Thin-Film Technology in Atomic Scale and Micro/Nano Manufacturing: From Preparation to Application

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".

Deadline for manuscript submissions: 15 March 2026 | Viewed by 447

Special Issue Editors


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Guest Editor
Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
Interests: thin film materials; interface coupling; heterostructure; physical vapor deposition

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Guest Editor
School of Materials Science & Engineering, Beijing Institute of Technology, Beijing 100081, China
Interests: artificial intelligence; thin films; amorphous thin films

Special Issue Information

Dear Colleagues,

The study of thin-film fabrication and characterization techniques holds significant scientific and practical value. At the fundamental research level, precise control over film composition, structure, and thickness helps uncover the distinctive physicochemical properties of low-dimensional materials, such as quantum confinement effects and interfacial coupling effects, providing a theoretical foundation for novel material design. In terms of technological applications, high-performance thin films serve as critical components in semiconductor devices, optoelectronic elements, and energy storage/conversion systems, where optimized synthesis and accurate characterization directly determine device performance. Furthermore, emerging thin-film technologies (flexible films, ultrathin two-dimensional materials) have driven advancements in wearable electronics, flexible displays, and other cutting-edge fields.

Therefore, in-depth research on thin-film preparation and characterization techniques is of great importance for advancing materials science and industrial innovation.

This Special Issue aims to present high-quality research papers, short communications, and review articles that focus on the atomic-scale and micro/nano-manufacturing field. Research areas may include (but are not limited to) the following:

  • Magnetic/electrical thin films;
  • Metal/semiconductor/insulating/ceramic thin films;
  • Heterostructures and superlattices.

We look forward to receiving your contributions.

Prof. Dr. Fengguang Liu
Prof. Dr. Baicheng Mei
Guest Editors

Manuscript Submission Information

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Keywords

  • growth of thin films
  • interface coupling
  • defect control
  • material morphology characterization
  • functional coatings
  • nanoclusters

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Published Papers (1 paper)

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Research

15 pages, 7165 KiB  
Article
Structural and Performance Studies of Lanthanum–Nitrogen Co-Doped Titanium Dioxide Thin Films Under UV Aging
by Pengcheng Cao, Li Zhang and Yanbo Yuan
Micromachines 2025, 16(8), 842; https://doi.org/10.3390/mi16080842 - 23 Jul 2025
Viewed by 329
Abstract
In this study, lanthanum–nitrogen co-doped titanium dioxide (La-N-TiO2) thin films were fabricated using Ion Beam Assisted Deposition (IBAD) and subjected to accelerated ultraviolet (UV) aging experiments to systematically investigate the impact of co-doping on the films’ resistance to UV aging. X-ray [...] Read more.
In this study, lanthanum–nitrogen co-doped titanium dioxide (La-N-TiO2) thin films were fabricated using Ion Beam Assisted Deposition (IBAD) and subjected to accelerated ultraviolet (UV) aging experiments to systematically investigate the impact of co-doping on the films’ resistance to UV aging. X-ray diffraction (XRD) analysis revealed that La-N co-doping inhibits the phase transition from anatase to rutile, significantly enhancing the phase stability of the films. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) characterizations indicated that co-doping increased the density and surface uniformity of the films, thereby delaying the expansion of cracks and increase in roughness induced by UV exposure. Energy-dispersive X-ray spectroscopy (EDS) results confirmed the successful incorporation of La and N into the TiO2 lattice, enhancing the chemical stability of the films. Contact angle tests demonstrated that La-N co-doping markedly improved the hydrophobicity of the films, inhibiting the rapid decay of hydrophilicity during UV aging. After three years of UV aging, the co-doped films maintained high structural integrity and photocatalytic performance, exhibiting excellent resistance to UV aging. These findings offer new insights into the long-term stability of photovoltaic self-cleaning materials. Full article
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