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Journal: MicromachinesVolume: 3Number: 604
Article: Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching
- Authors:
- Francesco Venturini1,*,
- Maurizio Sansotera1 and
- Rebeca Martinez Vazquez2
- et al.
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