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Open AccessArticle

High-Precision Propagation-Loss Measurement of Single-Mode Optical Waveguides on Lithium Niobate on Insulator

1
State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2
State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China
3
XXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China
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School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
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Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, Shanxi, China
*
Author to whom correspondence should be addressed.
Jintian Lin and Junxia Zhou contributed equally to this work.
Micromachines 2019, 10(9), 612; https://doi.org/10.3390/mi10090612
Received: 20 July 2019 / Revised: 13 September 2019 / Accepted: 14 September 2019 / Published: 15 September 2019
(This article belongs to the Special Issue Femtosecond Laser Micromachining for Photonics Applications)
We demonstrate the fabrication of single-mode optical waveguides on lithium niobate on an insulator (LNOI) by optical patterning combined with chemomechanical polishing. The fabricated LNOI waveguides had a nearly symmetric mode profile of ~2.5 µm mode field size (full-width at half-maximum). We developed a high-precision measurement approach by which single-mode waveguides were characterized to have propagation loss of ~0.042 dB/cm. View Full-Text
Keywords: lithium niobate; waveguide; photonic integrated circuit; optical lithography; chemomechanical polish lithium niobate; waveguide; photonic integrated circuit; optical lithography; chemomechanical polish
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MDPI and ACS Style

Lin, J.; Zhou, J.; Wu, R.; Wang, M.; Fang, Z.; Chu, W.; Zhang, J.; Qiao, L.; Cheng, Y. High-Precision Propagation-Loss Measurement of Single-Mode Optical Waveguides on Lithium Niobate on Insulator. Micromachines 2019, 10, 612.

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