Recent Advances in MEMS Pressure Sensors
A special issue of Micromachines (ISSN 2072-666X).
Deadline for manuscript submissions: closed (15 October 2021) | Viewed by 4593
Special Issue Editors
Interests: micro-nano fabrication technology and intelligent sensors; micromachined ultrasonic transducers; quantum sensors
Special Issues, Collections and Topics in MDPI journals
Interests: MEMS sensors; CMUTs; PMUTs; flexible electronics & wearable sensors
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
MEMS pressure sensors are highly demanded in many fields, such as industrial processing, automobiles, daily electronic products, clinical medicine and aerospace, because of their miniature sizes, low power consumption, high sensitivity and ability to be integrated with ICs. In the past few decades, a great number of studies have been conducted on the design, modeling and fabrication of MEMS pressure sensors. Remarkable progress has been achieved in improving their performance, such as sensitivity, resolution, linearity, stability and measuring accuracy. However, with the increasing requirements and expanding scope of practical applications, new challenges are arising that require continuous efforts to address. For instance, low-pressure sensors are required to detect subtle pressure changes in clinical medicine. Ultra-low-pressure sensors are required for monitoring vacuums in MEMS processes. Besides these new requirements regarding pressure detection ranges, the working environments also vary. For example, MEMS pressure sensors for aerospace should be able to work, and maintain their stability and reliability, in extremely harsh conditions, such as under strong vibration and in ultra-high- or ultra-low-temperature environments. To address these newly raised and unmet requirements in practical applications, a vast number of investigations should be carried out to innovate modeling, design, fabrication and packaging technologies for MEMS pressure sensors.
Therefore, this Special Issue focuses on recent advances in modeling, design, fabrication and packaging technologies for MEMS pressure sensors. Both original research and review papers are welcome.
Prof. Dr. Libo Zhao
Dr. Zhikang Li
Guest Editors
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
Keywords
- MEMS Pressure Sensors
- Principle Innovation
- Structure Design
- Theoretical Modeling
- Fabrication
- Packaging Technologies
- Signal Processing Circuits
- Performance Enhancement
- Extreme Pressure Detection
- Extremely Harsh Working Environment
Benefits of Publishing in a Special Issue
- Ease of navigation: Grouping papers by topic helps scholars navigate broad scope journals more efficiently.
- Greater discoverability: Special Issues support the reach and impact of scientific research. Articles in Special Issues are more discoverable and cited more frequently.
- Expansion of research network: Special Issues facilitate connections among authors, fostering scientific collaborations.
- External promotion: Articles in Special Issues are often promoted through the journal's social media, increasing their visibility.
- e-Book format: Special Issues with more than 10 articles can be published as dedicated e-books, ensuring wide and rapid dissemination.
Further information on MDPI's Special Issue policies can be found here.
