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Journal: Proceedings, 2018
Volume: 2
Number: 904
Article:
Optimized Batch Process for Organic MEMS Devices
Authors:
by
Jonas Hafner, Marco Teuschel, Jürgen Schrattenholzer, Michael Schneider and Ulrich Schmid
Link:
https://www.mdpi.com/2504-3900/2/13/904
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