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17 November 2025

Fast Thermal Resistance Distribution Analysis in High-Power VCSEL Array Module

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1
Institute of Advanced Technology on Semiconductor Optics & Electronics, School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing 100124, China
2
Key Laboratory of Trans-Scale Laser Manufacturing Technology (Beijing University of Technology), Ministry of Education, Beijing 100124, China
*
Authors to whom correspondence should be addressed.
Materials2025, 18(22), 5210;https://doi.org/10.3390/ma18225210 
(registering DOI)
This article belongs to the Topic Advances in Microelectronics and Semiconductor Engineering

Abstract

Vertical-cavity surface-emitting lasers (VCSELs) have generated extensive enthusiasm in scientific research on and applications of lasers. However, thermal resistance has seriously limited the performance of such devices for a long time, especially in high-power single-chip large-area VCSEL array modules. In this study, in order to determine the packaging thermal resistance bottleneck of the high-power VCSEL array laser module and achieve better performance, the thermal characteristics of an 808 nm VCSEL module were analyzed quickly with electrical transient measurements without any damage, which consisted of a 6 mm × 6 mm, 85 W, AlGaAs/GaAs VCSEL array chip encapsulated on a submount and a water-cooled heat sink. The quantitative components of the device’s thermal resistance were clearly segmented and rapidly obtained within merely 25 s using the structure function algorithm. The packaging thermal resistances together accounted for an astonishing 70% of the total thermal resistance when the loading current was 8 A. Among them, Rsubmount and Rsolder2 were the main focus areas, which accounted for 54% of the total thermal resistance. We also applied the spectroscopy method to calculate the total thermal resistance of the module on a large scale from another perspective for the comparative verification of the electrical transient method. The values obtained by the two methods were relatively close. More importantly, this research will have a positive impact and an indicative effect on reducing the main thermal resistances of the VCSEL array module.

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