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Open AccessArticle

A Low Temperature Drifting Acoustic Wave Pressure Sensor with an Integrated Vacuum Cavity for Absolute Pressure Sensing

by Tao Wang 1,2,3,*, Zhengjie Tang 1,2,3, Huamao Lin 3, Kun Zhan 1,2, Jiang Wan 1,2, Shihao Wu 3, Yuandong Gu 3, Wenbo Luo 1,2 and Wanli Zhang 1,2
1
University of Electronic Science and Technology of China, School of Electronic Science and Engineering, Xiyuan Avenue, Chengdu 611731, China
2
University of Electronic Science and Technology of China, State Key Laboratory of Electronic Thin Film and Integrated Devices, Xiyuan Avenue, Chengdu 611731, China
3
Shanghai Industrial μTechnology Research Institute, No. 235, Chengbei Road, Jiading District, Shanghai 201800, China
*
Author to whom correspondence should be addressed.
Sensors 2020, 20(6), 1788; https://doi.org/10.3390/s20061788
Received: 8 January 2020 / Revised: 3 March 2020 / Accepted: 18 March 2020 / Published: 24 March 2020
(This article belongs to the Special Issue Piezoelectric Transducers)
In this paper we demonstrate a novel acoustic wave pressure sensor, based on an aluminum nitride (AlN) piezoelectric thin film. It contains an integrated vacuum cavity, which is micro-fabricated using a cavity silicon-on-insulator (SOI) wafer. This sensor can directly measure the absolute pressure without the help of an external package, and the vacuum cavity gives the sensor a very accurate reference pressure. Meanwhile, the presented pressure sensor is superior to previously reported acoustic wave pressure sensors in terms of the temperature drift. With the carefully designed dual temperature compensation structure, a very low temperature coefficient of frequency (TCF) is achieved. Experimental results show the sensor can measure the absolute pressure in the range of 0 to 0.4 MPa, while the temperature range is from 20 °C to 220 °C with a TCF of −14.4 ppm/°C. Such a TCF is only about half of that of previously reported works. View Full-Text
Keywords: piezoelectric; acoustic wave; pressure sensor; temperature compensation; vacuum cavity piezoelectric; acoustic wave; pressure sensor; temperature compensation; vacuum cavity
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Wang, T.; Tang, Z.; Lin, H.; Zhan, K.; Wan, J.; Wu, S.; Gu, Y.; Luo, W.; Zhang, W. A Low Temperature Drifting Acoustic Wave Pressure Sensor with an Integrated Vacuum Cavity for Absolute Pressure Sensing. Sensors 2020, 20, 1788.

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