20 Years of SU8 as MEMS Material
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".
Deadline for manuscript submissions: closed (31 May 2021) | Viewed by 22358
Special Issue Editors
Interests: polymers; MEMS processing; BioMEMS; stereolithography; medical devices
Special Issues, Collections and Topics in MDPI journals
Interests: bioMEMS; micro- and nano-fluidics; cell chips; bioelectronics; biosensors
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Since its first use as MEMs material in 1997, SU8 has significantly contributed to the development of a large array of microsystems. First used as a negative photoresist, the quickly obtained high aspect ratio components and the possibility to easily pattern multilevel structures made it a polymer of choice for the UV-LIGA process and led to its early adoption in industrial applications. In the last 20 years, SU8 has been largely used in academic research for a large range of applications: structural components, optical waveguides, micro-channels for microfluidic and lab-on-chip applications, micro-mixers, cell-chips, bio-related applications, etc. In addition to UV-photolithography, many other micro-patterning methods have been used to process SU8, such as electron-beam lithography, laser ablation, thermal and UV nano-imprinting, inkjet printing, and molding. Composite materials based on SU8 have also been developed by the addition of a wide variety of fillers, such as nanoparticles, carbon nanotubes, carbon black, ceramic powders, and many others. In recent years, the interest in SU8 in the MEMS community has continued to grow and has led to a number of new applications, some of them using SU8 in very innovative and unexpected ways.
This Special Issue aims to highlight the current state of the art in the use of SU8 for micro- or nanotechnology. We invite contributions on all aspects related to SU8, including its processing techniques, its use in new composite resists, its academic and industrial developments, and its use for manufacturing systems in optics, biology, medicine, chemistry, mechanics, fluidics, etc.
We are looking forward to receiving your contributions.
Prof. Arnaud Bertsch
Prof. Dr. Phillipe Renaud
Guest Editors
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Keywords
- SU8
- UV-LIGA
- nanopatterning
- SU8-based composite materials
- new processing techniques for SU8
- SU8 as structural material
- etching SU8
- innovative micro-components
- cell-chips
- medical devices
- SU8-based waveguides
- application of SU8 in optics
- characterization of SU8 and SU8-based composites
- PDMS devices made from SU8 molding
- microfluidics
- lab on a chip
- beyond SU8: alternative high aspect ratio resists
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