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Micromachined Gas Sensors

This special issue belongs to the section "A: Physics".

Special Issue Information

Keywords

  • Analytical modelling
  • Chemical sensors
  • Gas sensors
  • Novel applications
  • Micro electromechanical systems (MEMS)
  • Micro and nano fabrication process
  • Sensor array
  • Sensor design and optimization

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Published Papers

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Micromachines - ISSN 2072-666X