Next Article in Journal
Impact of Velocity Second Slip and Inclined Magnetic Field on Peristaltic Flow Coating with Jeffrey Fluid in Tapered Channel
Previous Article in Journal
Facile Route of Fabricating Long-Term Microbicidal Silver Nanoparticle Clusters against Shiga Toxin-Producing Escherichia coli O157:H7 and Candida auris
Previous Article in Special Issue
Effect of Substrate Temperature on the Optical and Electrical Properties of Nitrogen-Doped NiO Thin Films
Open AccessFeature PaperArticle

Lossy Mode Resonance Sensors Fabricated by RF Magnetron Sputtering GZO Thin Film and D-Shaped Fibers

1
Department of Electrical Engineering, Feng Chia University, Taichung 40724, Taiwan
2
Program of Electrical and Communications Engineering, Feng Chia University, Taichung 40724, Taiwan
*
Author to whom correspondence should be addressed.
Coatings 2020, 10(1), 29; https://doi.org/10.3390/coatings10010029
Received: 11 December 2019 / Revised: 24 December 2019 / Accepted: 30 December 2019 / Published: 1 January 2020
(This article belongs to the Special Issue Advanced Thin Films Deposited by Magnetron Sputtering)
We demonstrate a new refractive index (RI) and salinity sensor based on a lossy mode resonance (LMR) effect which combines fiber-optic side-polishing and radio-frequency (RF) sputtering techniques. The side-polished fiber can enhance optical fibers to generate an evanescent field in sensing applications. Gallium-doped zinc oxide (GZO) thin films produce a high attenuation lossy mode resonance effect that permits a highly sensitive refractive index and salinity fiber sensor. GZO thin film was prepared by an RF magnetron sputtering method. The thickness of the D-shaped fiber sensing device was 74.7 μm, and a GZO film thickness of 67 nm was deposited on the polished surface of the D-shaped fiber to fabricate LMR type liquid salinity sensors. The sensitivity of 3637.8 nm/RIU was achieved in the RI range of 1.333 to 1.392. To investigate the sensitivities of LMR salinity sensors, the NaCl solution salinities of 0%, 50%, 100%, 150%, 200%, and 250% were measured in this work. The experimental result shows that the sensitivity of the salinity sensor is 0.964 nm per salinity unit (SU). View Full-Text
Keywords: refractive index sensor; salinity; side-polished fiber; gallium-doped zinc oxide; lossy mode resonance refractive index sensor; salinity; side-polished fiber; gallium-doped zinc oxide; lossy mode resonance
Show Figures

Figure 1

MDPI and ACS Style

Tien, C.-L.; Mao, T.-C.; Li, C.-Y. Lossy Mode Resonance Sensors Fabricated by RF Magnetron Sputtering GZO Thin Film and D-Shaped Fibers. Coatings 2020, 10, 29.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop