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Optimized Batch Process for Organic MEMS Devices

Institute of Sensor and Actuator Systems, TU Wien, 1040 Wien, Austria
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Author to whom correspondence should be addressed.
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 904; https://doi.org/10.3390/proceedings2130904
Published: 28 November 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
Recently, organic electromechanical transducers have attracted intense scientific and technological interest due to their unique mechanical flexibility and their piezoelectric properties. However, the fabrication of organic MEMS devices is challenging. For example, a lift-off process cannot be used on polymers, because of the solvent in photoresists. Here, we present a straightforward and low-cost batch process for organic MEMS devices using standard micromachining techniques. As organic material we used the ferroelectric (co-)polymer poly(vinylidene fluoride-trifluorethylene) (P(VDF-TrFE)). The integration of the polymer in a CMOS-compatible process was optimized in terms of deposition and patterning of the polymer and the corresponding metal layers. Micromachined devices, such as capacitors and cantilevers, were fabricated and analysed. The ferroelectric perfomance was evaluated by electrical and electromechanical measurements. Our first results indicate that the proposed fabrication process is reliable resulting in well-functioning organic MEMS devices. We measured as piezoelectric constant a d33 of −32 pm/V with our organic P(VDF-TrFE) capacitors.
Keywords: flexible and soft electronics; micro- and nanofabrication; ferro- and piezoelectricity; organic materials; polymers; CMOS-process flexible and soft electronics; micro- and nanofabrication; ferro- and piezoelectricity; organic materials; polymers; CMOS-process
MDPI and ACS Style

Hafner, J.; Teuschel, M.; Schrattenholzer, J.; Schneider, M.; Schmid, U. Optimized Batch Process for Organic MEMS Devices. Proceedings 2018, 2, 904. https://doi.org/10.3390/proceedings2130904

AMA Style

Hafner J, Teuschel M, Schrattenholzer J, Schneider M, Schmid U. Optimized Batch Process for Organic MEMS Devices. Proceedings. 2018; 2(13):904. https://doi.org/10.3390/proceedings2130904

Chicago/Turabian Style

Hafner, Jonas, Marco Teuschel, Jürgen Schrattenholzer, Michael Schneider, and Ulrich Schmid. 2018. "Optimized Batch Process for Organic MEMS Devices" Proceedings 2, no. 13: 904. https://doi.org/10.3390/proceedings2130904

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