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Article

Responsivity and NEP Improvement of Terahertz Microbolometer by High-Impedance Antenna

1
Graduate School of Science and Technology, Shizuoka University, Hamamatsu 432-8011, Japan
2
Department of Electrical Engineering, Faculty of Engineering, Universitas Indonesia, Depok 16424, Indonesia
3
Research Institute of Electronics, Shizuoka University, Hamamatsu 432-8011, Japan
*
Author to whom correspondence should be addressed.
Academic Editor: Vladimir Pavelyev
Sensors 2022, 22(14), 5107; https://doi.org/10.3390/s22145107
Received: 20 May 2022 / Revised: 27 June 2022 / Accepted: 4 July 2022 / Published: 7 July 2022
(This article belongs to the Special Issue UV, Infrared and THz Radiation Sensing System)
The antenna-coupled microbolometer with suspended titanium heater and thermistor was attractive as a terahertz (THz) detector due to its structural simplicity and low noise levels. In this study, we attempted to improve the responsivity and noise-equivalent power (NEP) of the THz detector by using high-resistance heater stacked on the meander thermistor. A wide range of heater resistances were prepared by changing the heater width and thickness. It was revealed that the electrical responsivity and NEP could be improved by increasing the heater’s resistance. To make the best use of this improvement, a high-impedance folded dipole antenna was introduced, and the optical performance at 1 THz was found to be better than that of the conventional halfwave dipole antenna combined with a low-resistance heater. Both the electrical and optical measurement results indicated that the increase in heater resistance could reduce the thermal conductance in the detector, thus improved the responsivity and NEP even if the thermistor resistance was kept the same. View Full-Text
Keywords: terahertz; thermal detector; thermistor; heater; halfwave dipole; folded dipole; antenna; electron beam lithography; responsivity; noise equivalent power terahertz; thermal detector; thermistor; heater; halfwave dipole; folded dipole; antenna; electron beam lithography; responsivity; noise equivalent power
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MDPI and ACS Style

Aji, A.P.; Satoh, H.; Apriono, C.; Rahardjo, E.T.; Inokawa, H. Responsivity and NEP Improvement of Terahertz Microbolometer by High-Impedance Antenna. Sensors 2022, 22, 5107. https://doi.org/10.3390/s22145107

AMA Style

Aji AP, Satoh H, Apriono C, Rahardjo ET, Inokawa H. Responsivity and NEP Improvement of Terahertz Microbolometer by High-Impedance Antenna. Sensors. 2022; 22(14):5107. https://doi.org/10.3390/s22145107

Chicago/Turabian Style

Aji, Arie Pangesti, Hiroaki Satoh, Catur Apriono, Eko Tjipto Rahardjo, and Hiroshi Inokawa. 2022. "Responsivity and NEP Improvement of Terahertz Microbolometer by High-Impedance Antenna" Sensors 22, no. 14: 5107. https://doi.org/10.3390/s22145107

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