Flexible Intelligent Sensors: Design, Fabrication and Applications

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: 31 December 2025 | Viewed by 1600

Special Issue Editor


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Guest Editor
School of Instrument Science and Technology, Xi'an Jiaotong University, Xi'an 710054, China
Interests: flexible smart/integrated sensors; flexible hybrid electronics; wearable medical devices and instruments

Special Issue Information

Dear Colleagues,

Flexible intelligent sensors gain momentum when acquiring, storing, and calculating information compared to traditional sensors or transistors. For applications related to the realization of precise tactile sensation on humanoid robots or health monitoring using skin or organ tissue, flexible intelligent sensors have the power to significantly enhance smart sensing functions and reduce the dimension of devices within a limited space or surface. Recent developments in novel sensing mechanisms, advanced materials, smart algorithms, and special fabrication technology have further boosted the advancement of flexible intelligent sensors. Furthermore, these sensors will be smarter, more integrated, and exhibit a higher performance in various contexts, such as disease diagnosis, robot precise manipulation, and human/machine long-term health monitoring. One common aim of this Special Issue is to gather innovative and high-impact works related to flexible intelligent sensors, with a particular focus on technical advancements and recent developments. We welcome scholars to contribute research papers, review articles, and perspectives that address the following topics:

  • Functional sensing materials
  • Novel sensing mechanisms
  • AI algorithms for sensors
  • Flexible Intelligent/Integrated sensor
  • Advanced sensing designs, architectures, devices, and instruments
  • Hybrid or nano/micro fabrication 
  • Flexible electronics
  • Advanced application

Dr. Hongcheng Xu
Guest Editor

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Keywords

  • functional sensing materials
  • novel sensing mechanisms
  • AI algorithms for sensors
  • flexible intelligent/integrated sensor
  • advanced sensing designs, architectures, devices, and instruments
  • hybrid or nano/micro fabrication
  • flexible electronics
  • advanced application

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Published Papers (1 paper)

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Research

18 pages, 7507 KiB  
Article
Fabrication of an Integrated, Flexible, Wireless Pressure Sensor Array for the Monitoring of Ventricular Pressure
by Natiely Hernández-Sebastián, Daniela Diaz-Alonso, Bernardino Barrientos-García, Francisco Javier Renero-Carrillo and Wilfrido Calleja-Arriaga
Micromachines 2024, 15(12), 1435; https://doi.org/10.3390/mi15121435 - 28 Nov 2024
Cited by 1 | Viewed by 1310
Abstract
This work presents the design, fabrication, and rigorous validation of a flexible, wireless, capacitive pressure sensor for the full-range continuous monitoring of ventricular pressure. The proposed system consists of an implantable set and an external readout device; both modules were designed to form [...] Read more.
This work presents the design, fabrication, and rigorous validation of a flexible, wireless, capacitive pressure sensor for the full-range continuous monitoring of ventricular pressure. The proposed system consists of an implantable set and an external readout device; both modules were designed to form an RCL resonant circuit for passive, wireless pressure sensing and signal retrieving. Using surface micromachining and flexible electronics techniques, a two-variable capacitor array and a dual-layer planar coil were integrated into a flexible ergonomic substrate, avoiding hybrid-like connections in the implantable set. The proposed arrangement (capacitor array and dual-layer coil) allows us to optimize the operation pressure range and sensing distance. The use of polyimide as both the flexible substrate and the passivation material is a key feature, ensuring a biocompatible, implantable set that is mechanically flexible and can be folded to a compact size to achieve minimally invasive implantation. An external readout device has also been developed using a discrete printed circuit board (PCB) approach to support pressure measurements. The pressure responsivity of the sensor was validated to the laboratory level using a controlled pressure chamber. The results obtained show that the capacitance value of the sensor changed from 5.68 pF to 33.26 pF as the pressure varied from 0 to 300 mmHg. Correspondingly, the resonance frequency of the implantable set shifted from 12.75 MHz to 5.27 MHz. The sensitivity of the capacitive sensor was approximately 0.58 pF/mmHg and the typical response time was 220 ms. The wireless system performance was evaluated in both air and synthetic biological tissue using a Maxwell–Wien bridge circuit. The results showed a sensing distance longer than 3.5 cm, even under moderate misalignment conditions (up to 1.5 cm). The output voltage was successfully measured, ranging from 502.54 mV to 538.29 mV, throughout the full pressure range, with a measurement error of ±2.2 mV. Full article
(This article belongs to the Special Issue Flexible Intelligent Sensors: Design, Fabrication and Applications)
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