Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching
Venturini, F.; Sansotera, M.; Vazquez, R.M.; Osellame, R.; Cerullo, G.; Navarrini, W. Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching. Micromachines 2012, 3, 604-614. https://doi.org/10.3390/mi3040604
Venturini F, Sansotera M, Vazquez RM, Osellame R, Cerullo G, Navarrini W. Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching. Micromachines. 2012; 3(4):604-614. https://doi.org/10.3390/mi3040604
Chicago/Turabian StyleVenturini, Francesco; Sansotera, Maurizio; Vazquez, Rebeca Martinez; Osellame, Roberto; Cerullo, Giulio; Navarrini, Walter. 2012. "Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching" Micromachines 3, no. 4: 604-614. https://doi.org/10.3390/mi3040604