- Article
Liquid Encapsulation in Parylene Microstructures Using Integrated Annular-Plate Stiction Valves
- Christian A. Gutierrez and
- Ellis Meng
We report the design, fabrication and characterization of micromachined Parylene structures for self-sealing liquid encapsulation applications. Automatic sealing is enabled through the use of an integrated annular-plate stiction valve which greatly r...

