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Open AccessArticle

Compensation of Hysteresis in the Piezoelectric Nanopositioning Stage under Reciprocating Linear Voltage Based on a Mark-Segmented PI Model

by Dong An 1,2,*, Yixiao Yang 1, Ying Xu 1,3, Meng Shao 1, Jinyang Shi 3 and Guodong Yue 1,*
1
School of Mechanical Engineering, Shenyang Jianzhu University, Shenyang 110168, China
2
Research Center for Analysis and Detection Technology, Shenyang Jianzhu University, Shenyang 110168, China
3
School of Electro-Mechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China
*
Authors to whom correspondence should be addressed.
Micromachines 2020, 11(1), 9; https://doi.org/10.3390/mi11010009
Received: 4 November 2019 / Revised: 15 December 2019 / Accepted: 17 December 2019 / Published: 19 December 2019
(This article belongs to the Special Issue Piezoelectric Transducers: Materials, Devices and Applications)
The nanopositioning stage with a piezoelectric driver usually compensates for the nonlinear outer-loop hysteresis characteristic of the piezoelectric effect using the Prandtl–Ishlinskii (PI) model under a single-ring linear voltage, but cannot accurately describe the characteristics of the inner-loop hysteresis under the reciprocating linear voltage. In order to improve the accuracy of the nanopositioning, this study designs a nanopositioning stage with a double-parallel guiding mechanism. On the basis of the classical PI model, the study firstly identifies the hysteresis rate tangent slope mark points, then segments and finally proposes a phenomenological model—the mark-segmented Prandtl–Ishlinskii (MSPI) model. The MSPI model, which is fitted together by each segment, can further improve the fitting accuracy of the outer-loop hysteresis nonlinearity, while describing the inner-loop hysteresis nonlinearity perfectly. The experimental results of the inverse model compensation control show that the MSPI model can achieve 99.6% reciprocating linear voltage inner-loop characteristic accuracy. Compared with the classical PI model, the 81.6% accuracy of the hysteresis loop outer loop is improved. View Full-Text
Keywords: nanopositioning stage; piezoelectric hysteresis; mark point recognition; piecewise fitting; compensation control nanopositioning stage; piezoelectric hysteresis; mark point recognition; piecewise fitting; compensation control
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An, D.; Yang, Y.; Xu, Y.; Shao, M.; Shi, J.; Yue, G. Compensation of Hysteresis in the Piezoelectric Nanopositioning Stage under Reciprocating Linear Voltage Based on a Mark-Segmented PI Model. Micromachines 2020, 11, 9.

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