Next Article in Journal
A Study on Capacitive Micromachined Ultrasonic Transducer Periodic Sparse Array
Previous Article in Journal
Synthesis, Characterization, and Applications of Silver Nano Fibers in Humidity, Ammonia, and Temperature Sensing
Previous Article in Special Issue
An Elementary Approximation of Dwell Time Algorithm for Ultra-Precision Computer-Controlled Optical Surfacing
Article

High-Accuracy Surface Topography Manufacturing for Continuous Phase Plates Using an Atmospheric Pressure Plasma Jet

1
Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
2
Chengdu Fine Optical Engineering Research Center, Chengdu 610041, China
*
Authors to whom correspondence should be addressed.
Academic Editors: Chengwei Kang, Chunjin Wang and Jiang Guo
Micromachines 2021, 12(6), 683; https://doi.org/10.3390/mi12060683
Received: 8 May 2021 / Revised: 3 June 2021 / Accepted: 7 June 2021 / Published: 10 June 2021
(This article belongs to the Special Issue Frontiers in Ultra-Precision Machining)
The continuous phase plate (CPP) is the vital diffractive optical element involved in laser beam shaping and smoothing in high-power laser systems. The high gradients, small spatial periods, and complex features make it difficult to achieve high accuracy when manufacturing such systems. A high-accuracy and high-efficiency surface topography manufacturing method for CPP is presented in this paper. The atmospheric pressure plasma jet (APPJ) system is presented and the removal characteristics are studied to obtain the optimal processing parameters. An optimized iterative algorithm based on the dwell point matrix and a fast Fourier transform (FFT) is proposed to improve the accuracy and efficiency in the dwell time calculation process. A 120 mm × 120 mm CPP surface topography with a 1326.2 nm peak-to-valley (PV) value is fabricated with four iteration steps after approximately 1.6 h of plasma processing. The residual figure error between the prescribed surface topography and plasma-processed surface topography is 28.08 nm root mean square (RMS). The far-field distribution characteristic of the plasma-fabricated surface is analyzed, for which the energy radius deviation is 11 μm at 90% encircled energy. The experimental results demonstrates the potential of the APPJ approach for the manufacturing of complex surface topographies. View Full-Text
Keywords: atmospheric pressure plasma jet; continuous phase plate; surface topography; high accuracy and efficiency atmospheric pressure plasma jet; continuous phase plate; surface topography; high accuracy and efficiency
Show Figures

Figure 1

MDPI and ACS Style

Jin, H.; Tang, C.; Li, H.; Zhang, Y.; Li, Y. High-Accuracy Surface Topography Manufacturing for Continuous Phase Plates Using an Atmospheric Pressure Plasma Jet. Micromachines 2021, 12, 683. https://doi.org/10.3390/mi12060683

AMA Style

Jin H, Tang C, Li H, Zhang Y, Li Y. High-Accuracy Surface Topography Manufacturing for Continuous Phase Plates Using an Atmospheric Pressure Plasma Jet. Micromachines. 2021; 12(6):683. https://doi.org/10.3390/mi12060683

Chicago/Turabian Style

Jin, Huiliang; Tang, Caixue; Li, Haibo; Zhang, Yuanhang; Li, Yaguo. 2021. "High-Accuracy Surface Topography Manufacturing for Continuous Phase Plates Using an Atmospheric Pressure Plasma Jet" Micromachines 12, no. 6: 683. https://doi.org/10.3390/mi12060683

Find Other Styles
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Search more from Scilit
 
Search
Back to TopTop