The paper focuses on the fundamentals of electrochemical machining technology de-elopement with special attention to applications for micromachining. In this method, a material is removed during an anodic electrochemical dissolution. The method has a...
Laser micromachining has emerged as a promising technique for mass production of microfluidic devices. However, control and optimization of process parameters, and design of substrate materials are still ongoing challenges for the widespread applicat...
Dry film photoresist (DFR) is a solid photosensitive resin film that enables multilayer lamination and rapid patterning at relatively low temperatures. Initially developed for the production of printed circuit boards (PCBs), DFR has demonstrated sign...
We report on high precision high speed micromachining of Al2O3 and AlN using pulsed near infrared fiber laser. Ablation thresholds are determined to be 30 J/cm2 for alumina and 18 J/cm2 for aluminum nitride. The factors influencing the efficiency and...
In this paper, we present the first microfluidic junctions for droplet generation directly engraved on lithium niobate crystals by micromachining techniques, preparatory to a fully integrated opto-microfluidics lab-on-chip system. In particular, lase...
It has been recently demonstrated that laser micromachining of magnetoactive elastomers is a very convenient method for fabricating dynamic surface microstructures with magnetically tunable properties, such as wettability and surface reflectivity. In...
Femtosecond laser micromachining has emerged in recent years as a new technique for micro/nano structure fabrication because of its applicability to virtually all kinds of materials in an easy one-step process that is scalable. In the past, much rese...
In this work, a burst mode laser is used for micromachining of 20 µm–250 µm thick Invar (Fe64/Ni36) foils. Holes were drilled by firing multiple pulses transversely onto the sample without moving the beam (percussion drilling). The...
Functional wetting surfaces have excellent prospects in applications including self-cleaning, anti-fog, anti-icing, corrosion resistance, droplet control, and friction power generation. Laser micromachining technology is an advanced method for prepar...
An analytical model is presented that allows predicting the progress and the final depth obtained by laser micromachining of grooves in metals with ultrashort laser pulses. The model assumes that micromachined grooves feature a V-shaped geometry and...
This paper presents a micromachining process for lithium niobate (LiNbO3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material....
We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD) camera, a beam splitter, and a mirror to focus a laser beam on the surface of a wo...
This paper presents the micromanufacturing of aluminum (Al) alloy microrods using micro turning as a competing process to other nontraditional micromachining methods. In that regard, the challenges in such manufacturing have been identified and overc...
The miniaturization of tools is an important step in human evolution to create faster devices as well as precise micromachines. Studies around this topic have allowed the creation of small-scale objects capable of a wide range of deformation to achie...
Micromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples. Within this water lay...
This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE), and glass reflow techniques. The advantages as well as disadvantages of each method are presented and discussed in light of the expe...
In this study a prototype sub-picosecond laser was investigated for cutting and scribing of silicon wafers. The Yb:KYW laser used for this investigation, unlike ultrashort systems used previously, generates pulses of 650 fs, i.e., between the pico an...
Terahertz metal rectangular cavity structures are widely used in terahertz devices due to their performance advantages, and various microfabrication techniques have been applied to the manufacturing of their high performance. In this paper, several t...
Femtosecond lasers are widely applied in scientific and industrial fields. Recent trends in the laser market show decreasing prices for femtosecond units, which will ultimately lead to the opening of new markets that were inaccessible in the past due...
Sapphire is a robust and wear-resistant material. However, efficient and high-quality micromachining is still a challenge. This contribution demonstrates and discusses two novels, previously unreported approaches for femtosecond laser-based micromach...
Glass-based microfluidic devices are essential for applications such as diagnostics and drug discovery, which utilize their optical clarity and chemical stability. This review systematically analyzes pulsed laser micromachining as a transformative te...
The application of a carbon nanowall (CNW) via transfer is very demanding due to the unusual structure of vertically grown wall-shaped that easily collapses. In addition, direct growth on a device cannot obtain a precision-patterned shape because of...
In this report we investigate the performance of various beam shutter technologies when applied to femtosecond laser micromachining. Three different shutter options are considered: a mechanical blade shutter, a bistable rotary solenoid shutter, and a...
Micromachining in the micro-electric discharge machining (μ-EDM) process requires high material-removal rate with good surface quality. Power-mixed μ-EDM, a modified machining process by introducing specific powder into the dielectric fluid, is...
Smart ceramic materials are next generation materials with the inherent intelligence to adapt to change in the external environment. These materials are destined to play an essential role in several critical engineering applications. Machining these...
An excimer laser three-dimensional (3D) micromachining system is proposed based on a mask image projection method and the optical diffraction effect. The effects of optical diffraction on the laser machining rate are evaluated using a hole-arrayed ma...
We report on the application of femtosecond laser micromachining to the fabrication of complex glass microdevices, for high-order harmonic generation in gas. The three-dimensional capabilities and extreme flexibility of femtosecond laser micromachini...
The instability of machining process caused by the difficulty of the electrolyte refresh in electrochemical micromachining (EMM) of micro through-hole has been an unsolved problem. Thus, this paper investigates the electrochemical micromachining of m...
The ratchet click mechanism in mechanical watch movements is a micro-component essential to prevent the unwinding of the caliber mainspring, providing secure energy storage during recharging. Despite its geometrical simplicity, the ratchet click unde...
Through-mask electrochemical micromachining (TMEMM) is a promising method to prepare micro dimples on the surface of metallic parts. However, the workpiece is machined one by one in traditional TMEMM. This paper introduced bidirectional pulse to TMEM...
Wire electrochemical micromachining (WECMM) technology is regarded a promising method to fabricate high aspect ratio microstructures on hard-to-machining materials, however, the by-product accumulation in the machining gap limits its application. In...
Biocompatible polymers are used for many different purposes (catheters, artificial heart components, dentistry products, etc.). An important field for biocompatible polymers is the production of vision implants known as intraocular lenses or custom-s...
A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg1/3Nb2/3)–x%PbTiO3 (PMN–x%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN–31%PT with micron-sized ke...
Microstructures on metal surfaces with diameters of tens to hundreds of micrometers and depths of several micrometers to tens of micrometers can improve the performance of engineering parts. Air-shielding electrochemical micromachining (AS-EMM) is a...
This study involves the fabrication and measurement of a flexible thermoelectric generator (FTG) using micromachining and electroplating processes. The area of the FTG is 46 × 17 mm2, and it is composed of 39 thermocouples in series. The thermo...
Micromachining has gained considerable interest across a wide range of applications. It ensures the production of microfeatures such as microchannels, micropockets, etc. Typically, the manufacturing of microchannels in bioceramics is a demanding task...
To fulfil the requirements for high-resolution organic light-emitting diode (OLED) displays, precise and high-quality micrometer-scale patterns have to be fabricated inside metal shadow masks. Invar has been selected for this application due to its u...
Laser micromachining is a direct write microfabrication technology that has several advantages over traditional micro/nanofabrication techniques. In this paper, we present a comprehensive characterization of a QuikLaze 50ST2 multimodal laser micromac...
Laser micromachining technique offers a promising alternative method for rapid production of microfluidic devices. However, the effect of process parameters on the channel geometry and quality of channels on common microfluidic substrates has not bee...
We have introduced a new hybrid fabrication method for lab-on-a-chip devices through the combination of femtosecond laser micromachining and removable insert micro-injection molding. This method is particularly suited for the fast prototyping of new...
With the increase of working frequency, the feature size of a corrugated horn will be greatly reduced, causing challenges for fabrication. This paper investigated wire electrochemical micromachining (WECMM) of aluminum rings for assembly of a mandrel...
Various lithography techniques have been widely used for the fabrication of next-generation device applications. Micro/nanoscale pattern structures formed by lithographic methods significantly improve the performance capabilities of the devices. Here...
Radial ultrasonic rolling electrochemical micromachining (RUR-EMM) is a new method of electrochemical machining (ECM). By feeding small and rotating electrodes aided by ultrasonic rolling, an array of pits can be manufactured, which is called microst...
The design and synthesis of sol-gel silica-based hybrid materials and composites offer significant benefits to obtain innovative biomaterials with controlled porosity at the nanostructure level for applications in bone tissue engineering. In this wor...
Fabry-Perot cavity (FPC) based on Fiber Bragg gratings (FBGs) is an excellent candidate for fiber sensing and high-precision measurement. The advancement of the femtosecond laser micromachining technique provides more choices for the fabrication of F...
Wire electrochemical discharge machining (WECDM) integrates the effectiveness of electrical discharge machining (EDM) with the superior quality of electrochemical machining (ECM), leading to enhanced machining efficiency, excellent surface finish, an...
To solve the problem of the nonuniform distribution of temperature and electrolytic products in the electrolyte flow field during through-mask electrochemical micromachining, the use of a rotating cathode with surface structures is proposed. The rota...
With the increasing application of three-dimensional pure aluminum microstructures in micro-electromechanical systems (MEMS) and for fabricating terahertz components, high-quality micro-shaping of pure aluminum has gradually attracted attention. Rece...
Tactile sensors are important bionic microelectromechanical systems that are used to implement an artificial sense of touch for medical electronics. Compared with the natural sense of touch, this artificial sense of touch provides more quantitative i...
This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrate...
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