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Journal: Materials, 2021
Volume: 14
Number: 1038
Article:
Influence of Conditioning Temperature on Defects in the Double Al2O3/ZnO Layer Deposited by the ALD Method
Authors:
by
Katarzyna Gawlińska-Nęcek, Mateusz Wlazło, Robert Socha, Ireneusz Stefaniuk, Łukasz Major and Piotr Panek
Link:
https://www.mdpi.com/1996-1944/14/4/1038
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