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Open AccessArticle

Novel Fabrication Process for Integration of Microwave Sensors in Microfluidic Channels

1
KU Leuven, Div. ESAT-TELEMIC, Kasteelpark Arenberg 10, 3001 Leuven, Belgium
2
IMEC, Kapeldeef 75, 3001 Leuven, Belgium
3
KU Leuven, Div. ESAT-MICAS, Kasteelpark Arenberg 10, 3001 Leuven, Belgium
*
Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Micromachines 2020, 11(3), 320; https://doi.org/10.3390/mi11030320
Received: 20 February 2020 / Revised: 13 March 2020 / Accepted: 17 March 2020 / Published: 19 March 2020
(This article belongs to the Special Issue Micro/Nano Fabrication for Life Sciences)
This paper presents a novel fabrication process that allows integration of polydimethylsiloxane (PDMS)-based microfluidic channels and metal electrodes on a wafer with a micrometer-range alignment accuracy. This high level of alignment accuracy enables integration of microwave and microfluidic technologies, and furthermore accurate microwave dielectric characterization of biological liquids and chemical compounds on a nanoliter scale. The microfluidic interface between the pump feed lines and the fluidic channels was obtained using magnets fluidic connection. The tube-channel interference and the fluidic channel-wafer adhesion was evaluated, and up to a pressure of 700 mBar no leakage was observed. The developed manufacturing process was tested on a design of a microwave-microfluidic capacitive sensor. An interdigital capacitor (IDC) and a microfluidic channel were manufactured with an alignment accuracy of 2.5 μm. The manufactured IDC sensor was used to demonstrate microwave dielectric sensing on deionized water and saline solutions with concentrations of 0.1, 0.5, 1, and 2.5 M. View Full-Text
Keywords: micro-fabrication; microelectromechanical systems (MEMS); microfluidics; microwave dielectric sensing micro-fabrication; microelectromechanical systems (MEMS); microfluidics; microwave dielectric sensing
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MDPI and ACS Style

Bao, J.; Markovic, T.; Brancato, L.; Kil, D.; Ocket, I.; Puers, R.; Nauwelaers, B. Novel Fabrication Process for Integration of Microwave Sensors in Microfluidic Channels. Micromachines 2020, 11, 320.

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