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Editorial for the Special Issue on 3D Printed Microfluidic Devices
Open AccessFeature PaperEditor’s ChoicePerspective

3D Printed MEMS Technology—Recent Developments and Applications

1
Institute of Physics-Center for Science and Education, Silesian University of Technology, 44-100 Gliwice, Poland
2
Faculty of Engineering Sciences and Mathematics, Bielefeld University of Applied Sciences, 33619 Bielefeld, Germany
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(4), 434; https://doi.org/10.3390/mi11040434
Received: 31 March 2020 / Revised: 15 April 2020 / Accepted: 18 April 2020 / Published: 20 April 2020
(This article belongs to the Special Issue 3D Printing of MEMS Technology)
Microelectromechanical systems (MEMS) are of high interest for recent electronic applications. Their applications range from medicine to measurement technology, from microfluidics to the Internet of Things (IoT). In many cases, MEMS elements serve as sensors or actuators, e.g., in recent mobile phones, but also in future autonomously driving cars. Most MEMS elements are based on silicon, which is not deformed plastically under a load, as opposed to metals. While highly sophisticated solutions were already found for diverse MEMS sensors, actuators, and other elements, MEMS fabrication is less standardized than pure microelectronics, which sometimes blocks new ideas. One of the possibilities to overcome this problem may be the 3D printing approach. While most 3D printing technologies do not offer sufficient resolution for MEMS production, and many of the common 3D printing materials cannot be used for this application, there are still niches in which the 3D printing of MEMS enables producing new structures and thus creating elements for new applications, or the faster and less expensive production of common systems. Here, we give an overview of the most recent developments and applications in 3D printing of MEMS. View Full-Text
Keywords: 3D printing; microelectromechanical systems (MEMS); microelectronics; microfluidics; microsensors; microactuators 3D printing; microelectromechanical systems (MEMS); microelectronics; microfluidics; microsensors; microactuators
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MDPI and ACS Style

Blachowicz, T.; Ehrmann, A. 3D Printed MEMS Technology—Recent Developments and Applications. Micromachines 2020, 11, 434. https://doi.org/10.3390/mi11040434

AMA Style

Blachowicz T, Ehrmann A. 3D Printed MEMS Technology—Recent Developments and Applications. Micromachines. 2020; 11(4):434. https://doi.org/10.3390/mi11040434

Chicago/Turabian Style

Blachowicz, Tomasz; Ehrmann, Andrea. 2020. "3D Printed MEMS Technology—Recent Developments and Applications" Micromachines 11, no. 4: 434. https://doi.org/10.3390/mi11040434

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