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Open AccessArticle

Reliable Nanofabrication of Single-Crystal Diamond Photonic Nanostructures for Nanoscale Sensing

Faculty of Natural Sciences and Technology, Saarland University, Physics, Campus E2.6, 66123 Saarbrücken, Germany
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Author to whom correspondence should be addressed.
Current address: Department of Organic and Macromolecular Chemistry, Ghent University Krijgslaan 281, building S4, 9000 Gent, Belgium.
Micromachines 2019, 10(11), 718; https://doi.org/10.3390/mi10110718
Received: 26 September 2019 / Revised: 16 October 2019 / Accepted: 17 October 2019 / Published: 24 October 2019
(This article belongs to the Special Issue 10th Anniversary of Micromachines)
In this manuscript, we outline a reliable procedure to manufacture photonic nanostructures from single-crystal diamond (SCD). Photonic nanostructures, in our case SCD nanopillars on thin (<1 μ m) platforms, are highly relevant for nanoscale sensing. The presented top-down procedure includes electron beam lithography (EBL) as well as reactive ion etching (RIE). Our method introduces a novel type of inter-layer, namely silicon, that significantly enhances the adhesion of hydrogen silsesquioxane (HSQ) electron beam resist to SCD and avoids sample charging during EBL. In contrast to previously used adhesion layers, our silicon layer can be removed using a highly-selective RIE step, which is not damaging HSQ mask structures. We thus refine published nanofabrication processes to ease a higher process reliability especially in the light of the advancing commercialization of SCD sensor devices. View Full-Text
Keywords: top-down nanofabrication; single-crystal diamond; HSQ; electron beam lithography; inductively coupled-reactive ion etching (ICP-RIE) top-down nanofabrication; single-crystal diamond; HSQ; electron beam lithography; inductively coupled-reactive ion etching (ICP-RIE)
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MDPI and ACS Style

Radtke, M.; Nelz, R.; Slablab, A.; Neu, E. Reliable Nanofabrication of Single-Crystal Diamond Photonic Nanostructures for Nanoscale Sensing. Micromachines 2019, 10, 718.

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