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Open AccessFeature PaperArticle

On the Properties of WC/SiC Multilayers

Photon Science, DESY, Notkestraße 85, Hamburg 22607, Germany
Author to whom correspondence should be addressed.
Appl. Sci. 2018, 8(4), 571;
Received: 26 February 2018 / Revised: 1 April 2018 / Accepted: 4 April 2018 / Published: 6 April 2018
(This article belongs to the Special Issue Advanced EUV and X-Ray Optics)
A study of the materials properties of WC/SiC multilayer coatings is presented. We investigated the dependence of interface and surface roughness, intrinsic stress, microstructure, chemical composition, and stoichiometry as a function of multilayer period and in some cases compared these to W/SiC multilayer systems. The WC/SiC material pair forms multilayers with extremely smooth and sharp interfaces and both materials remain amorphous over a wide range of thicknesses. These properties are desirable for multilayer-based high-resolution diffractive x-ray optics, such as multilayer Laue lenses (MLLs), which require very thick films in which the layer spacing varies considerably. Thermal and structural stability studies show that WC/SiC multilayers have exceptional thermal stability, making this an extremely robust and favorable material pair for MLLs and other multilayer-based X-ray optical elements. View Full-Text
Keywords: multilayers; X-ray optics; thermal stability; multilayer Laue lenses; tungsten carbide; silicon carbide multilayers; X-ray optics; thermal stability; multilayer Laue lenses; tungsten carbide; silicon carbide
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MDPI and ACS Style

Prasciolu, M.; Bajt, S. On the Properties of WC/SiC Multilayers. Appl. Sci. 2018, 8, 571.

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