Micro-Manufacturing and Applications, 4th Edition: Materials and High-Precision Micromachining

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".

Deadline for manuscript submissions: closed (30 May 2024) | Viewed by 11627

Special Issue Editor

Special Issue Information

Dear Colleagues,

Micro-machining became fashionable more than 15 years ago as the need for micro parts became dominant on the consumer and military markets. In the beginning, a significant portion of micro parts were made of silicon, as one of the most well-known materials. The processing technologies also came from the semiconductor industry, and equipment and machines predominantly covered mostly the production of silicon-based parts. This material could not, however, meet the need for micro parts and products on the market. There was and there still is significant demand for non-silicon-based micro- and nanoproducts, as well as for the development of processing equipment and machines for non-silicon-based materials. It has thus become clear that the materials use in normal manufacturing are in most cases not applicable or suitable for the production of micro and nano parts. It has also become clear that the existing manufacturing technologies can to some extent be scaled down, but there are natural limits to the equipment and processes beyond which new technologies (processing windows) and new equipment need to be designed and adopted. In many cases, specific manufacturing processes are oriented toward only specific materials, and the production of specific parts (or features) is only possible with the use of certain technology.

The aim of this Special Issue is to publish papers devoted to materials and specific micro/nano-manufacturing technologies. Also welcome are papers devoted to designing materials with pre-defined properties (either for specific processes or specific use). It is anticipated that the need to design materials for specific needs will grow rapidly, and thus, establishing standards for micro/nano-machining is important; as such, papers focusing on establishing the natural boundaries of processes and/or determining their limits are very welcome.

Dr. Atanas Ivanov
Guest Editor

Manuscript Submission Information

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Keywords

  • micro manufacturing
  • high-precision micromachining
  • specific micro/nano-manufacturing technologies
  • materials design
  • micro/nano-machining

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Published Papers (8 papers)

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Research

21 pages, 19375 KiB  
Article
Finite Element Analysis of Plastic Deformation in Ultrasonic Vibration Superimposed Face Milling of Steel X46Cr13
by Richard Börner, Philipp Steinert, Nithin Kumar Bandaru and Andreas Schubert
Micromachines 2024, 15(6), 730; https://doi.org/10.3390/mi15060730 - 30 May 2024
Viewed by 529
Abstract
Ultrasonic vibration superimposed face milling enables the generation of predefined surface microstructures by an appropriate setting of the process parameters. The geometrical reproducibility of the surface characteristics depends strongly on the plastic material deformation. Thus, the precise prediction of the emerging surface microstructures [...] Read more.
Ultrasonic vibration superimposed face milling enables the generation of predefined surface microstructures by an appropriate setting of the process parameters. The geometrical reproducibility of the surface characteristics depends strongly on the plastic material deformation. Thus, the precise prediction of the emerging surface microstructures using kinematic simulation models is limited, because they ignore the influence of material flow. Consequently, the effects of plastic as well as elastic deformation are investigated in depth by finite element analysis. Microstructured surfaces resulting from these numerical models are characterized quantitatively by areal surface parameters and compared to those from a kinematical simulation and a real machined surface. A high degree of conformity between the values of the simulated surfaces and the measured values is achieved, particularly with regard to material distribution. Deficits in predictability exist primarily due to deviations in plastic deformation. Future research can address this, either by implementing a temperature consideration or adapting specific modeling aspects like an adjusted depth of cut or experimental validated material parameters. Full article
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22 pages, 7609 KiB  
Article
Research on an Online Monitoring Device for the Powder Laying Process of Laser Powder Bed Fusion
by Bin Wei, Jiaqi Liu, Jie Li, Zigeng Zhao, Yang Liu, Guang Yang, Lijian Liu and Hongjie Chang
Micromachines 2024, 15(1), 97; https://doi.org/10.3390/mi15010097 - 3 Jan 2024
Cited by 1 | Viewed by 1543
Abstract
Improving the quality of metal additive manufacturing parts requires online monitoring of the powder bed laying procedure during laser powder bed fusion production. In this article, a visual online monitoring tool for flaws in the powder laying process is examined, and machine vision [...] Read more.
Improving the quality of metal additive manufacturing parts requires online monitoring of the powder bed laying procedure during laser powder bed fusion production. In this article, a visual online monitoring tool for flaws in the powder laying process is examined, and machine vision technology is applied to LPBF manufacture. A multiscale improvement and model channel pruning optimization method based on convolutional neural networks is proposed, which makes up for the deficiencies of the defect recognition method of small-scale powder laying, reduces the redundant parameters of the model, and enhances the processing speed of the model under the premise of guaranteeing the accuracy of the model. Finally, we developed an LPBF manufacturing process laying powder defect recognition algorithm. Test experiments show the performance of the method: the minimum size of the detected defects is 0.54 mm, the accuracy rate of the feedback results is 98.63%, and the single-layer laying powder detection time is 3.516 s, which can realize the effective detection and control of common laying powder defects in the additive manufacturing process, avoids the breakage of the scraper, and ensures the safe operation of the LPBF equipment. Full article
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12 pages, 3864 KiB  
Article
Determinant of Dynamics and Interfacial Forces in Ultraprecision Machining of Optical Freeform Surface through Simulation-Based Analysis
by Ali Khaghani, Atanas Ivanov and Kai Cheng
Micromachines 2023, 14(12), 2228; https://doi.org/10.3390/mi14122228 - 12 Dec 2023
Viewed by 1124
Abstract
This study delves into the intricacies of ultraprecision machining, particularly in the context of machining optical freeform surfaces using Diamond Turning Machines (DTMs). It underscores the dynamic relationship between toolpath generation, hydrostatic bearing in DTMs, and the machining process. Central to this research [...] Read more.
This study delves into the intricacies of ultraprecision machining, particularly in the context of machining optical freeform surfaces using Diamond Turning Machines (DTMs). It underscores the dynamic relationship between toolpath generation, hydrostatic bearing in DTMs, and the machining process. Central to this research is the innovative introduction of Metal Matrix Composites (MMCs) to replace the traditional materials used in designing linear bearings. This strategic substitution aims to dynamically enhance both the accuracy and the quality of the machined optical freeform surfaces. The study employs simulation-based analysis using ADAMS to investigate the interfacial cutting forces at the tooltip and workpiece surface and their impacts on the machining process. Through simulations of STS mode ultraprecision machining, the interfacial cutting forces and their relationship with changes in surface curvatures are examined. The results demonstrate that the use of MMC material leads to a significant reduction in toolpath pressure, highlighting the potential benefits of employing lightweight materials in improving the dynamic performance of the system. Additionally, the analysis of slideway joints reveals the direct influence of interfacial cutting forces on the linear slideways, emphasising the importance of understanding and controlling these forces for achieving higher-precision positioning and motion control. The comparative analysis between steel and MMC materials provides valuable insights into the effects of material properties on the system’s dynamic performance. These findings contribute to the existing body of knowledge and suggest a potential shift towards more advanced precision forms, possibly extending to pico-engineering in future systems. Ultimately, this research establishes a new standard in the field, emphasising the importance of system dynamics and interfacial forces in the evolution of precision manufacturing technologies. Full article
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19 pages, 9211 KiB  
Article
Influence of Technological Parameters on Chip Formation and Chip Control in Precision Hard Turning of Ti-6Al-4V
by Elshaimaa Abdelnasser, Samar El-Sanabary, Ahmed Nassef, Azza Barakat and Ahmed Elkaseer
Micromachines 2023, 14(10), 1973; https://doi.org/10.3390/mi14101973 - 23 Oct 2023
Cited by 1 | Viewed by 1671
Abstract
This article presents the results of an experimental investigation into the effect of process parameters in the precision hard turning of Ti-6Al-4V on chip morphology at both macro and micro levels. It also reports on the control of chip generation to improve chip [...] Read more.
This article presents the results of an experimental investigation into the effect of process parameters in the precision hard turning of Ti-6Al-4V on chip morphology at both macro and micro levels. It also reports on the control of chip generation to improve chip evacuation and breakability at the macro level by varying the process parameters, namely, feed rate, cutting speed and depth of cut during turning tests. A scanning electron microscope (SEM) was used to examine the chips produced for a better understanding of chip curling mechanisms at the micro level. Surface roughness of the machined specimens was measured to assess the effect of chip evacuation on obtainable surface quality. From the results, it was found that the interaction of process parameters has a significant effect on the control of chip formation. In particular, the interaction of higher cutting speeds and greater depths of cut produced chip entanglement with the workpiece for all values of feed rates. Using relatively higher feed rates with a low depth of cut showed good results for chip breaking when machining at higher cutting speeds. Different chip curling mechanisms were identified from the SEM results. Chip side-curl formation showed different segmentation patterns with an approximately uniform chip thickness along the chip width, while chip up-curl occurred due to variations in chip thickness. Finally, it was found that the tangling of the chip with the workpiece has a significant effect on the final surface quality. Full article
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16 pages, 1509 KiB  
Article
An Investigation into the Surface Integrity of Micro-Machined High-Speed Steel and Tungsten Carbide Cutting Tools
by Minh Nhat Dang, Surinder Singh, John H. Navarro-Devia, Hannah J. King, Rosalie K. Hocking, Scott A. Wade, Guy Stephens, Angelo Papageorgiou and James Wang
Micromachines 2023, 14(10), 1970; https://doi.org/10.3390/mi14101970 - 22 Oct 2023
Viewed by 1925
Abstract
The performance and lifespan of cutting tools are significantly influenced by their surface quality. The present report highlights recent advances in enhancing the surface characteristics of tungsten carbide and high-speed steel cutting tools using a novel micro-machining technique for polishing and edge-honing. Notably, [...] Read more.
The performance and lifespan of cutting tools are significantly influenced by their surface quality. The present report highlights recent advances in enhancing the surface characteristics of tungsten carbide and high-speed steel cutting tools using a novel micro-machining technique for polishing and edge-honing. Notably, the main aim was to reduce the surface roughness while maintaining the hardness of the materials at an optimal level. By conducting a thorough analysis of surfaces obtained using different techniques, it was found that the micro-machining method effectively decreased the surface roughness of the cutting tools the most effectively out of the techniques investigated. Significantly, the surface roughness was reduced from an initial measurement of 400 nm to an impressive value of 60 nm. No significant change in hardness was observed, which guarantees the maintenance of the mechanical properties of the cutting tools. This analysis enhances the comprehension of surface enhancement methodologies for cutting tools through the presentation of these findings. The observed decrease in surface roughness, along with the consistent hardness, exhibits potential for improving tool performance. These enhancements possess the capacity to optimise manufacturing processes, increase tool reliability, and minimise waste generation. Full article
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14 pages, 2475 KiB  
Article
Multi-Body Dynamic Analysis of Hydrostatic Bearing with the MMC Material in Micro-Nano Machining
by Ali Khaghani, Atanas Ivanov and Kai Cheng
Micromachines 2023, 14(9), 1734; https://doi.org/10.3390/mi14091734 - 4 Sep 2023
Cited by 1 | Viewed by 1112
Abstract
This study focuses on the analysis of a linear hydrostatic bearing using harmonic frequency response and harmonic response simulations. The aim is to evaluate the feasibility of replacing the existing alloy steel material with a metal matrix composite (MMC) in terms of its [...] Read more.
This study focuses on the analysis of a linear hydrostatic bearing using harmonic frequency response and harmonic response simulations. The aim is to evaluate the feasibility of replacing the existing alloy steel material with a metal matrix composite (MMC) in terms of its performance and dynamic characteristics for both the base and carriage parts. The simulation results indicate that the MMC material exhibits higher resonant frequencies and improved damping capabilities compared to the structural steel material. The higher resonant frequencies observed in the MMC material are attributed to its stiffness and structural properties. These properties contribute to increased natural frequencies and improved vibration damping characteristics. This suggests that incorporating the MMC material in the bearing design could enhance motion control, improving the ability to precisely control and manipulate the movement of components or systems. In the context of ultraprecision machining applications, incorporating the MMC material in the hydrostatic bearing design can also lead to a more accurate and controlled motion, resulting in improved precision and finer machining outcomes. The displacement analysis confirms that both materials meet the specifications provided by the manufacturer, supporting the viability of using MMC as an alternative. However, further experimental validation and considerations of material feasibility, manufacturing factors, and cost-effectiveness are necessary before implementing the MMC material in practical applications. Overall, this research highlights the potential benefits of MMC in the design of linear hydrostatic bearings, paving the way for enhanced performance in ultraprecision machining processes. Full article
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16 pages, 8565 KiB  
Article
Study on Manufacturing Technology of Ultra-Thin/Narrow Bonding Cu Strip for Electronic Packaging
by Jun Cao, Junchao Zhang, Baoan Wu, Huiyi Tang, Yong Ding, Kexing Song, Guannan Yang and Chengqiang Cui
Micromachines 2023, 14(4), 838; https://doi.org/10.3390/mi14040838 - 12 Apr 2023
Viewed by 1279
Abstract
The performance of rolling parameters and annealing processes on the microstructure and properties of Cu strip were studied by High Precision Rolling Mill, FIB, SEM, Strength Tester, and Resistivity Tester. The results show that with the increase of the reduction rate, coarse grains [...] Read more.
The performance of rolling parameters and annealing processes on the microstructure and properties of Cu strip were studied by High Precision Rolling Mill, FIB, SEM, Strength Tester, and Resistivity Tester. The results show that with the increase of the reduction rate, coarse grains in the bonding Cu strip are gradually broken and refined, and the grains are flattened when the reduction rate is 80%. The tensile strength increased from 248.0 MPa to 425.5 MPa, while the elongation decreased from 8.50% to 0.91%. The growth of lattice defects and grain boundary density results in an approximately linear increase in resistivity. With the increase of annealing temperature to 400 °C, the Cu strip recovers, and the strength decreased from 456.66 MPa to 220.36 MPa while the elongation rose from 1.09% to 24.73%. The tensile strength and elongation decreased to 192.2 MPa and 20.68%, respectively, when the annealing temperature was 550 °C. The trend of yield strength of the Cu strip was basically the same as that of tensile strength. The resistivity of the Cu strip decreased rapidly during a 200~300 °C annealing temperature, then the trend slowed, and the minimum resistivity was 3.60 × 10−8 Ω·m. The optimum tension range annealing was 6–8 g; less or more than that will affect the quality of the Cu strip. Full article
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8 pages, 35202 KiB  
Article
Single Layer Lift-Off of CSAR62 for Dense Nanostructured Patterns
by Hanna Ohlin, Thomas Frisk and Ulrich Vogt
Micromachines 2023, 14(4), 766; https://doi.org/10.3390/mi14040766 - 29 Mar 2023
Cited by 1 | Viewed by 1764
Abstract
Lift-off processing is a common method of pattern transfer for different nanofabrication applications. With the emergence of chemically amplified and semi-amplified resist systems, the possibilities for pattern definition via electron beam lithography has been widened. We report a reliable and simple lift-off process [...] Read more.
Lift-off processing is a common method of pattern transfer for different nanofabrication applications. With the emergence of chemically amplified and semi-amplified resist systems, the possibilities for pattern definition via electron beam lithography has been widened. We report a reliable and simple lift-off process for dense nanostructured pattern in CSAR62. The pattern is defined in a single layer CSAR62 resist mask for gold nanostructures on silicon. The process offers a slimmed down pathway for pattern definition of dense nanostructures with varied feature size and an up to 10 nm thick gold layer. The resulting patterns from this process have been successfully used in metal assisted chemical etching applications. Full article
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