Next-Generation Piezoelectric Films: Materials, Fabrication, and Applications

Dear Colleagues,

Piezoelectric films have been extensively utilized across a variety of fields, particularly in piezoelectric MEMS sensors, actuators, and energy harvesting systems. Recent scientific breakthroughs have not only improved the intrinsic performance of these films, but have also accelerated progress in multiple interconnected domains. These include advances in material science, innovative deposition and measurement methodologies, device design strategies, and micro-fabrication techniques tailored for piezoelectric MEMS devices. In light of these developments, this Special Issue of Micromachines seeks to establish a dedicated platform for compiling the most recent research outcomes concerning piezoelectric films. By bringing together diverse and cutting-edge research, this Special Issue aims to foster productive dialogue between academic and industrial communities, thereby promoting further innovation and technological advancement in the field of high-performance piezoelectric film technology.

In this Special Issue, the current state of this exciting research field will be presented, covering a wide range of topics including, but not limited to:

• Deposition methods of piezoelectric thin films such as PVD and CVD, and the solution process.
• Deposition methods of piezoelectric thick films such as screen printing, aerosol jetting, and printing.
• Low-temperature process of piezoelectric films.
• Next-generation piezoelectric materials such as lead-free materials.
• Piezoelectric thin films for MEMS devices.
• Piezoelectric energy harvesting.
• Piezoelectric thin films for wearable devices.
• New applications of piezoelectric thin films.

Dr. Longfei Song
Guest Editor

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