MEMS Sensors and Their Novel Breakthrough Applications
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".
Deadline for manuscript submissions: 31 December 2025 | Viewed by 63
Special Issue Editor
Special Issue Information
Dear Colleagues,
With the rapid development of N/MEMS sensors, they could be classified into many fields, such as optical sensors, chemical sensors, pressure sensors, environmental sensors, biosensors, and so on. Current nano- and microtechnology provide an effective approach to perform specific sensing functions using passive or active manipulations, enabling novel breakthrough applications.
This Special Issue brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of N/MEMS devices for transducing physical signals. The aims are on the research of sensors, nano/microstructures, integrated sensors–actuators, microsystems, and other devices or subdevices ranging in size from millimeters to sub-microns; micromechatronics; microelectromechanical systems; silicon and non-silicon fabrication techniques; analysis of microsystems; exploration of new topics and materials related to micromechanics; nano/microsensor-related simulation tools; and other topics of interest relating to N/MEMS sensors. This Special Issue seeks to publish original papers; review articles are also welcomed. The major areas of activity in the development of novel sensors and transducers solicited and expected in this Special Issue are within the following device areas:
- Nanoscale materials and fabrication;
- Composite materials, polymers, and fabrication processes;
- Physical sensors and microsystems;
- Chemical sensors and microsystems;
- Optical sensors and microsystems;
- Flexible sensors and microsystems;
- Biosensors and microsystems including in vitro medical applications;
- Packaging and solid-state materials and fabrication processes;
- Microfluidic platform technologies;
- Wearable and in vivo medical devices and microsystems.
Experimental results, as well as the design, simulation, and theory of each topic, are of interest.
Prof. Dr. Yu-Sheng Lin
Guest Editor
Manuscript Submission Information
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Keywords
- MEMS sensors
- microstructures
- nanomaterials
- nanophotonics
- 2D materials
- metamaterials
- photonic integrated circuit
- microfluidics
- biochips
- 3D printing
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