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Open AccessArticle

Temperature-Dependent Growth Characteristics of Nb- and CoFe-Based Nanostructures by Direct-Write Using Focused Electron Beam-Induced Deposition

Institute of Physics, Goethe University, 60438 Frankfurt am Main, Germany
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Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Micromachines 2020, 11(1), 28; https://doi.org/10.3390/mi11010028
Received: 12 December 2019 / Revised: 21 December 2019 / Accepted: 23 December 2019 / Published: 25 December 2019
(This article belongs to the Special Issue Multi-Dimensional Direct-Write Nanofabrication )
Focused electron and ion beam-induced deposition (FEBID/FIBID) are direct-write techniques with particular advantages in three-dimensional (3D) fabrication of ferromagnetic or superconducting nanostructures. Recently, two novel precursors, HCo 3 Fe(CO) 12 and Nb(NMe 3 ) 2 (N-t-Bu), were introduced, resulting in fully metallic CoFe ferromagnetic alloys by FEBID and superconducting NbC by FIBID, respectively. In order to properly define the writing strategy for the fabrication of 3D structures using these precursors, their temperature-dependent average residence time on the substrate and growing deposit needs to be known. This is a prerequisite for employing the simulation-guided 3D computer aided design (CAD) approach to FEBID/FIBID, which was introduced recently. We fabricated a series of rectangular-shaped deposits by FEBID at different substrate temperatures between 5 ° C and 24 ° C using the precursors and extracted the activation energy for precursor desorption and the pre-exponential factor from the measured heights of the deposits using the continuum growth model of FEBID based on the reaction-diffusion equation for the adsorbed precursor. View Full-Text
Keywords: focused electron beam induced deposition; precursor residence time; continuum model focused electron beam induced deposition; precursor residence time; continuum model
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Huth, M.; Porrati, F.; Gruszka, P.; Barth, S. Temperature-Dependent Growth Characteristics of Nb- and CoFe-Based Nanostructures by Direct-Write Using Focused Electron Beam-Induced Deposition. Micromachines 2020, 11, 28.

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