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Journal: Proceedings, 2018
Volume: 2
Number: 904

Article: Optimized Batch Process for Organic MEMS Devices
Authors: by Jonas Hafner, Marco Teuschel, Jürgen Schrattenholzer, Michael Schneider and Ulrich Schmid
Link: https://www.mdpi.com/2504-3900/2/13/904

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