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Open AccessFeature PaperArticle

Strategies of Broadband Monitoring Aimed at Minimizing Deposition Errors

1
Research Computing Center, Lomonosov Moscow State University, Leninskiye Gory, Moscow 119992, Russia
2
Lomonosov Moscow State University, Faculty of Physics, Leninskiye Gory, Moscow 119991, Russia
*
Author to whom correspondence should be addressed.
Coatings 2019, 9(12), 809; https://doi.org/10.3390/coatings9120809
Received: 7 November 2019 / Revised: 21 November 2019 / Accepted: 27 November 2019 / Published: 1 December 2019
(This article belongs to the Special Issue Optical Thin Films and Structures: Design and Advanced Applications)
This article presents a computational approach for comparing various broadband monitoring strategies, taking into account the positive and negative effects associated with the correlation of thickness errors caused by the monitoring procedure. The approach is based on statistical estimates of the strength of the error self-compensation effect and the expected level of thickness errors. Its application is demonstrated by using a 50-layer, nonpolarizing edge filter. The presented approach is general and can be applied to verify the prospects of broadband monitoring for the production of various types of optical coatings. View Full-Text
Keywords: thin films; optical coatings; monitoring; deposition thin films; optical coatings; monitoring; deposition
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MDPI and ACS Style

Tikhonravov, A.; Kochikov, I.; Matvienko, I.; Isaev, T.; Yagola, A. Strategies of Broadband Monitoring Aimed at Minimizing Deposition Errors. Coatings 2019, 9, 809.

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