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Progress in Research of Flexible MEMS Microelectrodes for Neural Interface

by Long-Jun Tang 1,2,3, Ming-Hao Wang 1,2,3, Hong-Chang Tian 1,2,3, Xiao-Yang Kang 1,2,3, Wen Hong 1,2,3 and Jing-Quan Liu 1,2,3,*
1
National Key Laboratory of Science and Technology on Micro/Nano Fabrication Laboratory, Shanghai Jiao Tong University, Shanghai 200240, China
2
Key Laboratory for Thin Film and Micro fabrication of Ministry of Education, Shanghai Jiao Tong University, Shanghai 200240, China
3
Collaborative Innovation Center of IFSA, Department of Micro/Nano-Electronics, Shanghai Jiao Tong University, Shanghai 200240, China
*
Author to whom correspondence should be addressed.
Micromachines 2017, 8(9), 281; https://doi.org/10.3390/mi8090281
Received: 14 March 2017 / Revised: 20 June 2017 / Accepted: 29 June 2017 / Published: 18 September 2017
(This article belongs to the Special Issue Flexible and Stretchable Electronics)
With the rapid development of Micro-electro-mechanical Systems (MEMS) fabrication technologies, many microelectrodes with various structures and functions have been designed and fabricated for applications in biomedical research, diagnosis and treatment through electrical stimulation and electrophysiological signal recording. The flexible MEMS microelectrodes exhibit excellent characteristics in many aspects beyond stiff microelectrodes based on silicon or metal, including: lighter weight, smaller volume, better conforming to neural tissue and lower fabrication cost. In this paper, we reviewed the key technologies in flexible MEMS microelectrodes for neural interface in recent years, including: design and fabrication technology, flexible MEMS microelectrodes with fluidic channels and electrode–tissue interface modification technology for performance improvement. Furthermore, the future directions of flexible MEMS microelectrodes for neural interface were described, including transparent and stretchable microelectrodes integrated with multi-functional aspects and next-generation electrode–tissue interface modifications, which facilitated electrode efficacy and safety during implantation. Finally, we predict that the relationships between micro fabrication techniques, and biomedical engineering and nanotechnology represented by flexible MEMS microelectrodes for neural interface, will open a new gate to better understanding the neural system and brain diseases. View Full-Text
Keywords: MEMS; microelectrodes; neural interface; conducting polymer; nanotechnology MEMS; microelectrodes; neural interface; conducting polymer; nanotechnology
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Tang, L.-J.; Wang, M.-H.; Tian, H.-C.; Kang, X.-Y.; Hong, W.; Liu, J.-Q. Progress in Research of Flexible MEMS Microelectrodes for Neural Interface. Micromachines 2017, 8, 281.

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