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Article

Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures

1
Fraunhofer Institute for Manufacturing Technology and Advanced Materials IFAM, Winterbergstrasse 28, 01277 Dresden, Germany
2
Fraunhofer Institute for Silicon Technology, Fraunhoferstrasse 1, 25524 Itzehoe, Germany
*
Author to whom correspondence should be addressed.
Academic Editor: Yee Cheong Lam
Micromachines 2021, 12(10), 1176; https://doi.org/10.3390/mi12101176
Received: 19 July 2021 / Revised: 2 September 2021 / Accepted: 9 September 2021 / Published: 29 September 2021
Powder-based techniques are gaining increasing interest for the fabrication of microstructures on planar substrates. A typical approach comprises the filling of a mold pattern with micron-sized particles of the desired material, and their fixation there. Commonly powder-loaded pastes or inks are filled into the molds. To meet the smallest dimensions and highest filling factors, the utilization of dry powder as the raw material is more beneficial. However, an appropriate automated technique for filling a micro mold pattern with dry micron-sized particles is missing up to now. This paper presents a corresponding approach based on the superimposition of high- and low-frequency oscillations for particle mobilization. Rubber balls are utilized to achieve dense packing. For verification, micromagnets are created from 5 µm NdFeB powder on 8” Si substrates, using the novel automated mold filling technique, as well as an existing manual one. Subsequent atomic layer deposition is utilized to agglomerate the loose NdFeB particles into rigid microstructures. The magnetic properties and inner structure of the NdFeB micromagnets are investigated. It is shown that the novel automated technique outperforms the manual one in major terms. View Full-Text
Keywords: 3D microstructures; MEMS; particle packing; ultrasound; NdFeB micromagnets 3D microstructures; MEMS; particle packing; ultrasound; NdFeB micromagnets
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MDPI and ACS Style

Kostmann, C.; Lisec, T.; Bodduluri, M.T.; Andersen, O. Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures. Micromachines 2021, 12, 1176. https://doi.org/10.3390/mi12101176

AMA Style

Kostmann C, Lisec T, Bodduluri MT, Andersen O. Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures. Micromachines. 2021; 12(10):1176. https://doi.org/10.3390/mi12101176

Chicago/Turabian Style

Kostmann, Cris, Thomas Lisec, Mani T. Bodduluri, and Olaf Andersen. 2021. "Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures" Micromachines 12, no. 10: 1176. https://doi.org/10.3390/mi12101176

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