D materials; tribochemistry; scanning probe microscopy

Special Issue Information

Dear Colleagues,

Mechanical failures of high-tech devices, such as nanoelectronics and microelectromechanical systems, are often caused by factors like process-induced residual stresses, adhesion, mechanical wear, or mechanical deformation during fabrication. Therefore, understanding the small-scale mechanical properties of materials is essential for the commercial success of future technologies. Advanced mechanical characterization techniques, including nanoindentation and atomic force microscope-based methods, have proven to be crucial in understanding these complex material behaviors. This Special Issue, titled ‘Small-Scale Mechanical Behaviors in Advanced Engineering Materials’, invites researchers from both industry and academia to present their recent work in areas such as nanoindentation, micro- and nano-tribology (friction, wear, and lubrication), interfacial adhesion, chemical mechanical polish (CMP), and fracture mechanics, as such studies are crucial for enhancing the performance and reliability of advanced technological devices. These devices include, but are not limited to, nanoelectronics, microelectromechanical, biomaterials, medical implants, energy storage devices, and aerospace components. Manuscripts focusing on biological specimens are also welcome. Topic of interests include, but are not limited to, the following:

  1. Small-scale mechanical properties;
  2. Nano-tribology and wear;
  3. Nanoindentation and contact mechanics;
  4. Chemical Mechanical Polish (CMP);
  5. Mechanical wear in biomedical implant materials;
  6. Biological cell adhesion on surfaces.

Dr. Ting Tsui
Dr. Nitya Nand Gosvami
Guest Editors

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Keywords

  • small-scale mechanical properties
  • nano-tribology and wear
  • nanoindentation and contact mechanics
  • chemical mechanical polish (CMP)
  • mechanical wear in biomedical implant materials
  • biological cell adhesion on surfaces

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Published Papers (1 paper)

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Research

12 pages, 3737 KiB  
Article
The Influence of Thermal Annealing on the Chemical Composition, Nanomechanical, and Nanotribological Properties of Tantalum Thin Films
by Debottam Datta, Ali Eskandari, Junaid Syed, Himanshu Rai, Nitya Nand Gosvami and Ting Y. Tsui
Micromachines 2025, 16(4), 427; https://doi.org/10.3390/mi16040427 - 2 Apr 2025
Viewed by 350
Abstract
Tantalum metal and tantalum oxide thin films are commonly used in semiconductor devices, protective coatings, and biomedical implants. However, there is limited information on their nanotribological behavior and small-scale mechanical properties. This study characterized the chemical, mechanical, and tribological properties of as-deposited and [...] Read more.
Tantalum metal and tantalum oxide thin films are commonly used in semiconductor devices, protective coatings, and biomedical implants. However, there is limited information on their nanotribological behavior and small-scale mechanical properties. This study characterized the chemical, mechanical, and tribological properties of as-deposited and 400 °C annealed β-Ta thin films using nanoindentation and atomic force microscope (AFM)-based nanoscale friction and wear tests. X-ray photoelectron spectroscopy (XPS) results revealed that a thermally grown Ta oxide layer forms on the surface of Ta film after being annealed at 400 °C. The nanoindentation data indicated an increase in both the hardness and elastic modulus in the heat-treated sample compared to the as-deposited Ta film (13.1 ± 1.3 GPa vs. 12.0 ± 1.4 GPa for hardness) and (213.1 ± 12.7 GPa vs. 175.2 ± 12.3 GPa for elastic modulus). Our nanotribological results show that the friction increased and wear resistance decreased on the surface of the annealed sample compared to the as-deposited Ta film. This discrepancy may be caused by the oxidation of Ta on the film surface, which induces residual compressive stresses in the film and degrades its wear resistance. Our results highlight the influence of thermal annealing and oxidation on nanotribological behavior and small-scale mechanical properties of Ta thin films. Full article
(This article belongs to the Special Issue Small-Scale Mechanical Behaviors in Advanced Engineering Materials)
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