February 2015 - 10 articles
In this paper, a novel approach for processing the outputs signal of the microelectromechanical systems (MEMS) gyroscopes was presented to reduce the bias drift and noise. The principle for the noise reduction was presented, and an optimal Kalman fil...
We investigated the aluminum nitride etching process for MEMS resonators. The process is based on Cl2/BCl3/Ar gas chemistry in inductively coupled plasma system. The hard mask of SiO2 is used. The etching rate, selectivity, sidewall angle, bottom sur...
In combination with tapered-trench-etching of Si and SU-8 photoresist, a grayscale mask for deep X-ray lithography was fabricated and passed a 10-times-exposure test. The performance of the X-ray grayscale mask was evaluated using the TERAS synchrotr...
In the past decade a large amount of analysis techniques have been scaled down to the microfluidic level. However, in many cases the necessary sample preparation, such as separation, mixing and concentration, remains to be performed off-chip. This re...
A dual-chamber anode structure is proposed in order to solve two performance problems of the conventional passive micro direct methanol fuel cell (μ-DMFC). One of the problems is the unstable performance during long time discharge. The second problem...
This study presents a double-side diaphragm peristaltic pump for efficient medium transport without the unwanted backflow and the lagging effect of a diaphragm. A theoretical model was derived to predict the important parameter of the micropump, i.e....
The accurate estimation of measurements covariance is a fundamental problem in sensors fusion algorithms and is crucial for the proper operation of filtering algorithms. This paper provides an innovative solution for this problem and realizes the pro...
We report an infrared (IR) optical switch using a wedge-like cell. A glycerol droplet is placed in the cell and its surrounding is filled with silicone oil. The droplet has minimal surface area to volume (SA/V) ratio in the relaxing state. By applyin...
Single-cell electrical properties (e.g., specific membrane capacitance (Cspecific membrane) and cytoplasm conductivity (σcytoplasm)) have been regarded as potential label-free biophysical markers for the evaluation of cellular status. However, whethe...
In this work, we demonstrate continuous and discrete functions in a digital microfluidic platform in a programmed manner. Digital microfluidics is gaining popularity in biological and biomedical applications due to its ability to manipulate discrete...
Get Alerted
Add your email address to receive forthcoming issues of this journal.
