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Proceedings 2018, 2(13), 1037; https://doi.org/10.3390/proceedings2131037

Fabrication of AlN-Based Flexible Piezoelectric Pressure Sensor to Integrate into an Artificial Pancreas

1
CNR, Institute for Microelectronics and Microsystems, Via Monteroni, 73100 Lecce, Italy
2
The BioRobotics Institute, Scuola Superiore Sant’Anna, Viale R. Piaggio 34, 56025 Pontedera, Italy
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
*
Author to whom correspondence should be addressed.
Published: 9 November 2018
PDF [499 KB, uploaded 9 November 2018]

Abstract

Present work reports the fabrication and characterization of a flexible AlN-based piezoelectric pressure sensor integrated, as insulin capsule punching detector, into an implantable artificial pancreas (AP), developed as automated treatment device for Type 1 diabetes. Ti/AlN/Ti trilayer was sputtered on a thin kapton substrate at room temperature, making the final device flexible and sensitive to the forces range of interest (0–4 N). The proposed preliminary prototype of AP comprises a refilling module, interfaced with the intestine wall, able to dock an ingestible insulin capsule. A linearly actuated needle punches the capsule to transfer the insulin to an implanted reservoir. The pressure sensor is located at the connection of the needle with the linear actuator to sense the occurred capsule punching. The sensor waveform output was processed to clearly identify the capsule punching.
Keywords: piezoelectric pressure sensor; AlN thin films; implantable artificial pancreas piezoelectric pressure sensor; AlN thin films; implantable artificial pancreas
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Signore, M.A.; Pascali, C.D.; Rescio, G.; Taurino, A.; Dario, P.; Iacovacci, V.; Siciliano, P.; Martucci, C.; Melissano, E.; Quaranta, F.; Francioso, L. Fabrication of AlN-Based Flexible Piezoelectric Pressure Sensor to Integrate into an Artificial Pancreas. Proceedings 2018, 2, 1037.

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