Microplasma technology and applications in MEMS
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".
Deadline for manuscript submissions: closed (31 August 2021) | Viewed by 3512
Special Issue Editor
Special Issue Information
Dear colleagues,
Microplasmas, defined as plasmas where at least one dimension is in the submillimeter range, include microarcs and microsparks, which are generated by electrical breakdown in gases and in liquids. Microplasma has attracted significant attention from various fields owing to its unique characteristics, like high pressure operation, non-equilibrium chemistry, continuous-flow, microscale geometry, and the self-organization phenomenon. The field of microplasmas gained recognition as a well-defined area of research and application within the larger field of plasma science and technology about 20 years ago. Since then, the activity in microplasma research and applications has continuously increased to sensors, biomedical devices, light source, etc.
This Special Issue seeks research papers and review articles that focus on microplasma physics, microplasma generation technology, and their applications. The scope covers all the relevant topics, including (but not limited to): environmental applications, surface modifications, micromachining technology, nanomaterial synthesis, micro and nano machining fabrication.
Prof. Dr. Kangil Kim
Guest Editor
Manuscript Submission Information
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Keywords
- Microplasma physics
- Microplasma generation
- Microplasma sensors
- Surface modification
- Microplasma applications
- Plasma fabirication
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