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Low k Dielectic Materials
Special Issue Information
Dear Colleagues,
For Low k dielectric materials, the value of dielectric constant is less than the dielectric constant of silicon dioxide. Such materials are of great importance for multi-level interconnections of nanoelectronics and radio frequency (RF) devices and circuits. Other applications include optoelectronics, 3-D integrated circuits, microelectromechanical systems (MEMS), nanoelectromechanical (NEMS), sensors and detectors and packaging of various types of devices and circuits. All topics related to synthesis, and properties of low-k dielectrics, various processing techniques, process integration, performance and reliability of low-K based devices, circuits and systems are of interest for this journal issue.
Dr. Rajendra Singh
Guest Editor
Keywords
- Low k dielectrics
- thermal properties
- structural properties
- process integration
- Low k and MEMS
- Low k and NEMS
- R-F devices and circuits
- Low k and 3-D integrated circuits
- multi-level Interconnections
- packaging
- reliability
- yield
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