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Proceedings 2017, 1(4), 353;

An Electromagnetically-Driven Piezoresistively Sensed CMOS MEMS Scanning Mirror for Projection Display

Department of Electrical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 8 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [1080 KB, uploaded 4 September 2017]


Bi-axial MEMS scanning mirrors are considered the key component for applications like laser scanning projectors and Lidars. Most studies have shown fabricated devices driven by open-loop operation without sensing, making it difficult to meet the requirements for practical applications. To facilitate bi-axial closed-loop operation, this work presents an electro magnetically-driven scanning mirror with piezoresistive sensing conveniently implemented in a CMOS (complementary metal oxide semiconductor) process. The measured resonant frequencies with respect to the slow and fast axes are 4.3 and 36.05 kHz, respectively, with the aim to provide SXGA display resolution.
Keywords: CMOS MEMS; electromagnetic actuation; piezoresistive sensor CMOS MEMS; electromagnetic actuation; piezoresistive sensor
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Li, Z.-H.; Lin, Y.-T.; Lu, M.-C. An Electromagnetically-Driven Piezoresistively Sensed CMOS MEMS Scanning Mirror for Projection Display. Proceedings 2017, 1, 353.

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