Open AccessArticle
Real-Time Ozone Detection Based on a Microfabricated Quartz Crystal Tuning Fork Sensor
by
Rui Wang 1,2, Francis Tsow 1,2, Xuezhi Zhang 3, Jhih-Hong Peng 2, Erica S. Forzani 1,2, Yongsheng Chen 3,*, †, John C. Crittenden 3,*, †, Hugo Destaillats 3,4,* and Nongjian Tao 1,2,*
1
Biodesign Institute, Arizona State University, Tempe, AZ, 85287-5801 USA
2
Department of Electrical Engineering, Arizona State University, Tempe, AZ, 85287-5801 USA
3
School of Sustainable Engineering and the Built Environment, Arizona State University, Tempe, AZ, 85287-5801 USA
4
Indoor Environment Department, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
†
Current address: Georgia Institute of Technology, School of Civil and Environmental Engineering.
Cited by 24 | Viewed by 11704
Abstract
A chemical sensor for ozone based on an array of microfabricated tuning forks is described. The tuning forks are highly sensitive and stable, with low power consumption and cost. The selective detection is based on the specific reaction of the polymer with ozone.
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A chemical sensor for ozone based on an array of microfabricated tuning forks is described. The tuning forks are highly sensitive and stable, with low power consumption and cost. The selective detection is based on the specific reaction of the polymer with ozone. With a mass detection limit of ~2 pg/mm
2 and response time of 1 second, the sensor coated with a polymer sensing material can detect ppb-level ozone in air. The sensor is integrated into a miniaturized wearable device containing a detection circuit, filtration, battery and wireless communication chip, which is ideal for personal and microenvironmental chemical exposure monitoring.
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