A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is des...
Physiological pressure measurement is one of the most common applications of sensors in healthcare. Particularly, continuous pressure monitoring provides key information for early diagnosis, patient-specific treatment, and preventive healthcare. This...
We have proposed a novel concept of a pressure sensor called electroluminescent pressure sensor (ELPS) based on oxygen quenching of electroluminescence. The sensor was fabricated as an organic light-emitting device (OLED) with phosphorescent dyes who...
To realize the practical applications of flexible pressure sensors, the high performance (sensitivity and response time) as well as more functionalities are highly desired. In this work, we fabricated a piezoresistive pressure sensor based on the mic...
Accurate monitoring of intracranial pressure (ICP) is critical for the diagnosis and management of neurological disorders. Although various ICP sensors have been developed, their sensitivity is often limited, restricting their ability to detect subtl...
Flexible pressure sensors that can maintain their pressure sensing ability with arbitrary deformation play an essential role in a wide range of applications, such as aerospace, prosthetics, robotics, healthcare, human–machine interfaces, and el...
An automated device is designed to measure the density of a liquid material using hydrostatic pressure method. A low cost pressure sensor is calibrated and used to get highly accurate readings. The calibration is done by measuring the pressure values...
In recent years, research into the field of materials for flexible sensors and fabrication techniques directed towards wearable devices has helped to raise awareness of the need for new sensors with healthcare applicability. Our goal was to create a...
A biodegradable inductively coupled pressure sensor is presented. Three sensors were fabricated using melt processed biodegradable polymers and electron-beam evaporated magnesium. All the sensors showed similar pressure responses from 0 to 0.2 bar. I...
This article presents the design, construction, and evaluation of an easy-to-build textile pressure resistive sensor created from low-cost conventional anti-static sheets and conductive woven fabrics. The sensor can be built quickly using standard ho...
With the development of energetic materials (EMs) and microelectromechanical systems (MEMS) initiating explosive devices, the measurement of detonation pressure generated by EMs in the microscale has become a pressing need. This paper develops a mang...
In recent years, repackaging technology has been widely used in miniaturized implantable pressure sensors. However, the current packaging structure still has significant problems regarding biocompatibility, environmental adaptability, and measurement...
This paper proposes a novel micro-electromechanical system (MEMS) piezoresistive pressure sensor with a four-petal membrane combined with narrow beams and a center boss (PMNBCB) for low-pressure measurements. The stresses induced in the piezoresistor...
The rapid advancement of the Internet of Things (IoT) serves as a significant driving force behind the development of innovative sensors and actuators. This technological progression has created a substantial demand for new flexible pressure sensors,...
This work presents the design, fabrication, and rigorous validation of a flexible, wireless, capacitive pressure sensor for the full-range continuous monitoring of ventricular pressure. The proposed system consists of an implantable set and an extern...
A quartz resonant pressure sensor is proposed for high-precision measurement of ultra-high pressure. The resonant unit realizes a push–pull differential layout, which restrains the common-mode interference factor, and the resonator is only subj...
This paper will discuss the results obtained with a first prototype of a completely passive and wireless low pressure sensor. The device is a heat conductivity gauge, based on a wireless and passive SAW temperature sensor. The required heating energy...
The arterial blood pressure (ABP) waveform contains essential information concerning the hemodynamic status and its relation to the diagnosis of cardiovascular conditions. Therefore, the continuous monitoring of the ABP waveform has become important....
With advances in new materials and technologies, there has been increasing research focused on flexible sensors. However, in most flexible pressure sensors made using new materials, it is challenging to achieve high detection sensitivity across a wid...
Monitoring of intracranial pressure (ICP) is important for patients at risk of raised ICP, which may indicate developing diseases in brains that can lead to brain damage or even death. Monitoring ICP can be invaluable in the management of patients su...
This paper presents a method for preparing a pressure sensor that is insensitive to acceleration along with experimental evidence of its efficacy in aerodynamic analysis. A literature review and preliminary studies revealed the undesirable effect of...
Micro-electro-mechanical systems (MEMS) sensors offer the benefits of compact size, lightweight design, and low cost, which has led to widespread use in consumer electronics, vehicles, healthcare, defense, and communications. As their performance has...
Ionic pressure sensors are made of ionic compounds suspended in a suitable solvent mixture. When external pressure is exerted on them, it is reflected as a change in electrical parameters due to physical deformation and a redistribution of ions withi...
Hard-shell thoracolumbar sacral orthoses (TLSOs) are used for treating idiopathic scoliosis, a deformation of the spine with a sideways curvature. The pressure required inside the TLSO for ideal corrective results remains unclear. Retrofitting TLSOs...
Flexible pressure sensors are increasingly being used in medical and non-medical applications, and particularly in innovative health monitoring. Their efficacy in medical applications such as compression therapy depends on the accuracy and repeatabil...
We propose a wireless pressure sensor composed of a graphene sheet and a transmitter coil integrated with a polydimethylsiloxane (PDMS) tube. The pressure inside the tube was monitored wirelessly using an external receiver coil. We then monitored the...
Flexible pressure sensors have been increasingly proposed for clinical monitoring applications. However, the available evidence on the technical characteristics and the biomedical applications of these technologies remains fragmented. To fill this ga...
Flexible pressure sensors that emulate the sensation and characteristics of natural skins are of great importance in wearable medical devices, intelligent robots, and human–machine interfaces. The microstructure of the pressure-sensitive layer...
This paper presents the simulation, fabrication and characterization of a microFET (field effect transistor) pressure sensor with readout circuits. The pressure sensorincludes 16 sensing cells in parallel. Each sensing cell that is circular shape is...
Atmospheric pressure measurements based on microelectromechanical systems (MEMSs) can extend accessibility to altitude information. A differential pressure sensor using a thin cantilever and an air chamber is a promising sensing element for sub-centi...
A pressure sensor in the range of 0–120 MPa with a square diaphragm was designed and fabricated, which was isolated by the oil-filled package. The nonlinearity of the device without circuit compensation is better than 0.4%, and the accuracy is...
With the development of the micro electromechanical system (MEMS), which widely adopts micro differential pressure sensors (MDPSs), the demand for high-performance MDPSs had continuously increased. Pressure sensors realized using MEMS technology inte...
In the present study, we propose and develop a flexible pressure sensor based on the piezoresistive effect of multilayer graphene films on polyester textile. The pressure response results from the deformation of graphene conductive network structure...
A flexible microfluidic super-capacitive pressure sensor is developed to measure the surface pressure of a complex structure. The innovative sensor contains a filter paper filled with ionic liquid, and coated with two indium tin oxide polyethylene te...
Many studies on pressure sensor (PS) placement and pressure reducing valve (PRV) localization in water distribution systems (WDSs) have been made with the objective of improving water leakage detection and pressure reduction, respectively. However, d...
In this paper, a pressure sensor for low pressure detection (0.5 kPa–40 kPa) is proposed. In one structure (No. 1), the silicon membrane is partly etched to form a crossed beam on its top for stress concentration. An aluminum layer is also deposited...
Flexible capacitive pressure sensors have been widely developed to be used in electronic skin, human movement, real-time health monitoring, and human–machine interactions. This paper introduces a Flexible Capacitive Pressure Sensor Array (FCPSA...
In this study, a subminiature implantable capacitive pressure sensor is proposed for biomedical applications. The proposed pressure sensor comprises an array of elastic silicon nitride (SiN) diaphragms formed by the application of a polysilicon (p-Si...
When grasping objects with uneven or varying shapes, accurate pressure measurement on robot fingers is critical for precise robotic gripping operations. However, measuring the pressure from the sides of the fingertips remains challenging owing to the...
Recent extensive research on flexible electronics has led to the development of various flexible sensors. In particular, sensors inspired by the slit organs of a spider, which utilize cracks in a metal film to measure strain, have garnered considerab...
This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezores...
A piezoresistive electrical bagging material with minimal cost and profile, such as linqstat or velostat, is a good choice for pressure-sensing systems in robotic arm grippers. This paper’s main objective is to examine the performance of a uniq...
In order to correctly measure the shock wave pressure generated by a near-field explosion, and while considering the limitations of the measurement and calibration method of the current bar pressure sensor, an improved shock wave pressure measurement...
Smart wearable devices are extensively utilized across diverse domains due to their inherent advantages of flexibility, portability, and real-time monitoring. Among these, flexible sensors demonstrate exceptional pliability and malleability, making t...
Although skin-like pressure sensors exhibit high sensitivity with a high performance over a wide area, they have limitations owing to the critical issue of being linear only in a narrow strain range. Various strategies have been proposed to improve t...
Measuring the foot plantar pressure has the potential to be an important tool in many areas such as enhancing sports performance, diagnosing diseases, and rehabilitation. In general, the plantar pressure sensor should have robustness, durability, and...
Pressure measurements in high-temperature applications, including compressors, turbines, and others, have become increasingly critical. This paper proposes an implantable passive LC pressure sensor based on an alumina ceramic material for in situ pre...
A bio-inspired absolute pressure sensor network has been developed. Absolute pressure sensors, distributed on multiple silicon islands, are connected as a network by stretchable polyimide wires. This sensor network, made on a 4’’ wafer, has 77 nodes...
In this study, we fabricated a wireless micro FET (field effect transistor) pressure sensor based on the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The wireless micro pressure sensor is composed of a FET pre...
This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and...
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