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Journal: Coatings, 2020
Volume: 10
Number: 309

Article: SiOC-Coated Silicon Nitride Platform for Efficient Phase Actuators
Authors: by Faisal Ahmed Memon, Imran Ali Qureshi, Abdul Latif Memon, Zafi Sherhan Syed, Nasrullah Pirzada and Erum Saba
Link: https://www.mdpi.com/2079-6412/10/4/309

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