Next Article in Journal
Hydrophobic and Icephobic Behaviour of Polyurethane-Based Nanocomposite Coatings
Previous Article in Journal
Strategies of Broadband Monitoring Aimed at Minimizing Deposition Errors
Previous Article in Special Issue
A Parametric Three-Dimensional Phase-Field Study of the Physical Vapor Deposition Process of Metal Thin Films Aiming at Quantitative Simulations
Open AccessArticle

Oxidation Behavior of Ta–Al Multilayer Coatings

by Yung-I Chen 1,2,3,*, Nai-Yuan Lin 1 and Yi-En Ke 2
1
Institute of Materials Engineering, National Taiwan Ocean University, Keelung 20224, Taiwan
2
Department of Optoelectronics and Materials Technology, National Taiwan Ocean University, Keelung 20224, Taiwan
3
Center of Excellence for Ocean Engineering, National Taiwan Ocean University, Keelung 20224, Taiwan
*
Author to whom correspondence should be addressed.
Coatings 2019, 9(12), 810; https://doi.org/10.3390/coatings9120810
Received: 31 October 2019 / Revised: 20 November 2019 / Accepted: 29 November 2019 / Published: 1 December 2019
(This article belongs to the Special Issue Physical Vapor Deposition)
Ta–Al multilayer coatings were fabricated through cyclical gradient concentration deposition by direct current magnetron co-sputtering. The as-deposited coatings presented a multilayer structure in the growth direction. The oxidation behavior of the Ta–Al multilayer coatings was explored. The results specified that Ta-rich Ta–Al multilayer coatings demonstrated a restricted oxidation depth after annealing at 600 °C in 1% O2–99% Ar for up to 100 h. This was attributed to the preferential oxidation of Al, the formation of amorphous Al-oxide sublayers, and the maintenance of a multilayer structure. By contrast, Ta2O5 formed after exhausting Al in the oxidation process in an ambient atmosphere at 600 °C which exhibited a crystalline Ta2O5-amorphous Al-oxide multilayer structure.
Keywords: cyclical gradient concentration; internal oxidation; multilayer coating; oxidation cyclical gradient concentration; internal oxidation; multilayer coating; oxidation
MDPI and ACS Style

Chen, Y.-I.; Lin, N.-Y.; Ke, Y.-E. Oxidation Behavior of Ta–Al Multilayer Coatings. Coatings 2019, 9, 810.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop